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公开(公告)号：US20100277630A1
公开(公告)日：2010-11-04
申请号：US12095674
申请日：2007-01-11
CPC分类号： G01T1/2018 , H01L27/14603 , H01L27/14632 , H01L27/14663
摘要： Pixels including a photoelectric conversion element 1, a signal transfer TFT (thin film transistor) 2 electrically connected to the photoelectric conversion element, and a reset TFT 3 electrically connected to the photoelectric conversion element and for applying a bias to the photoelectric conversion element are two-dimensionally disposed on the insulating substrate, and the photoelectric conversion element 1, signal transfer TFT 2, and reset TFT 3 are electrically connected through a common contact hole 9. A source or drain electrode of the signal transfer TFT 2 and the source or drain electrode of the reset TFT 3 are formed from a common electroconductive layer.
摘要翻译： 电连接到光电转换元件的光电转换元件1，信号转移TFT（薄膜晶体管）2和与光电转换元件电连接并用于向光电转换元件施加偏压的复位TFT 3的像素是两个 并且光电转换元件1，信号传输TFT 2和复位TFT 3通过公共接触孔9电连接。信号传输TFT 2的源极或漏极和源极或漏极 复位TFT 3的电极由公共导电层形成。
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公开(公告)号：US20100072381A1
公开(公告)日：2010-03-25
申请号：US12627635
申请日：2009-11-30
IPC分类号： G01T1/24
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20090283689A1
公开(公告)日：2009-11-19
申请号：US11917334
申请日：2006-07-21
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14663 , H01L27/14623 , H01L27/14692 , H01L31/117 , H01L31/119 , H04N5/32
摘要： In a radiation detecting apparatus of the invention, plural pixels are arranged, and the pixel has a conversion element converting a radiation into an electric signal and a switching element connected to the conversion element. The conversion element includes a first electrode disposed on a first surface of an insulating substrate, a second electrode disposed on the first electrode, and a semiconductor layer disposed between the first electrode and the second electrode. The first electrode is made of a light-transmitting conductive material which transmits light emitted from a light source, and the first electrode is formed from a light transmitting electroconductive material transmitting light emitted from a light source disposed on a second surface of the insulating substrate opposite to the first surface. The switching element has a light shielding member which prevents incidence of the light from the light source to the switching element.
摘要翻译： 在本发明的放射线检测装置中，配置有多个像素，像素具有将辐射转换为电信号的转换元件和与转换元件连接的开关元件。 转换元件包括设置在绝缘基板的第一表面上的第一电极，设置在第一电极上的第二电极以及设置在第一电极和第二电极之间的半导体层。 第一电极由透光从光源发射的光的透光导电材料制成，第一电极由透光导电材料形成，透光导电材料透射从布置在绝缘衬底的相对的绝缘衬底的第二表面上的光源发射的光 到第一个表面。 开关元件具有防止从光源到开关元件的入射的遮光部件。
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公开(公告)号：US20090230443A1
公开(公告)日：2009-09-17
申请号：US12299046
申请日：2008-01-15
IPC分类号： H01L31/112
CPC分类号： G01T1/241 , H01L27/14632 , H01L27/14658 , H01L27/14659 , H01L27/14663
摘要： A radiation imaging apparatus comprises a pixel region, on an insulating substrate 100, including a plurality of pixels arranged in a matrix, each pixel having a conversion element 101 that converts radiation into electric charges and a switching element 102 connected to the conversion element 101. The conversion element 101 has an upper electrode layer 119, a lower electrode layer 115, a semiconductor layer 117 arranged between the upper electrode layer 119 and the lower electrode layer 115. The upper electrode layer 119 or the lower electrode layer 115 has an opening 200 at least within a region where the semiconductor layer 117 is arranged.
摘要翻译： 辐射成像装置包括在绝缘基板100上的像素区域，该像素区域包括排列成矩阵的多个像素，每个像素具有将辐射转换成电荷的转换元件101和连接到转换元件101的开关元件102。 转换元件101具有上电极层119，下电极层115，布置在上电极层119和下电极层115之间的半导体层117.上电极层119或下电极层115具有开口200 至少在布置有半导体层117的区域内。
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公开(公告)号：US20090230311A1
公开(公告)日：2009-09-17
申请号：US12474404
申请日：2009-05-29
CPC分类号： H01L27/14609 , H01L27/14636 , H01L27/14676
摘要： To improve a sensor resetting method and thereby implement a high rate at which a moving image is read, the invention provides an image pickup apparatus and a radiation image pickup apparatus including: a plurality of pixels arranged on a substrate in row and column directions, each pixel having a conversion element and a transfer switching element; a drive wiring connected to a plurality of the transfer switching elements in the row direction; and a conversion element wiring connected to a plurality of the conversion elements in the row direction, wherein a reset switching element is disposed between the conversion element wiring and a reset wiring for supplying a reset voltage for resetting the conversion element, and a bias switching element is disposed between the conversion element wiring and a bias wiring for supplying a bias voltage for operating the conversion element.
