公开(公告)号：US06556289B1

公开(公告)日：2003-04-29

申请号：US09605288

申请日：2000-06-28

Applicant: Edward Granger

Inventor： Edward Granger

IPC: G01J142

CPC classification number: G01J1/44 ,  G01J1/06

Abstract: Two or more triangular apertures are employed to pass radiation from a source to a detector to reduce the amount of stray radiation received by the detector. Preferably, the two apertures are equilateral triangles oriented at 60° rotated relative to each other and have dimensions proportional to their distances from the sensor. A Bessel filter is employed to reduce the effect of flicker and other rapid changes in intensity in the radiance from the source. The output of the sensor is integrated and sampled at sampling time intervals that are powers of two of time, and a reading is provided when the output of the integrator exceeds the same threshold under all radiation source intensity conditions so that the meter has a substantially constant resolution at different signal levels.

公开(公告)号：US06541775B2

公开(公告)日：2003-04-01

申请号：US09843812

申请日：2001-04-30

Applicant: Shigeru Yagi

Inventor： Shigeru Yagi

IPC: G01J142

CPC classification number: G01J1/429

Abstract: A portable information device such as a portable telephone, portable electronic mail device or portable navigator capable of measuring UV-rays with no deterioration of the display function is provided. In the device, a UV-ray sensor is disposed in an information display region. The UV-sensor has light sensitivity only to UV-rays and preferably has a light receiving surface made of a compound semiconductor.

Abstract translation: 提供了一种便携式信息设备，例如便携式电话，便携式电子邮件设备或便携式导航仪，其能够测量没有显示功能恶化的紫外线。 在该装置中，紫外线传感器设置在信息显示区域中。 UV传感器仅对紫外线具有光敏感性，并且优选具有由化合物半导体制成的受光面。

公开(公告)号：US06486945B1

公开(公告)日：2002-11-26

申请号：US09515317

申请日：2000-02-29

Applicant: Thomas Haerle ,  Guenter Reisacher

Inventor： Thomas Haerle ,  Guenter Reisacher

IPC: G01J142

CPC classification number: G01J1/42 ,  G01J1/02 ,  G01J1/0228 ,  G01J2001/4252

Abstract: An optical monitoring unit includes a transmitting unit having plural light emitting diodes that are connected together two at a time in respective diode pairs. Each diode of each diode pair is respectively selectively connectable to a current source so as to operate as an active transmitting diode, or to a load resistor across which a voltage may be measured so as to operate as a monitoring diode. When any selected single diode is operated as the transmitting diode, its light output is measured and evaluated by operating the other diode of the pair as the monitoring diode, which receives optical crosstalk from the light output of the transmitting diode and correspondingly generates a photoelectric current through the load resistor.

Abstract translation: 光学监视单元包括具有多个发光二极管的发送单元，每个发光二极管一次在相应的二极管对中连接在一起。 每个二极管对的每个二极管分别可选择地连接到电流源，以便作为有源发射二极管工作，或者耦合到可以测量电压的负载电阻器，以便作为监控二极管工作。 当任何所选择的单个二极管作为发射二极管工作时，其光输出通过操作该对的另一个二极管作为监控二极管来测量和评估，监控二极管从发射二极管的光输出接收光学串扰，并相应地产生光电流 通过负载电阻。

公开(公告)号：US06417507B1

公开(公告)日：2002-07-09

申请号：US09460715

申请日：1999-12-14

Applicant: Alan Malvern ,  Thomas Allsop ,  Ronald Neal

Inventor： Alan Malvern ,  Thomas Allsop ,  Ronald Neal

IPC: G01J142

CPC classification number: G01L1/246 ,  G01D5/35316

Abstract: A modulated fibre Bragg grating strain gauge assembly for absolute gauging of strain including at least one sensor element (1) in the form of a length of optical fibre containing, along part its length, means for partially reflecting light (1a), means for generating and passing a beam of light (2a) with a spectral feature less than 0.1 nanometers in width into the at least one sensor element (1) where reflection takes place, which reflection is a substantially sinusoidal intensity variation in wavelength over a range of from 2 to 3 nanometers comprising at least two substantially sinusoidal periods such that as the at least one sensor element sustains a change in length resulting from a strain thereon, the reflected intensity varies substantially sinusoidally along the at least two sinusoidal periods, means for receiving and processing the reflected light (2b) to establish the light intensity values at one (1f) and two times (2f) a modulation frequency (1f) applied to the means for generating the beam of light (2a), and means to determine an absolute direction and magnitude of strain from a ratio of the intensity values 1f:2f.

