公开(公告)号：US20100053716A1

公开(公告)日：2010-03-04

申请号：US12553015

申请日：2009-09-02

申请人： Toshiyuki Ogawa ,  Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Toshiyuki Ogawa ,  Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： G02B26/08 ,  H01L21/308 ,  H01L29/04

CPC分类号： B81C1/00396 ,  B81B2201/047 ,  B81B2203/0118 ,  B81C1/0042 ,  B81C1/00626 ,  H01L21/3083

摘要： In a fabrication method of fabricating a structure, a basic etching mask corresponding a target shape with a convex corner, and a correction etching mask with a first portion, a second portion and an opening portion are formed on a single-crystal silicon substrate with a (100) principal face, and the silicon substrate with the basic etching mask and the correction etching mask formed thereon is subjected to an anisotropic etching to form the silicon substrate having the target shape. The first portion extends in a direction, respective ends of the first portion are connected to the basic etching mask, and at least one end of the first portion is connected to the convex corner of the basic etching mask. The second portion is connected to a side of the first portion extending in the direction, the second portion includes at least one convex corner, and the opening portion extends straddling a boundary between the first portion and the second portion.

摘要翻译： 在制造结构的制造方法中，将具有凸角的目标形状的基本蚀刻掩模和具有第一部分，第二部分和开口部分的校正蚀刻掩模形成在单晶硅衬底上，具有 （100）主面，并且将具有基本蚀刻掩模的硅衬底和其上形成的校正蚀刻掩模进行各向异性蚀刻以形成具有目标形状的硅衬底。 第一部分沿<110>方向延伸，第一部分的相应端部连接到基本蚀刻掩模，并且第一部分的至少一个端部连接到基本蚀刻掩模的凸角。 第二部分连接到沿着<110>方向延伸的第一部分的一侧，第二部分包括至少一个凸形拐角，并且开口部分跨越第一部分和第二部分之间的边界延伸。

公开(公告)号：US20090130857A1

公开(公告)日：2009-05-21

申请号：US12271993

申请日：2008-11-17

申请人： Kazutoshi Torashima ,  Takahisa Kato ,  Takahiro Akiyama

发明人： Kazutoshi Torashima ,  Takahisa Kato ,  Takahiro Akiyama

IPC分类号： H01L21/302 ,  G03F1/00

CPC分类号： B81C1/0042 ,  B81C1/00626 ,  G02B26/0833 ,  H01L21/3086

摘要： A method of manufacturing a structure includes a first step of forming, on a monocrystal silicon substrate having a (100) surface as a principal surface, a basic etching mask corresponding to a target shape and having at least a first structure with a projecting corner and a second structure adjoining the first structure with an opening intervening therebetween, and a correction etching mask extending from the projecting corner of an etching mask of the first structure and connected to an etching mask of the second structure, and a second step of performing anisotropic etching of the monocrystal silicon substrate having the basic etching mask and the correction etching mask to form the target shape.

摘要翻译： 一种制造结构的方法包括：在具有（100）表面作为主表面的单晶硅衬底上形成与目标形状对应的至少具有突出角的第一结构的基本蚀刻掩模的第一步骤， 与第一结构邻接的第二结构，其间具有开口;以及校正蚀刻掩模，其从第一结构的蚀刻掩模的投影角延伸并连接到第二结构的蚀刻掩模，以及执行各向异性蚀刻的第二步骤 具有基本蚀刻掩模和校正蚀刻掩模的单晶硅衬底以形成目标形状。