摘要翻译： 为了改善传感器复位方法，从而实现读取运动图像的高速率，本发明提供一种图像拾取装置和放射线图像拾取装置，包括：沿行和列方向排列在基板上的多个像素，每个 像素，具有转换元件和转印开关元件; 在行方向上与多个所述转印开关元件连接的驱动配线; 以及在行方向上连接到多个转换元件的转换元件布线，其中复位开关元件设置在转换元件布线和用于提供用于复位转换元件的复位电压的复位布线之间，偏置开关元件 设置在转换元件布线和用于提供用于操作转换元件的偏置电压的偏置布线之间。
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公开(公告)号：US07557355B2
公开(公告)日：2009-07-07
申请号：US11229630
申请日：2005-09-20
IPC分类号： H01L27/146
CPC分类号： H01L27/14609 , H01L27/14636 , H01L27/14676
摘要： To improve a sensor resetting method and thereby implement a high rate at which a moving image is read, the invention provides an image pickup apparatus and a radiation image pickup apparatus including: a plurality of pixels arranged on a substrate in row and column directions, each pixel having a conversion element and a transfer switching element; a drive wiring connected to a plurality of the transfer switching elements in the row direction; and a conversion element wiring connected to a plurality of the conversion elements in the row direction, wherein a reset switching element is disposed between the conversion element wiring and a reset wiring for supplying a reset voltage for resetting the conversion element, and a bias switching element is disposed between the conversion element wiring and a bias wiring for supplying a bias voltage for operating the conversion element.
摘要翻译： 为了改善传感器复位方法，从而实现读取运动图像的高速率，本发明提供一种图像拾取装置和放射线图像拾取装置，包括：沿行和列方向排列在基板上的多个像素，每个 像素，具有转换元件和转印开关元件; 在行方向上与多个所述转印开关元件连接的驱动配线; 以及在行方向上连接到多个转换元件的转换元件布线，其中复位开关元件设置在转换元件布线和用于提供用于复位转换元件的复位电压的复位布线之间，偏置开关元件 设置在转换元件布线和用于提供用于操作转换元件的偏置电压的偏置布线之间。
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77.发明授权公开(公告)号：US07547890B2
公开(公告)日：2009-06-16
申请号：US11486102
申请日：2006-07-14
IPC分类号： G01T1/24
CPC分类号： H01L27/14643 , H01L27/14676
摘要： In an image pick-up apparatus, a plurality of pixels, each pairing a semiconductor conversion element for converting an incident electromagnetic wave to an electric signal and a thin film transistor connected to the semiconductor conversion element, is arranged in a two-dimensional state on a substrate. The image pick-up apparatus includes gate wiring to which gate electrodes of thin film transistors of a plurality of pixels arranged in one direction are commonly connected, and signal wiring to which source electrodes or drain electrodes of thin film transistors of a plurality of pixels arranged in a direction different from the one direction are commonly connected on the substrate. Protection layers are arranged on the thin film transistors, the gate wiring and the signal wiring. The protection layers formed at least at the same time. Then, the protection layers are removed in at least a part or all of regions in which the semiconductor conversion elements are formed.
