公开(公告)号：US07763489B2

公开(公告)日：2010-07-27

申请号：US11538035

申请日：2006-10-02

申请人： Dongmin Chen ,  William Spencer Worley

发明人： Dongmin Chen ,  William Spencer Worley

IPC分类号： H01L21/00

CPC分类号： B81B3/0005 ,  G02B26/0833

摘要： Embodiments of the present invention generally relate to a electromechanical device that has an improved usable lifetime due to the presence of one or more channels that contain and deliver a lubricant material that can reduce the likelihood of stiction occurring between the various moving parts of the device. Embodiments of the present invention also generally include an enclosed device package, and a method of forming the enclosed device package, that has one or more lubricant containing and/or transporting channels that that deliver lubricant material to a device disposed within the enclosed device package. Each lubricant containing channel acts as a ready supply of “fresh” lubricant to prevent stiction from occurring between interacting components of the device disposed within the enclosed region of the device package. The ready supply of “fresh” lubricants may also be used to replenish damaged lubricants (worn-off, broken down, etc) at the contacting surfaces where stiction generally occurs.

摘要翻译： 本发明的实施例总体上涉及一种机电装置，其具有改善的使用寿命，这是由于存在一个或多个通道，其容纳和输送润滑剂材料，所述润滑剂材料可以降低在装置的各种运动部件之间出现静电的可能性。 本发明的实施例还通常包括封闭装置封装以及形成封闭装置封装的方法，该方法具有一个或多个润滑剂，该润滑剂含有和/或输送通道，其将润滑剂材料输送到设置在封闭装置封装内的装置。 每个含润滑剂的通道用作“新鲜”润滑剂的准备供应，以防止在设置在装置包装的封闭区域内的装置的相互作用的部件之间发生静电。 “新鲜”润滑剂的现成供应也可用于在通常出现静电的接触表面补充损坏的润滑剂（磨损，分解等）。

公开(公告)号：US07723144B2

公开(公告)日：2010-05-25

申请号：US12039550

申请日：2008-02-28

申请人： Dongmin Chen

发明人： Dongmin Chen

IPC分类号： H01L21/00

CPC分类号： B81B7/0067 ,  B81C2203/0118 ,  H01L24/81 ,  H01L27/14618 ,  H01L27/14627 ,  H01L27/14634 ,  H01L27/14687 ,  H01L31/0203 ,  H01L2224/8121 ,  H01L2224/81815 ,  H01L2924/01322 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/00

摘要： A package for a micro-electromechanical device includes a substrate adapted to support the micro-electromechanical device. The micro-electromechanical device is electrically coupled to a plurality of electrodes. The package also includes a thermally conductive structure coupled to the substrate, an electrical contact layer having a plurality of traces in electrical communication with the plurality of electrodes, and an interposer structure coupled to the substrate. The interposer structure includes a continuous annular region defining a recessed region bounded by a bond surface. The package further includes a transparent cover coupled to the interposer structure and sealing the micro-electromechanical device in the recessed region to isolate the micro-electromechanical device in a controlled environment.

摘要翻译： 用于微机电装置的封装包括适于支撑微机电装置的基板。 微机电器件电耦合到多个电极。 封装还包括耦合到衬底的导热结构，具有与多个电极电连通的多个迹线的电接触层，以及耦合到衬底的插入器结构。 插入器结构包括限定由接合表面限定的凹陷区域的连续环形区域。 该封装还包括耦合到插入器结构的透明盖，并且将微机电装置密封在凹陷区域中以在受控环境中隔离微机电装置。

公开(公告)号：US20080278894A1

公开(公告)日：2008-11-13

申请号：US11747864

申请日：2007-05-11

申请人： Dongmin Chen ,  Michael Aaron Thompson

发明人： Dongmin Chen ,  Michael Aaron Thompson

IPC分类号： H05K5/00 ,  H02J7/00

CPC分类号： G06F1/1632

摘要： A projection docking station includes a docking port configured to communicate with a portable device and a projection unit configured to perform a projection process for an image. The projection docking station also includes a communication interface configured to provide communications between the docking port and the projection unit and a control unit configured to communicate with the communication interface and the projection unit. The control unit is configured to control a communication flow between the communication interface and the docking port, a communication flow between the communication interface and the projection unit, and the projection process.

摘要翻译： 投影对接站包括配置成与便携式设备通信的对接端口和被配置为对图像执行投影处理的投影单元。 投影对接站还包括被配置为提供对接端口和投影单元之间的通信的通信接口以及被配置为与通信接口和投影单元进行通信的控制单元。 控制单元被配置为控制通信接口和对接端口之间的通信流程，通信接口和投影单元之间的通信流程以及投影处理。

公开(公告)号：US07443568B2

公开(公告)日：2008-10-28

申请号：US11429376

申请日：2006-05-04

申请人： Dongmin Chen ,  Tore Nauta

发明人： Dongmin Chen ,  Tore Nauta

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electrode voltage. The method also includes maintaining the first electrode voltage for a first predetermined time and applying a second electrode voltage to the one or more electrodes. The micro-mirror rotates to a first negative deflection angle during a portion of the application of the second electrode voltage. The method further includes maintaining the second electrode voltage for a second predetermined time and applying a third electrode voltage to the one or more electrodes. The micro-mirror is positioned at a second positive deflection angle greater than the first positive deflection angle during a portion of the application of the third electrode voltage.

