Pattern evaluation method, pattern matching method and computer readable medium

    公开(公告)号:US07702157B2

    公开(公告)日:2010-04-20

    申请号:US11391197

    申请日:2006-03-29

    Applicant: Tadashi Mitsui

    Inventor: Tadashi Mitsui

    CPC classification number: G06T7/0004 G03F7/7065 G06K9/6202 G06T2207/30148

    Abstract: A pattern evaluation method includes: generating first array data from edge data on a pattern to be evaluated, the edge data on the pattern to be evaluated being shape data including edge points of the pattern to be evaluated; generating second array data from edge data on a reference pattern, the edge data on the reference pattern including edge points of the reference pattern which serves as an inspection standard of the pattern to be evaluated; subjecting each component of the second array data to array conversion processing, the array conversion processing being designed to convert a value of the component of the second array data into a function value of a value of a distance from that component to the edge point closest thereto, thereby generating third array data; executing arithmetic processing between the first array data and the third array data to generate fourth array data; and using a component of the fourth array data to calculate a numerical value representative of an relation between the pattern to be evaluated and the reference pattern.

    Pattern misalignment measurement method, program, and semiconductor device manufacturing method
    52.
    发明申请
    Pattern misalignment measurement method, program, and semiconductor device manufacturing method 有权
    图案偏移测量方法,程序和半导体器件制造方法

    公开(公告)号:US20070248258A1

    公开(公告)日:2007-10-25

    申请号:US11785782

    申请日:2007-04-20

    Applicant: Tadashi Mitsui

    Inventor: Tadashi Mitsui

    Abstract: A pattern misalignment measurement method includes acquiring an inspection image of a composite pattern formed by superposing a plurality of kinds of element patterns on each other, acquiring reference images of at least two kinds of element patterns from reference images which are images of reference patterns of the plurality of kinds of element patterns, performing first matching of each of the acquired reference images with the inspection image, and outputting misalignment between the element patterns in the composite pattern on the basis of the result of the first matching.

    Abstract translation: 图案未对准测量方法包括获取通过将多种元素图案叠加而形成的复合图案的检查图像,从作为参考图案的参考图像的参考图像的参考图像中获取至少两种元素图案的参考图像 多种元素图案,基于第一匹配的结果,将所获取的参考图像中的每一个与检查图像进行第一匹配,并且输出复合图案中的元素图案之间的未对准。

    Pattern evaluation system, pattern evaluation method and program
    53.
    发明授权
    Pattern evaluation system, pattern evaluation method and program 有权
    模式评估系统,模式评估方法和程序

    公开(公告)号:US07274820B2

    公开(公告)日:2007-09-25

    申请号:US10252521

    申请日:2002-09-24

    Applicant: Tadashi Mitsui

    Inventor: Tadashi Mitsui

    Abstract: a pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern includes an edge model producing part which produces a pattern edge model and an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with the pattern edge model to detect coordinates of an edge point of the pattern.

    Abstract translation: 接收要评估的图案的图像数据以评估图案的图案评估系统包括产生图案边缘模型的边缘模型产生部分和对图案的图像执行图像匹配处理的边缘点坐标检测部分 使用图案边缘模型来检测图案的边缘点的坐标。

    Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program
    54.
    发明授权
    Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program 有权
    图案测量方法,半导体器件的制造方法,图案测量装置和程序

    公开(公告)号:US07151855B2

    公开(公告)日:2006-12-19

    申请号:US10670387

    申请日:2003-09-26

    Applicant: Tadashi Mitsui

    Inventor: Tadashi Mitsui

    CPC classification number: G06T7/0004 G06K9/48 G06T2207/30148

    Abstract: A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern; combining the edge points between the patterns to make a pair of edge points and calculating a distance between the edge points constituting each pair of edge points and an angle between a straight line which connects the edge point to the other edge point and an arbitrary axial line with respect to each pair of edge points to prepare a distance angle distribution map which is a distribution map of the calculated distance and angle of the pair of edge points; and evaluating at least one of a relation of shape between the patterns, a relation of size between the patterns, and a relative location between the patterns on the basis of the prepared distance angle distribution map.