摘要翻译： 在图像拾取装置中，将与入射电磁波进行转换的半导体转换元件和电连接的半导体转换元件和与半导体变换元件连接的薄膜晶体管的多个像素配置成二维状态 底物。 图像拾取装置包括栅极配线，多个像素排列的多个像素的薄膜晶体管的栅电极共同连接到该栅极布线，多个像素的薄膜晶体管的源电极或漏电极布置在其上 在与该方向不同的方向上共同连接在基板上。 保护层布置在薄膜晶体管，栅极布线和信号布线上。 保护层至少在同一时间形成。 然后，在其中形成有半导体转换元件的区域的至少一部分或全部中去除保护层。
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公开(公告)号：US07541617B2
公开(公告)日：2009-06-02
申请号：US10538013
申请日：2004-02-10
IPC分类号： H01L27/14 , H01L29/04 , H01L29/15 , H01L31/036
CPC分类号： H01L27/14658 , H04N5/32
摘要： In a radiation image pickup device including: a sensor element for converting radiation into an electrical signal; and a thin film transistor connected to the sensor element, an electrode of the sensor element connected to the thin film transistor is disposed above the thin film transistor, and that the thin film transistor has a top gate type structure in which a semiconductor layer, a gate insulating layer, and a gate electrode layer are laminated in this order on a substrate, so that a channel portion of the thin film transistor is protected by a gate electrode, thereby providing stable TFT characteristics without undesirable turning ON any of the TFT elements due to the back gate effect by the fluctuation in electric potentials corresponding to outputs from the sensor electrodes, and thereby greatly improving image quality.
摘要翻译： 一种放射线摄像装置，包括：用于将辐射转换为电信号的传感器元件; 和连接到传感器元件的薄膜晶体管，连接到薄膜晶体管的传感器元件的电极设置在薄膜晶体管的上方，并且薄膜晶体管具有顶栅型结构，其中半导体层， 栅极绝缘层和栅极电极层依次层叠在基板上，使得薄膜晶体管的沟道部分被栅极电极保护，从而提供稳定的TFT特性，而不会导致任何TFT元件的导通 通过对应于来自传感器电极的输出的电位的波动对后门效应，从而大大提高图像质量。
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79.发明申请CONVERSION APPARATUS, RADIATION DETECTING APPARATUS, AND RADIATION DETECTING SYSTEM 有权转换装置，辐射检测装置和辐射检测系统公开(公告)号：US20090052624A1
公开(公告)日：2009-02-26
申请号：US11911893
申请日：2006-07-10
IPC分类号： H05G1/64 , H01L27/146 , G01T1/24
CPC分类号： H01L27/14603 , G01T1/24 , H01L27/14609 , H01L27/14663
摘要： A conversion apparatus of the present invention includes a pixel region in which a plurality of pixels are arranged. The pixels are including the switching elements and the conversion elements. The pixel region includes a switching element region in which the plurality of switching elements are arranged in row and column directions, and a conversion element region in which the plurality of conversion elements are arranged in row and column directions. A plurality of signal wirings are including a second metal layer, and connected to the plurality of switching elements of the column direction. Bias wirings are including a fourth metal layer, and connected to the plurality of conversion elements. An external signal wiring is including the first metal layer outside the pixel region, and connected to the signal wirings. The external signal wiring and the bias wiring intersect each other.
摘要翻译： 本发明的转换装置包括其中布置多个像素的像素区域。 像素包括开关元件和转换元件。 像素区域包括其中多个开关元件被排列成行和列方向的开关元件区域和多个转换元件在行和列方向上排列的转换元件区域。 多个信号配线包括第二金属层，并连接到列方向的多个开关元件。 偏置布线包括第四金属层，并连接到多个转换元件。 外部信号布线包括像素区域外的第一金属层，并连接到信号布线。 外部信号线和偏置线彼此相交。
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80.发明授权公开(公告)号：US07488948B2
公开(公告)日：2009-02-10
申请号：US10576349
申请日：2004-11-10
IPC分类号： G01T1/20
CPC分类号： H04N5/3745 , H01L27/14632 , H01L27/14658 , H01L27/14663 , H04N5/35527
摘要： Sensitivity is freely changeable to another one in correspondence to a photographing mode, and both still image photographing and moving image photographing for example which are largely different from each other in dosage of exposure to radiation and which are also different from each other in required sensitivity are carried out so as to meet that request. A source or drain electrode of a TFT 21 is connected to a signal output circuit 3 through a signal line 14a and an IC 5. A source/drain of a TFT 23 is connected to the signal output circuit 3 through a signal line 14b and the IC 5. Thus, in each pixel 6, any one of the signal lines 14a and 14b is freely selectable when a signal is read out.
摘要翻译： 灵敏度可自由地变化为与拍摄模式相对应的灵敏度，并且静止图像拍摄和例如在暴露于辐射的剂量中彼此大不相同并且在所需灵敏度上彼此不同的动态图像拍摄中， 进行，以满足这一要求。 TFT21的源极或漏极通过信号线14a和IC5连接到信号输出电路3. TFT 23的源极/漏极通过信号线14b连接到信号输出电路3，并且 因此，在每个像素6中，当读出信号时，信号线14a和14b中的任何一个可以自由地选择。
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