Abstract translation: 一种用于绝对测量应变的调制光纤布拉格光栅应变计组件，包括至少一根光纤长度的传感器元件（1），其长度部分包含用于部分反射光（1a）的装置，用于产生 以及将具有小于0.1纳米宽度的光谱特征的光束（2a）传送到发生反射的至少一个传感器元件（1）中，该反射是在2范围内的波长上的基本正弦波强度变化 包括至少两个基本上正弦的周期，使得当至少一个传感器元件维持由其上的应变导致的长度变化时，反射强度沿着至少两个正弦周期基本上正弦地变化，用于接收和处理 反射光（2b），以在第一（1f）和二次（2f）处建立应用于基因装置的调制频率（1f）的光强度值 消除光束（2a），以及从强度值1f：2f的比率确定应变的绝对方向和大小的装置。

公开(公告)号：US06404487B1

公开(公告)日：2002-06-11

申请号：US09395362

申请日：1999-09-14

Applicant: Yoichi Sato ,  Taku Ezaki

Inventor： Yoichi Sato ,  Taku Ezaki

IPC: G01J142

CPC classification number: G01J1/46 ,  G01J1/44

Abstract: A light measurement device that selectively operates in a normal light measurement mode, in which the output from a sensor cell is logarithmically compressed and directly output as an output, or an integration light measurement mode, in which a signal obtained by integrating the output with an integrating circuit is output. In the integration light measurement mode, since the integrated output can be slowly read out after strobo light emission, accurate light measurement can be performed within a predetermined light measurement time even when the number of divisions of the sensor is increased.

Abstract translation: 一种光测量装置，其选择性地以常规光测量模式操作，其中来自传感器单元的输出被对数压缩并直接作为输出输出，或积分光测量模式，其中通过将输出与 输出积分电路。 在积分光测量模式中，由于在频闪发光之后能够缓慢地读出积分输出，所以即使增加传感器的分割数，也能在预定的光测量时间内进行准确的光测量。

公开(公告)号：US06403966B1

公开(公告)日：2002-06-11

申请号：US09339851

申请日：1999-06-25

Applicant: Michio Oka

Inventor： Michio Oka

IPC: G01J142

CPC classification number: G02B21/16

Abstract: A measurement method and a measurement apparatus for measuring the structure of a micro-structure or the structure along the depth of an object for measurement. The laser light from a solid-state laser light source is subjected to wavelength conversion to generate the ultraviolet laser light, and measurement is made of the object for measurement by heterodyne detection or homodyne detection employing the ultraviolet laser light. This enables measurement of a structure of a micro-structure. Alternatively, the laser light is split into multiple laser light beams and frequency shifted so that the laser light beams will be of different frequencies. The laser light beams are imaged at respective different focal point positions to perform heterodyne detection. The resulting heterodyne signals are separated into respective frequency bands and measurement is made of the structure of the object for measurement in association with the respective imaging points. This enables measurement of the structure of the object for measurement in the direction along its depth.

Abstract translation: 一种测量方法和测量装置，用于测量沿着测量对象的深度的微结构或结构的结构。 对来自固态激光光源的激光进行波长转换以产生紫外激光，并且通过使用紫外激光的外差检测或零差检测来测量测量对象。 这使得能够测量微结构的结构。 或者，激光被分成多个激光束并且频移，使得激光束将具有不同的频率。 激光束在各个不同的焦点位置成像，以进行外差检测。 所得到的外差信号被分离成相应的频带，并且与各个成像点相关联地测量用于测量的对象的结构。 这使得能够沿着其深度的方向测量被测物体的结构。

公开(公告)号：US06396062B1

公开(公告)日：2002-05-28

申请号：US09454693

申请日：1999-12-03

Applicant: Jesse D. Buck ,  Robert G. Ozarski

Inventor： Jesse D. Buck ,  Robert G. Ozarski

IPC: G01J142

CPC classification number: G03F7/70483 ,  G01J1/4257 ,  G01J1/58

Abstract: A portable laser beam monitor utilizes a plurality of optical trains to monitor ultraviolet laser beam profiles at a plurality of positions along a laser beam path. A preferred embodiment useful for monitoring beam profiles of lithography lasers measures the beam profile at the front aperture, the rear aperture, the shutter plane and at infinity (the divergence plane). The beam profiles are imaged on a fluorescent screen which is monitored by a visible light camera. Images of the profiles may be discharged on the screen of a lap top computer.

Abstract translation: 便携式激光束监视器利用多个光学列车来监视沿着激光束路径的多个位置处的紫外激光束轮廓。 用于监测光刻激光器的光束轮廓的优选实施例测量前孔，后孔，快门平面和无限远（发散平面）处的光束轮廓。 光束轮廓在由可见光相机监测的荧光屏上成像。 配置文件的图像可能会在笔记本电脑的屏幕上放电。

公开(公告)号：US06353474B1

公开(公告)日：2002-03-05

申请号：US09548482

申请日：2000-04-13

Applicant: Thaddeus Kucharski ,  Grant Ager ,  Jose J. Barbosa ,  Roberto Conte ,  Gregory H. Link ,  William D. McKay ,  Alan W. Tom ,  William J. Brennan, III