    Abstract translation: 图案测量方法包括获取包括图像数据的多个图案的图形数据; 处理图形数据以检测图案的边缘点的坐标; 组合图案之间的边缘点以形成一对边缘点并计算构成每对边缘点的边缘点之间的距离以及将边缘点连接到另一边缘点的直线和任意轴线 相对于每对边缘点来准备作为所计算出的一对边缘点的距离和角度的分布图的距离角分布图; 并且基于所准备的距离角分布图来评估图案之间的形状的关系,图案之间的尺寸的关系和图案之间的相对位置中的至少一个。

    Pattern evaluation method, pattern matching method and computer readable medium
    55.
    发明申请
    Pattern evaluation method, pattern matching method and computer readable medium 失效
    模式评估方法,模式匹配方法和计算机可读介质

    公开(公告)号:US20060262977A1

    公开(公告)日:2006-11-23

    申请号:US11391197

    申请日:2006-03-29

    Applicant: Tadashi Mitsui

    Inventor: Tadashi Mitsui

    CPC classification number: G06T7/0004 G03F7/7065 G06K9/6202 G06T2207/30148

    Abstract: A pattern evaluation method includes: generating first array data from edge data on a pattern to be evaluated, the edge data on the pattern to be evaluated being shape data including edge points of the pattern to be evaluated; generating second array data from edge data on a reference pattern, the edge data on the reference pattern including edge points of the reference pattern which serves as an inspection standard of the pattern to be evaluated; subjecting each component of the second array data to array conversion processing, the array conversion processing being designed to convert a value of the component of the second array data into a function value of a value of a distance from that component to the edge point closest thereto, thereby generating third array data; executing arithmetic processing between the first array data and the third array data to generate fourth array data; and using a component of the fourth array data to calculate a numerical value representative of an relation between the pattern to be evaluated and the reference pattern.

    Abstract translation: 图案评估方法包括:从要评估的图案上的边缘数据生成第一阵列数据,待评估的图案上的边缘数据是包括待评估图案的边缘点的形状数据; 在参考图案上从边缘数据生成第二阵列数据,参考图案上的边缘数据包括用作待评估图案的检查标准的参考图案的边缘点; 对所述第二阵列数据的每个分量进行阵列转换处理,所述阵列转换处理被设计为将所述第二阵列数据的分量的值转换为距离所述分量至所述边缘点的距离的值的函数值 从而产生第三阵列数据; 执行第一阵列数据和第三阵列数据之间的算术处理以产生第四阵列数据; 以及使用第四阵列数据的分量来计算表示要评估的图案与参考图案之间的关系的数值。

    Method of manufacturing optical fiber probe and for finishing micro material
    56.
    发明申请
    Method of manufacturing optical fiber probe and for finishing micro material 失效
    制造光纤探头和精加工微型材料的方法

    公开(公告)号:US20050115922A1

    公开(公告)日:2005-06-02

    申请号:US10498881

    申请日:2003-06-11

    Abstract: In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the optical fiber is a polarization maintaining optical fiber comprising the core region, a stress-applying region, and a clad region, and the optical fiber probe is formed by mechanical-grinding of the edge of the optical fiber into a sharpened shape so that the core region is located at the tip of a sharpened portion, and by dipping the formed edge of the optical fiber in an etchant for further sharpening the core region. Accordingly, a new optical fiber probe both with a high transmission efficiency and with a large polarization degree is obtained.