公开(公告)号：US07446497B2

公开(公告)日：2008-11-04

申请号：US11609880

申请日：2006-12-12

申请人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Masakazu Niwa

发明人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Masakazu Niwa

IPC分类号： G05B11/18

CPC分类号： G05B19/19 ,  G05B2219/42104

摘要： A fixed-position stop control apparatus (10) includes: a move-instruction generating means (22) for generating a move instruction for each control cycle; a position loop control means (25) for position controlling a rotation shaft (61) for each control cycle according to the move instruction generated by the move-instruction generating means; and a speed loop control means (35) for speed controlling the rotation shaft according to one of a speed instruction generated by a higher level control apparatus (45) and a predetermined speed instruction, thereby switching the speed control of the rotation shaft by the speed loop control means to the position control of the rotation shaft by the position loop control means. In this fixed-position stop control apparatus, the move instruction generated by the move-instruction generating means has acceleration smaller than the acceleration corresponding to the acceleration and deceleration ability of the rotation shaft. With this arrangement, time required for the rotation shaft to stop at a fixed position can be decreased.

摘要翻译： 固定位置停止控制装置（10）包括：移动指令生成装置（22），用于生成每个控制周期的移动指令; 位置循环控制装置，用于根据由所述移动指令产生装置产生的移动指令对每个控制循环进行位置控制旋转轴; 以及用于根据由上位控制装置（45）产生的速度指令和预定速度指令之一速度控制旋转轴的速度环控制装置（35），从而将旋转轴的速度控制切换到速度 循环控制装置通过位置环控制装置转动到旋转轴的位置控制。 在该固定位置停止控制装置中，由移动指令发生装置产生的移动指令的加速度小于与旋转轴的加速和减速能力对应的加速度。 通过这种布置，可以减少旋转轴在固定位置停止所需的时间。

公开(公告)号：US20070291343A1

公开(公告)日：2007-12-20

申请号：US11756003

申请日：2007-05-31

申请人： TAKAHISA KATO ,  Yukio Furukawa ,  Takahiro Akiyama

发明人： TAKAHISA KATO ,  Yukio Furukawa ,  Takahiro Akiyama

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  B81B3/0067 ,  B81B2201/042 ,  B81B2203/0181 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T156/1052

摘要： An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.

摘要翻译： 一种振荡器装置及其制造方法，其能够通过宽范围和高速度调节摆动构件的惯性矩或重心位置，其中振荡构件围绕振荡轴线17摆动，并且其包括可移动 元件11和质量调节构件19，空腔30限定在可动构件11和质量调节构件19的一部分之间，使得响应于用激光束照射质量调节构件19，材料 部分地去除与空腔30相邻的质量调节构件，从而被去除的材料包括未被激光束照射的质量调节构件的一部分。

公开(公告)号：US20050156555A1

公开(公告)日：2005-07-21

申请号：US11034875

申请日：2005-01-14

申请人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Junichi Tezuka

发明人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Junichi Tezuka

IPC分类号： H02P6/16 ,  H02P6/00 ,  H02P21/00 ,  H02P25/02 ,  H02P5/06

CPC分类号： H02P3/025 ,  H02P21/36 ,  H02P25/03

摘要： Disclosed is a method for detecting an angular difference between a motor magnetic pole position and an encoder reference position in a permanent magnet synchronous motor equipped with an incremental encoder, wherein a DC current command for supplying a monotonically decreasing DC current is applied to the permanent magnet motor for DC excitation, and the angular difference is detected by detecting an amount of rotor movement due to the DC excitation by using the incremental encoder. By applying a DC excitation current command for supplying a monotonically decreasing DC current rather than supplying a DC current of constant magnitude as in the prior art, it becomes possible, without estimating the initial magnetic pole position, to shorten the time required for the motor rotor to stop, while preventing the phenomenon in which the rotor does not stop at the magnetic pole position but oscillates around that position.

