SELF-TILTED MICROMIRROR DEVICE
    63.
    发明申请
    SELF-TILTED MICROMIRROR DEVICE 审中-公开
    自抛式微型电子装置

    公开(公告)号:US20090303569A1

    公开(公告)日:2009-12-10

    申请号:US12124110

    申请日:2008-05-20

    IPC分类号: G02B26/00

    摘要: A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.

    摘要翻译: 本发明的自倾斜微反射镜装置包括多个微结构,包括基底,至少一个固定板,其被配置为通过粘附力被吸引到基底;弹性地连接到该静摩擦板的顶板, 当所述固定板被吸引到所述基板时的至少一个运动,以及设置在所述基板和所述顶板之间的至少一个枢轴结构,并且构造成为所述顶板的运动提供倾斜点或区域。 顶板的运动由自倾斜微镜装置的微结构的几何形状决定。

    MICROMIRROR ARRAY LENS WITH SELF-TILTED MICROMIRRORS
    64.
    发明申请
    MICROMIRROR ARRAY LENS WITH SELF-TILTED MICROMIRRORS 有权
    MICROMIRROR ARRAY镜头与自倾斜微型机

    公开(公告)号:US20090290244A1

    公开(公告)日:2009-11-26

    申请号:US12124111

    申请日:2008-05-20

    IPC分类号: G02B7/185

    CPC分类号: G02B26/0833

    摘要: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

    摘要翻译: 一种具有自倾斜微镜的微镜阵列透镜,包括多个自倾斜微镜,并且被配置为通过自倾斜微镜形成设计的光学表面轮廓。 每个自倾斜微反射镜包括基底,至少一个固定板被配置成通过粘附力被吸引到基底上,具有反射表面的微镜板,弹性地耦合到该静摩擦板,并被构造成当静电板 被吸引到基板,以及设置在基板和微反射板之间的至少一个枢轴结构,并且构造成提供用于微镜板的运动的倾斜点或区域。 设计的光学表面轮廓确定微镜板的所需运动,并且表面轮廓形状存储器内置在自倾斜微镜的微机械元件的结构中,使得每个微镜板具有所需的运动。

    Compact image taking lens system with a lens-surfaced prism
    65.
    发明授权
    Compact image taking lens system with a lens-surfaced prism 有权
    紧凑型摄像镜头系统,带透镜表面棱镜

    公开(公告)号:US07605988B2

    公开(公告)日:2009-10-20

    申请号:US11781907

    申请日:2007-07-23

    IPC分类号: G02B17/00 G02B3/00

    CPC分类号: G02B17/086 G02B5/04 G02B13/18

    摘要: A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.

    摘要翻译: 具有本发明的透镜表面棱镜的紧凑型摄像镜头系统包括棱镜,孔径光阑,第一透镜元件,第二透镜元件,反射镜表面和图像表面,可选地是红外截止滤光器。 通过引入透镜表面棱镜,本发明的具有透镜表面棱镜的紧凑型摄像透镜系统与现有技术领域相比具有许多优点,例如厚度紧凑,光学元件数量少,高 光学质量的表现,可选元件足够的空间,例如红外截止滤光片和光学几何形状的多样性。

    Array of micromirrors with non-fixed underlying structures
    66.
    发明授权
    Array of micromirrors with non-fixed underlying structures 有权
    具有非固定底层结构的微镜阵列

    公开(公告)号:US07605964B2

    公开(公告)日:2009-10-20

    申请号:US11693698

    申请日:2007-03-29

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0841 G02B26/06

    摘要: The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

    摘要翻译: 本发明公开了一种具有非固定底层结构的微镜阵列,其可以被定向成具有不具有结构和机械干涉并且没有电冲突的主旋转轴线。 本发明中的微镜阵列可以再现除了旋转对称轮廓之外的包括球形,非球面(例如抛物线,双曲线,椭圆形等),变形的各种表面。 利用新引入的非固定底层结构,本发明使得微镜阵列能够通过简单的运动控制产生期望的光学表面轮廓并且提高运动和运动控制的结构稳定性,简单性,灵活性和效率。