摘要翻译： 激活微镜的方法包括将第一电极电压施加到与微镜相关联的一个或多个电极。 在施加第一电极电压的一部分期间，微镜被定位在第一正偏转角。 该方法还包括将第一电极电压保持第一预定时间并将第二电极电压施加到一个或多个电极。 微镜在施加第二电极电压的一部分期间旋转到第一负偏转角。 该方法还包括将第二电极电压维持第二预定时间并将第三电极电压施加到一个或多个电极。 在施加第三电极电压的一部分期间，微反射镜被定位成大于第一正偏转角的第二正偏转角。

公开(公告)号：US20070287214A1

公开(公告)日：2007-12-13

申请号：US11240303

申请日：2005-09-29

申请人： Kegang Huang ,  Xiao Yang ,  Dongmin Chen

发明人： Kegang Huang ,  Xiao Yang ,  Dongmin Chen

IPC分类号： H01L21/00

CPC分类号： G02B26/0841

摘要： The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.

摘要翻译： 通过在像素的反射表面之后定位非反射元件（例如支撑柱和可移动铰链）可以增强由空间光调制器装置提供的对比度。 根据一个实施例，反射表面通过由牺牲层中的间隙限定的反射材料的整体肋悬挂在铰链包含层的下面和下面。 根据替代实施例，反射表面通过形成在中间层（例如氧化物）中的间隙与下面的铰链分离。 在任一实施例中，分离相邻像素区域的壁可以凹陷在反射表面下方，以进一步减少入射光的不期望的散射，从而增强对比度。

公开(公告)号：US20070258130A1

公开(公告)日：2007-11-08

申请号：US11418941

申请日：2006-05-04

申请人： Dongmin Chen ,  Tore Nauta

发明人： Dongmin Chen ,  Tore Nauta

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0008 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058 ,  H04N5/7458

摘要： A spatial light modulator for use in display applications. The spatial light modulator includes a support substrate and a flexible member coupled to the support substrate. The spatial light modulator also includes a mirror plate coupled to the flexible member and characterized by an activated position. The mirror plate is adapted to rotate in relation to the flexible member from the activated position to a second activated position in a time less than 6.0 μs.

摘要翻译： 用于显示应用的空间光调制器。 空间光调制器包括支撑衬底和耦合到支撑衬底的柔性构件。 空间光调制器还包括耦合到柔性构件的镜面板，其特征在于激活位置。 镜板适于相对于柔性构件在小于6.0微米的时间内从启动位置旋转到第二激活位置。

公开(公告)号：US20070171509A1

公开(公告)日：2007-07-26

申请号：US11726895

申请日：2007-03-23

申请人： Shaoher Pan ,  Xiao Yang ,  Dongmin Chen ,  Shoucheng Zhang

发明人： Shaoher Pan ,  Xiao Yang ,  Dongmin Chen ,  Shoucheng Zhang

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

摘要翻译： 例如在反射空间光调制器中有用的微镜阵列。 在一个实施例中，微反射镜阵列包括间隔件支撑壁，垂直扭转铰链和镜板，全部由单个晶片制造。 微镜阵列具有大的填充率。

公开(公告)号：US20070097486A1

公开(公告)日：2007-05-03

申请号：US11448537

申请日：2006-06-05

申请人： Xiao Yang ,  Yuxiang Wang ,  Wook Ji ,  Justin Payne ,  Ye Wang ,  William Worley ,  Dongmin Chen ,  Howard Woo

发明人： Xiao Yang ,  Yuxiang Wang ,  Wook Ji ,  Justin Payne ,  Ye Wang ,  William Worley ,  Dongmin Chen ,  Howard Woo

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.

摘要翻译： 显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。 显示系统还包括位于照明路径中的空间光调制器。 空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。 铰链结构包括硅材料。 空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。 显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

公开(公告)号：US07118234B2

公开(公告)日：2006-10-10

申请号：US10756936

申请日：2004-01-13

申请人： Shaoher X Pan ,  Xiao Yang ,  Dongmin Chen ,  Shoucheng Zhang

发明人： Shaoher X Pan ,  Xiao Yang ,  Dongmin Chen ,  Shoucheng Zhang

IPC分类号： G02B7/182

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

公开(公告)号：US20060131262A1

公开(公告)日：2006-06-22

申请号：US11317142

申请日：2005-12-22

申请人： Shaoher Pan ,  Xiao Yang ,  Dongmin Chen

发明人： Shaoher Pan ,  Xiao Yang ,  Dongmin Chen

IPC分类号： B29D11/00

CPC分类号： G02B26/0833 ,  G02B26/0841

摘要： Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro-mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support post, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.

摘要翻译： 包括微镜阵列的反射空间光调制器的制造。 在一个实施例中，微镜阵列由仅通过两个主蚀刻步骤的单晶材料的衬底制造。 第一蚀刻在材料的第一侧形成空腔。 第二蚀刻形成支撑柱，垂直铰链和镜板。 在第一和第二蚀刻之间，衬底可以结合到寻址和控制电路。