公开(公告)号：US20050199795A1

公开(公告)日：2005-09-15

申请号：US10489215

申请日：2004-03-09

Applicant: Iouri Kalinitchenko

Inventor： Iouri Kalinitchenko

IPC: G01N27/62 ,  H01J49/06 ,  H01J49/10 ,  H01J49/26

CPC classification number: H01J49/08

Abstract: A mass spectrometer and method of mass spectrometry in which polyatomic and doubly charged ion interferences are attenuated by establishing an electron population through which a beam of particles containing elemental sample ions and the interfering ions is passed such that the interfering ions preferentially undergo ion-electron recombination and thus dissociation to remove a significant number of the interfering ions. Means (30 or 32) for providing a population of electrons (34 or 36) in an ICP-MS (22) may comprise a magnetic field means such as an electric coil, or an electron generating device. The population of electrons has an electron number density (>1011 cm−3 to 1014 cm−3), a free electron energy (>0.01 eV to

Abstract translation: 通过建立电子群减少多原子和双电荷离子干扰的质谱仪和质谱法，通过该质谱仪将含有元素样品离子和干扰离子的粒子束通过，使得干扰离子优先进行离子电子重组 并因此解离以除去大量的干扰离子。 用于在ICP-MS（22）中提供电子群体（34或36）的装置（30或32）可以包括诸如电线圈或电子产生装置的磁场装置。 电子群体具有电子数密度（> 10×10 -3 cm -3至10 14 cm -3 -3 / ），在低压（<10Torr）的区域中的自由电子能量（> 0.01eV至<5eV），使得通过电子群体的离子的预定路径长度（1-4cm）， 干扰离子将优先通过解离复合过程减弱。 离子束（40）然后通过质量分析器（42），并且通过离子检测器（44）检测已经根据其质荷比分离的离子。

公开(公告)号：US06452167B1

公开(公告)日：2002-09-17

申请号：US09315001

申请日：1999-05-19

Applicant: Thomas E. Felter

Inventor： Thomas E. Felter

IPC: H01J4914

CPC classification number: H01J49/147 ,  H01J1/3042 ,  H01J49/08 ,  H01J49/4215 ,  H01J2201/30407

Abstract: An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally “cracking” delicate analyte molecules, outgassing a “hot” filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.

Abstract translation: 描述了改进的四极质谱仪。 改进之处在于用冷阴极场发射体阵列代替传统的热丝电子源，该冷阴极场发射器阵列又允许在很高的内部压力下操作小的QMS，然后目前是可实现的。 通过消除热丝，诸如热“裂解”精细的分析物分子，排除“热”丝，高功率需求，排气物质的细丝污染和杂散电场等问题都避免在一起。 此外，使用已知和发展良好的光刻技术制造FEA的能力允许以非常低的附加成本构建具有多个电离源冗余的QMS。

公开(公告)号：US4514682A

公开(公告)日：1985-04-30

申请号：US398542

申请日：1982-07-15

Applicant: Hans-Peter Feuerbaum

Inventor： Hans-Peter Feuerbaum

IPC: G01R31/26 ,  G01Q30/02 ,  G01R31/302 ,  H01J37/252 ,  H01J49/08 ,  H01J49/44 ,  H01L21/66 ,  G01N27/00

CPC classification number: H01J49/08 ,  H01J49/44

Abstract: An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.

Abstract translation: 用于测量在诸如集成电路芯片的样本上发生的电压的改进的二次电子光谱仪利用电子探针具有用于独立于测量点处的二次电子的角分布来测量二次电子的能量分布的光栅结构 在标本上。 如果二次电子光谱仪具有提取电极和减速电极，则光栅结构是球形对称的。

公开(公告)号：US3586853A

公开(公告)日：1971-06-22

申请号：US3586853D

申请日：1968-11-14

Applicant: SCIENT RESEARCH INSTR CORP

Inventor： VESTAL MARVIN L

IPC: H01J49/40 ,  H01J39/34

CPC classification number: H01J49/147 ,  H01J49/08 ,  H01J49/40

Abstract: A time of flight mass spectrometer wherein the ionizing electron beam is in axial alignment with the path of the ions produced thereby and wherein an electron multiplier is utilized to generate a high intensity electron beam for ionization. An open mesh control grid is utilized to control the axial dimension of the ionization region so that it can be maintained very small in order that the distance traveled by each of the ions to an ion detector at the opposite end of a drift tube is very nearly the same. This will result in a more accurate measurement of the mass of the ions since the difference in travel time to reception by the ion detector will be primarily because of difference in mass alone and not because of a difference in the distance traveled.