PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM
    62.
    发明申请
    PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM 失效
    加工设备和开启/关闭机构

    公开(公告)号:US20070238307A1

    公开(公告)日:2007-10-11

    申请号:US11684717

    申请日:2007-03-12

    申请人: Jun Yamashita

    发明人: Jun Yamashita

    IPC分类号: H01L21/302

    CPC分类号: H01J37/32192 H01J37/32458

    摘要: A processing apparatus includes an openable/closable lid disposed on a process container, and an opening/closing mechanism configured to open/close the lid. The opening/closing mechanism includes a hinge structure swingably coupling the lid to one end of the process container, and a drive structure configured to swing the lid. The hinge structure includes a main shaft used as a rotation axis when the lid is swung by the drive structure, and an adjusting shaft located on a distal end side relative to the main shaft, for adjusting an angle of the lid.

    摘要翻译: 一种加工设备包括设置在处理容器上的可开闭盖子,以及构造成打开/关闭盖子的打开/关闭机构。 打开/关闭机构包括将盖可旋转地联接到处理容器的一端的铰链结构以及构造成使盖旋转的驱动结构。 铰链结构包括当盖被驱动结构摆动时用作旋转轴的主轴和相对于主轴位于远端侧的调节轴,用于调节盖的角度。