Abstract:
A pattern evaluation method includes: generating first array data from edge data on a pattern to be evaluated, the edge data on the pattern to be evaluated being shape data including edge points of the pattern to be evaluated; generating second array data from edge data on a reference pattern, the edge data on the reference pattern including edge points of the reference pattern which serves as an inspection standard of the pattern to be evaluated; subjecting each component of the second array data to array conversion processing, the array conversion processing being designed to convert a value of the component of the second array data into a function value of a value of a distance from that component to the edge point closest thereto, thereby generating third array data; executing arithmetic processing between the first array data and the third array data to generate fourth array data; and using a component of the fourth array data to calculate a numerical value representative of an relation between the pattern to be evaluated and the reference pattern.
Abstract:
A pattern misalignment measurement method includes acquiring an inspection image of a composite pattern formed by superposing a plurality of kinds of element patterns on each other, acquiring reference images of at least two kinds of element patterns from reference images which are images of reference patterns of the plurality of kinds of element patterns, performing first matching of each of the acquired reference images with the inspection image, and outputting misalignment between the element patterns in the composite pattern on the basis of the result of the first matching.
Abstract:
a pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern includes an edge model producing part which produces a pattern edge model and an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with the pattern edge model to detect coordinates of an edge point of the pattern.
Abstract:
A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern; combining the edge points between the patterns to make a pair of edge points and calculating a distance between the edge points constituting each pair of edge points and an angle between a straight line which connects the edge point to the other edge point and an arbitrary axial line with respect to each pair of edge points to prepare a distance angle distribution map which is a distribution map of the calculated distance and angle of the pair of edge points; and evaluating at least one of a relation of shape between the patterns, a relation of size between the patterns, and a relative location between the patterns on the basis of the prepared distance angle distribution map.
Abstract:
A pattern evaluation method includes: generating first array data from edge data on a pattern to be evaluated, the edge data on the pattern to be evaluated being shape data including edge points of the pattern to be evaluated; generating second array data from edge data on a reference pattern, the edge data on the reference pattern including edge points of the reference pattern which serves as an inspection standard of the pattern to be evaluated; subjecting each component of the second array data to array conversion processing, the array conversion processing being designed to convert a value of the component of the second array data into a function value of a value of a distance from that component to the edge point closest thereto, thereby generating third array data; executing arithmetic processing between the first array data and the third array data to generate fourth array data; and using a component of the fourth array data to calculate a numerical value representative of an relation between the pattern to be evaluated and the reference pattern.
Abstract:
In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the optical fiber is a polarization maintaining optical fiber comprising the core region, a stress-applying region, and a clad region, and the optical fiber probe is formed by mechanical-grinding of the edge of the optical fiber into a sharpened shape so that the core region is located at the tip of a sharpened portion, and by dipping the formed edge of the optical fiber in an etchant for further sharpening the core region. Accordingly, a new optical fiber probe both with a high transmission efficiency and with a large polarization degree is obtained.
Abstract:
An inductance element of the type that includes a coil bobbin having flanges at the ends thereof, a pair of pot cores engaging the bobbin, and a fastening member for fastening together the pot cores and bobbin. At least one of the bobbin flanges includes a joining part that extends outwardly from the bobbin flange and engages both the adjacent one of the pot cores and the fastening member to prevent relative rotation of the bobbin and adjacent pot core and fastening member. One of the bobbin flanges may include a stepped part having pins extending therefrom for making electrical connection to the inductance element. The stepped part is spaced from the bobbin flange, and connection wires may extend within the space.
Abstract:
The new structure of a ferrite core for the use of a power transformer and/or a choke coil has been found. The core is assembled by a pair of identical core halves, and each core half comprises (a) a circular center boss (6), (b) a pair of outer walls (7, 8) positioned at both the sides of said boss for mounting a coil, (c) a pair of base plates (9, 10) coupling said center boss and said outer walls, (d) each of the outer walls being substantially rectangular with an external linear wall and an inner curved wall, (e) the core half being symmetrical with regard to the first plane including a center axis of said boss and being parallel with the external linear walls of said outer walls, (f) a concaved opening (R) being provided between said base plates in the first side of the core half with regard to the reference plane which includes a center axis of said boss and is perpendicular to said first plane, (g) the length (B.sub.1) between said reference plane to the end of the first side which includes said concaved opening (R) being longer than the length (B.sub.2) between said reference plane to the end of the second side which does not have said opening (R), and (h) said length (B.sub.2) being the same as the radius (a.sub.1) of the center boss.