摘要翻译： 公开了一种用于检测装备有增量式编码器的永磁同步电动机中的电动机磁极位置与编码器基准位置之间的角度差的方法，其中用于提供单调递减的DC电流的DC电流指令被施加到永磁体 用于DC励磁的电动机，并且通过使用增量编码器检测由于DC激励引起的转子运动量来检测角度差异。 通过施加用于提供单调递减的DC电流的DC励磁电流指令而不是像现有技术那样提供恒定幅度的DC电流，可以在不估计初始磁极位置的情况下缩短电动机转子所需的时间 停止，同时防止转子不停在磁极位置但在该位置周围振荡的现象。

公开(公告)号：US06879130B2

公开(公告)日：2005-04-12

申请号：US10715857

申请日：2003-11-19

申请人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Junichi Tezuka

发明人： Yasusuke Iwashita ,  Takahiro Akiyama ,  Junichi Tezuka

IPC分类号： H02P21/00 ,  H02P21/08 ,  H02P27/04 ,  H02P3/36

CPC分类号： H02P21/10 ,  H02P21/09

摘要： A controller for a vector control of an induction motor, which is capable of easily determining a rotor resistance for use in calculation of a slip frequency. A temperature sensor is provided for detecting a temperature of a stator. Information on relation between the rotor temperature and the rotor resistance predetermined based on measurement is stored in a table. In driving the induction motor, the rotor resistance for the stator temperature detected by the temperature sensor is read from the table. A torque command I2 is divided by a magnetic flux command Φ2 and the obtained quotient is multiplied by the read value of the rotor resistance to obtain the slip frequency ωs, so that the vector control is performed based on the obtained slip frequency ωs. The value of the rotor resistance is easily determined by simply referring the table without complicated calculation. Since the stored information on the rotor resistance are based on measured values, a more precise value of the slip frequency is obtained to realize a precise vector control of the induction motor.

摘要翻译： 用于感应电机的矢量控制的控制器，其能够容易地确定用于计算滑差频率的转子电阻。 设置有用于检测定子的温度的温度传感器。 关于转子温度与基于测量值预定的转子电阻之间的关系的信息存储在表中。 在驱动感应电动机时，从表中读取由温度传感器检测的定子温度的转子电阻。 将转矩指令I2除以磁通指令Phi2，将所得到的乘数乘以转子电阻的读取值，得到转差频率ω，从而基于得到的转差频率ωo进行矢量控制。 通过简单地参考该表而不需要复杂的计算，可容易地确定转子电阻的值。 由于存储的关于转子电阻的信息基于测量值，所以获得更精确的转差频率值以实现感应电动机的精确矢量控制。

公开(公告)号：US06822414B2

公开(公告)日：2004-11-23

申请号：US10022385

申请日：2001-12-20

申请人： Yuuki Morita ,  Shinichi Kono ,  Takahiro Akiyama

发明人： Yuuki Morita ,  Shinichi Kono ,  Takahiro Akiyama

IPC分类号： G01R1302

CPC分类号： G05B19/33 ,  G05B2219/37092 ,  G05B2219/37181

摘要： A motor controller capable of obtaining information on offsets, amplitudes and a phase difference of analog feedback signals from encoders without using special measuring device. The analog feedback signals from the encoders are A/D converted and the offsets, the amplitudes and the phase difference of A-phase and B-phase analog feedback signals are obtained based on the converted digital signals by an arithmetic section. The obtained offsets, amplitudes and phase difference are displayed by a display section of the motor controller and/or a display section of a numerical controller as a host controller. Further, the obtained offsets and amplitudes are compared with respective reference values for determining acceptability of the feedback signals from the encoders and the results of the comparison is displayed by the display section and/or the display section of the numerical controller.

摘要翻译： 一种电机控制器，能够在不使用特殊测量装置的情况下获得关于编码器的模拟反馈信号的偏移，幅度和相位差的信息。 来自编码器的模拟反馈信号被A / D转换，并且通过算术部分基于转换的数字信号获得A相和B相模拟反馈信号的偏移量，幅度和相位差。 所获得的偏移量，幅度和相位差由电动机控制器的显示部分和/或数字控制器的显示部分显示为主机控制器。 此外，将获得的偏移和幅度与用于确定来自编码器的反馈信号的可接受性的各个参考值进行比较，并且比较的结果由数字控制器的显示部分和/或显示部分显示。