    Micromirror array lens with encapsulation of reflective metal layer and method of making the same
    67.
    发明授权
    Micromirror array lens with encapsulation of reflective metal layer and method of making the same 有权
    具有反射金属层封装的微镜阵列透镜及其制造方法

    公开(公告)号:US07589884B2

    公开(公告)日:2009-09-15

    申请号:US11534613

    申请日:2006-09-22

    IPC分类号: G02B26/00 G02F1/00 G02B7/182

    CPC分类号: G02B26/0841

    摘要: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

    摘要翻译: 本发明提供一种微镜阵列器件,特别是微镜阵列透镜器件的结构及其制造方法。 通过引入具有高反射金属层的次涂层和涂层,微镜的反射层被保护免受环境的影响,微机械结构的氧化,降解,酸,碱和电偶腐蚀。 此外,新的涂层结构通过减少金属层的反射率的降低,通过在光学无效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列透镜的性能。

    MEMS ACTUATOR WITH DISCRETELY CONTROLLED MULTIPLE MOTIONS
    68.
    发明申请
    MEMS ACTUATOR WITH DISCRETELY CONTROLLED MULTIPLE MOTIONS 有权
    具有异步控制的多动作的MEMS执行器

    公开(公告)号:US20080309190A1

    公开(公告)日:2008-12-18

    申请号:US11762683

    申请日:2007-06-13

    IPC分类号: H02N1/00 G05B19/19

    摘要: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

    摘要翻译: 具有离散控制的多个运动的MEMS(微机电系统)致动器包括底层,步进板,支撑和运动板。 运动板的多重运动由静电驱动的步进板和几何预定的支撑件产生。 通过引入具有离散控制的多个运动的MEMS致动器,可以通过数字控制实现简单的运动控制,并且仅需要运动控制板的单个电压。

    OPTICAL TRACKING DEVICE USING MICROMIRROR ARRAY LENSES
    69.
    发明申请
    OPTICAL TRACKING DEVICE USING MICROMIRROR ARRAY LENSES 有权
    使用微镜阵列镜片的光学跟踪装置

    公开(公告)号:US20080273191A1

    公开(公告)日:2008-11-06

    申请号:US11743656

    申请日:2007-05-02

    IPC分类号: G01C3/08 G01P3/36

    摘要: The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.

    摘要翻译: 本发明的光学跟踪装置包括透镜单元,通信地耦合到透镜单元的控制电路以及与透镜单元光耦合的成像单元。 透镜单元包括至少一个微镜阵列透镜,其中微镜阵列透镜包括多个微镜,并且通过控制微镜的旋转或平移来配置为具有多个光学表面轮廓。 本发明的光学跟踪装置还包括图像处理单元,通信地耦合到成像单元,被配置为处理来自成像单元的图像信息,并且产生用于控制电路的控制信号以控制透镜单元。 本发明的光学跟踪装置提供跟踪高速移动的目标的能力,提供对象的三维图像信息,并补偿光学跟踪装置的像差。

    DISCRETELY CONTROLLED MICROMIRROR ARRAY DEVICE WITH SEGMENTED ELECTRODES
    70.
    发明申请
    DISCRETELY CONTROLLED MICROMIRROR ARRAY DEVICE WITH SEGMENTED ELECTRODES 有权
    具有分离电极的分辨率可控的微阵列阵列

    公开(公告)号:US20080137173A1

    公开(公告)日:2008-06-12

    申请号:US11609882

    申请日:2006-12-12

    IPC分类号: G02B26/00

    摘要: This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

    摘要翻译: 本发明提供了包括多个微镜的离散控制的微镜阵列器件。 离散控制的微镜阵列器件形成多个表面轮廓,其中每个微反射镜的旋转和平移运动通过使用控制电路选择性地激活不同组的分段电极来离散地控制。 离散控制的微镜阵列器件与已知的半导体电子技术兼容,并提供结构稳定性和运动效率。