公开(公告)号：US5436464A

公开(公告)日：1995-07-25

申请号：US044197

申请日：1993-04-08

申请人： Fuminori Hayano ,  Hideyuki Tashiro ,  Tsuneyuki Hagiwara ,  Hajime Moriya

发明人： Fuminori Hayano ,  Hideyuki Tashiro ,  Tsuneyuki Hagiwara ,  Hajime Moriya

IPC分类号： G01N21/94 ,  G01N21/88

CPC分类号： G01N21/94

摘要： In a foreign particle inspecting method and apparatus in which a polarized beam is applied to a surface to be inspected through a light transmitting member mounted thereon, in which scattered light from a foreign particle on the surface to be inspected is received by a light receiving device through the light transmitting member, and in which the foreign particle is discriminated based on a detection signal from the light receiving device, the detection signal is corrected in conformity with the transmittance of the light transmitting member for polarized incident scanning light and the transmittance of the light transmitting member for non-polarized light scattered from the foreign particle, for various angles of incidence of the polarized light and emergence of the non-polarized light. Foreign particle data may be indicated by a mapping method.

摘要翻译： 在通过安装在其上的透光构件将偏振光束施加到被检查表面的异物检测方法和装置中，其中待检测表面上的异物的散射光被光接收装置接收 通过透光构件，并且根据来自光接收装置的检测信号鉴别异物，检测信号根据用于偏振入射扫描光的透光构件的透射率和 用于从异物散射的非偏振光的透光构件，用于偏振光的各种入射角和非偏振光的出射。 外来粒子数据可以用映射方法表示。