Abstract:
An inspection apparatus projects a laser beam on the surface of a SOI wafer and detects foreign matter on and defects in the surface of the SOI wafer by receiving scattered light reflected from the surface of the SOI wafer. The wavelength of the laser beam used by the inspection apparatus is determined so that a penetration depth of the laser beam in a Si thin film may be 10 nm or below to detect only foreign matter on and defects in the outermost surface and not to detect foreign matter and defects in a BOX layer. Only the foreign matter on and defects in the outermost surface layer can be detected without being influenced by thin-film interference by projecting the laser beam on the surface of the SOI wafer and receiving scattered light rays.
Abstract:
A wiper blade includes a wiper strip, a lever assembly and a cover member. The lever assembly has a connecting arrangement and holding claws. The connecting arrangement is connected to a wiper arm. The holding claws hold the wiper strip. The cover member has a cover opening, which is opened on a wiper strip side thereof. The cover member receives the lever assembly through the cover opening. In an interior space between the cover member and the wiper strip, holder end side openings, each of which is a part of the cover opening, are covered by two connecting arrangement end side cover parts. In this way, in the interior space between the cover member and the wiper strip, spaces, into which fluid intrudes, are reduced.
Abstract:
In order to insert a regenerator into a wavelength cross-connect equipment, there is provided at least one port that demultiplexes one wavelength among the wavelength multiplexed signals that are input to a wavelength selective switch. An output of the port that demultiplexes one wavelength is input to the regenerator, and an output of the regenerator is again input to the WSS. The wavelength output from the regenerator is converted into another wavelength different from the wavelength that is input to the regenerator and can be processed by the WSS in advance. The output from the regenerator is input to the WSS through an optical coupler or another input port of the WSS.
Abstract:
A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate.
Abstract:
A mounting device for a rim disk of a full face wheel for a vehicle has a disk disposed on a rotating table rotated by a rotating device about the center axis (X) of a full face wheel and radially positioned by a hub hole fitting piece and a rim disposed on the disk and radially positioned by arresting a rim drop part by a rim position arresting means, with the disk and rim being pressingly held between a disk support piece and a rim support piece by upwardly pulling an aligning rod connected to the rotating table through a rod connection means along the center axis (X) of the full face wheel while downwardly pressing a rim flange part by the rim support piece to bring the disk and the rim into a pressed state. By the rim disk mounting device, the disk and the rim radially positioned with high accuracy can be brought into pressed state with a strong holding pressure, and both the disk and the rim can be stably rotated. Thus, a thermal deformation can be suppressed and welding can be uniformly and accurately performed.
Abstract:
According to one embodiment, a broadcast receiving apparatus includes: a tuner selecting and receiving a broadcast signal of digital broadcast; a recording control module making video data obtained by the tuner receiving the broadcast signal recorded in a recording medium; a video reproducing module reproducing a video signal by using the video data recorded in the recording medium; a video data selecting module selecting only identical apparatus video data obtained by the tuner of the identical apparatus receiving the broadcast signal, among the video data recorded in the recording medium; and a displaying control module making a program reference chart corresponding to the identical apparatus video data selected by the video data selecting module displayed.
Abstract:
The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus.
Abstract:
An optical transmission apparatus including an optical amplifier for providing a high-power optical amplifier on the receive side, in which a wavelength of pumping light for an optical amplifier on the transmission side is suitably shifted to be different from a wavelength of pumping light for an optical amplifier on the receive side, pumping optical power for the optical amplifier on the transmission side is not all consumed in a doped fiber in amplification process, and remnant pump light that was left surplus is added by a wavelength multiplex coupler to the pumping light for the optical amplifier on the receive side, thereby enhancing a gain and light output without an increase in output power of the pumping light used for the optical amplifier on the receive side.
Abstract:
A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.
Abstract:
An optical add-drop function part of an optical add-drop multiplexer has an output end of transmitted light signal in which an optical termination mechanism formed by an optical detector for detecting open of an optical fiber, an optical switch, and an optical terminator are mounted. Further, a reflection level calculation circuit, a reflection warning determination circuit, and an optical switch selection circuit are mounted to perform laser safety in the optical add-drop function part as well. The laser safety part in the optical add-drop function part is operated earlier than the laser safety part in an optical amplification function part.