    Abstract translation: 在通过蚀刻尖端部分并且锐化光纤的芯部区域来形成光纤作为光纤探针的光纤探针的制造方法中,光纤是包括芯区域的偏振维持光纤, 应力施加区域和包层区域,并且光纤探针通过将光纤的边缘机械研磨成锐化形状而形成,使得芯部区域位于锐化部分的尖端,并且通过 将光纤的形成的边缘浸入蚀刻剂中,以进一步磨碎芯部区域。 因此,获得具有高透射效率和大偏振度的新型光纤探头。

    Inductance element
    59.
    发明授权
    Inductance element 失效
    电感元件

    公开(公告)号:US4549158A

    公开(公告)日:1985-10-22

    申请号:US675468

    申请日:1984-11-28

    CPC classification number: H01F5/02 H01F17/041 H01F17/043

    Abstract: An inductance element of the type that includes a coil bobbin having flanges at the ends thereof, a pair of pot cores engaging the bobbin, and a fastening member for fastening together the pot cores and bobbin. At least one of the bobbin flanges includes a joining part that extends outwardly from the bobbin flange and engages both the adjacent one of the pot cores and the fastening member to prevent relative rotation of the bobbin and adjacent pot core and fastening member. One of the bobbin flanges may include a stepped part having pins extending therefrom for making electrical connection to the inductance element. The stepped part is spaced from the bobbin flange, and connection wires may extend within the space.

    Abstract translation: 一种电感元件,包括一端具有法兰的线圈骨架,一对与该线圈架接合的一个电枢芯,以及用于将电枢芯和线轴固定在一起的紧固件。 梭芯凸缘中的至少一个包括从筒管凸缘向外延伸的接合部分,并且与相邻的一个锅芯和紧固构件接合,以防止筒管和相邻的锅芯和紧固构件相对旋转。 线轴法兰中的一个可以包括具有从其延伸的销的阶梯部分,用于与电感元件电连接。 台阶部分与筒管法兰间隔开,连接线可在该空间内延伸。

    Ferrite core
    60.
    发明授权
    Ferrite core 失效
    铁氧体磁芯

    公开(公告)号:US4424504A

    公开(公告)日:1984-01-03

    申请号:US388636

    申请日:1982-06-15

    CPC classification number: H01F27/266 H01F27/255

    Abstract: The new structure of a ferrite core for the use of a power transformer and/or a choke coil has been found. The core is assembled by a pair of identical core halves, and each core half comprises (a) a circular center boss (6), (b) a pair of outer walls (7, 8) positioned at both the sides of said boss for mounting a coil, (c) a pair of base plates (9, 10) coupling said center boss and said outer walls, (d) each of the outer walls being substantially rectangular with an external linear wall and an inner curved wall, (e) the core half being symmetrical with regard to the first plane including a center axis of said boss and being parallel with the external linear walls of said outer walls, (f) a concaved opening (R) being provided between said base plates in the first side of the core half with regard to the reference plane which includes a center axis of said boss and is perpendicular to said first plane, (g) the length (B.sub.1) between said reference plane to the end of the first side which includes said concaved opening (R) being longer than the length (B.sub.2) between said reference plane to the end of the second side which does not have said opening (R), and (h) said length (B.sub.2) being the same as the radius (a.sub.1) of the center boss.

    Abstract translation: 已经发现用于使用电力变压器和/或扼流线圈的铁氧体磁心的新结构。 芯部由一对相同的半部组装,每个芯部半部包括(a)圆形中心凸台(6),(b)位于所述凸台的两侧的一对外壁(7,8),用于 安装线圈,(c)连接所述中心凸台和所述外壁的一对基板(9,10),(d)每个外壁具有大致矩形的外部线性壁和内部弯曲壁,(e ),所述芯半体关于所述第一平面对称,所述第一平面包括所述凸台的中心轴线并且与所述外壁的外部直线壁平行;(f)在所述第一平面 相对于包括所述凸台的中心轴并且垂直于所述第一平面的参考平面的芯部半部的侧面,(g)所述参考平面与包括所述凹部的第一侧的端部之间的长度(B1) 开口(R)比所述参考平面与端部之间的长度(B2)长 不具有所述开口(R)的第二侧,和(h)所述长度(B2)与中心凸台的半径(a1)相同。

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