Gas separating and purifying method and its apparatus
    51.
    发明授权
    Gas separating and purifying method and its apparatus 失效
    气体分离纯化方法及其装置

    公开(公告)号:US06752851B2

    公开(公告)日:2004-06-22

    申请号:US10148903

    申请日:2002-06-19

    IPC分类号: B01D53053

    摘要: The gas separation and purification process can recover efficiently a valuable gas such as krypton and xenon to be used as an atmospheric gas in a semiconductor manufacturing equipment etc. by means of PSA process. In the process for separating a valuable gas in the form of purified product from a mixed gas, used as a raw gas, containing the valuable gas by means of pressure swing adsorption process, the valuable gas is separated and purified by using as the pressure swing adsorption process a combination of equilibrium pressure swing adsorption process for separating gas components based on the difference in equilibrium adsorption and rate-dependent pressure swing adsorption process for separating the gas components based on the difference in adsorption rates.

    摘要翻译: 气体分离和净化过程可以通过PSA方法有效地回收在半导体制造设备等中用作气氛气体的有价值的气体,例如氪和氙。 在通过变压吸附方法从作为原料气体的混合气体中分离纯化产物形式的有价值气体的方法中,通过使用压力摆动来分离和净化有价值的气体 吸附过程是根据吸附速率差异分离气体组分的平衡吸附和速率依赖变压吸附过程的差异来分离气体组分的平衡变压吸附过程的组合。

    Method and apparatus for collecting rare gas
    52.
    发明授权
    Method and apparatus for collecting rare gas 有权
    收集稀有气体的方法和装置

    公开(公告)号:US06605134B2

    公开(公告)日:2003-08-12

    申请号:US09953480

    申请日:2001-09-14

    IPC分类号: B01D5304

    摘要: There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.

    摘要翻译: 提供一种用于收集稀有气体的方法和装置,其能够使用诸如等离子体装置等的装置有效地收集从稀有气体排出的废气中所含的稀有气体,并且还能够可靠地供给 对于稀有气体使用装置,具有预定纯度的稀有气体,以及收集稀有气体的方法,其特征在于,使用在减压下运转的装置收集从稀有气体排出的废气中所含的稀有气体,所述方法包括: 通过至少两个气体分离步骤分离废气中所含的稀有气体和杂质的稀有气体。