Inventor： Thaddeus Kucharski ,  Grant Ager ,  Jose J. Barbosa ,  Roberto Conte ,  Gregory H. Link ,  William D. McKay ,  Alan W. Tom ,  William J. Brennan, III

IPC: G01J142

CPC classification number: G01C11/02

Abstract: An improved system and method for obtaining photogrammetric measurements which eliminates optical distortions created by thermal gradients on windows that are used to protect the photogrammetry camera. A gate valve is introduced between the window and the wall that opens for a limited time to allow the camera to take measurements of a test article contained within a thermal testing chamber. This limits or eliminates any thermal gradients on the window and improves photogrammetric measurements. With a gate valve the window can be removed entirely, as the gate valve can prevent a thermal gradient from being introduced to the lens of the photogrammetry camera. The improved system is suited for making close-in photogrammetric measures of test articles on earth.

Abstract translation: 用于获得摄影测量测量的改进的系统和方法，其消除了用于保护摄影测量相机的窗口上的热梯度产生的光学失真。 门窗被引入窗口和壁之间，打开一段有限的时间以允许相机对包含在热测试室内的测试物品进行测量。 这限制或消除了窗口上的任何热梯度，并改进了摄影测量的测量。 使用闸阀可以完全拆下窗户，因为闸阀可防止热梯度被引入摄影测量相机的镜头。 改进的系统适用于对地球上的测试物品进行近距离摄影测量。

公开(公告)号：US06342947B1

公开(公告)日：2002-01-29

申请号：US09545840

申请日：2000-04-10

Applicant: Gary D. Gillino

Inventor： Gary D. Gillino

IPC: G01J142

CPC classification number: G01J1/42 ,  G01J1/10

Abstract: By employing a high-repeatability optical switch that transmits input optical power selectively either to the standard or the unit under test (UUT), OPHASE presents a system for performing a rapid, repeatable comparison between the standard and the UUT. Further, the selective routing of beam traveling through one of the two output fibers that are coupled to the switch either to the standard or the UUT enables the elimination of much of the system uncertainty by enabling initial characterization of the ratio, Rp, and inequivalence, Im, between the power outputs of the multiple output fibers coupled to the switch. This characterization is accomplished by using an angled interface which is constructed so as to allow simultaneous coupling of the multiple output fibers to the angled interface and enable the power readout of all the output fibers at the standard. Rp and Im are then used to calculate the correction factor that reduces the total uncertainty level in the subsequent calibration of the unit under test.

Abstract translation: 通过采用将输入光功率选择性地传输到标准或被测单元（UUT）的高重复性光开关，OPHASE提出了一种用于在标准和UUT之间执行快速，可重复比较的系统。 此外，通过耦合到开关到标准或UUT的两个输出光纤中的一个输出光纤的选择性布线使得能够通过使得比率R p和不等式的初始表征来消除大部分系统不确定性， 在耦合到开关的多输出光纤的功率输出之间。 该表征通过使用成角度的界面来实现，该倾斜界面被构造成允许将多个输出光纤同时耦合到倾斜的接口并且使得能够以标准对所有输出光纤进行功率读出。 然后使用Rp和Im来计算校正因子，从而降低随后的被测单元校准中的总不确定度水平。

公开(公告)号：US06337742B2

公开(公告)日：2002-01-08

申请号：US09840168

申请日：2001-04-24

Applicant: Heinrich Lysen ,  Dieter Busch

Inventor： Heinrich Lysen ,  Dieter Busch

IPC: G01J142

CPC classification number: G01S5/163

Abstract: A device is proposed, which makes it possible to ascertain the relative position of the reference axis BA of an object relative to a reference beam Rp of an electro-magnetic radiation, in particular a laser beam. The device displays a spatially fixed radiation transmitter S and at the object end a splitting mirror 22 as well as two position detectors 23 and 25. The splitting mirror branches a partial beam Rp′ off from the reference beam. The reference beam passing rectilinearly through the splitting mirror impinges on the one position detector and the partial beam on the other. The position detectors supply electrical signals, from which the position of the reference axis is ascertainable by means of a computer. The known devices of this species have an appreciable space requirement. This defect is eliminated by particular structuring of the beam conduction and the additional use of special optical means. Beyond that, the measurement possibilities can be enlarged through additional emission of a second reference beam Rs.

Abstract translation: 提出了一种装置，其可以确定物体的参考轴线BA相对于电磁辐射，特别是激光束的参考光束Rp的相对位置。 该装置显示空间固定的辐射发射器S，在目标端处显示分束镜22以及两个位置检测器23和25.分束镜将部分光束Rp'与参考光束分离。 通过分光镜直线通过的参考光束照射在一个位置检测器和另一个位置检测器上。 位置检测器提供电信号，借助于计算机可以确定参考轴的位置。 这种物种的已知装置具有明显的空间要求。 通过光束传导的特殊构造和特殊光学装置的附加使用来消除该缺陷。 除此之外，可以通过第二参考光束Rs的附加发射来扩大测量可能性。