公开(公告)号：US20110305314A1

公开(公告)日：2011-12-15

申请号：US13156166

申请日：2011-06-08

申请人： Shin Kitamura ,  Naofumi Aoki ,  Yoichi Murakami ,  Kota Aoki ,  Takeo Tsukamoto

发明人： Shin Kitamura ,  Naofumi Aoki ,  Yoichi Murakami ,  Kota Aoki ,  Takeo Tsukamoto

IPC分类号： G01N23/04 ,  H01J29/10 ,  H01J9/02

CPC分类号： H01J31/127 ,  H01J1/3044 ,  H01J29/04 ,  H01J2201/30407 ,  H01J2329/0413

摘要： A field emission type electron emitting device includes a cathode including a mixture of a lanthanum oxide and a molybdenum oxide.

摘要翻译： 场发射型电子发射器件包括包含氧化镧和氧化钼的混合物的阴极。

公开(公告)号：US20070184747A1

公开(公告)日：2007-08-09

申请号：US11729442

申请日：2007-03-29

申请人： Keisuke Koga ,  Makoto Yamamoto ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

发明人： Keisuke Koga ,  Makoto Yamamoto ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

IPC分类号： H01J9/00

CPC分类号： H01J1/3044 ,  H01J9/025 ,  H01J2201/30407

摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.

摘要翻译： 提供即使在长时间的高电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在每个发射电子的阴极的表面上的表面改性层，包括构成阴极的阴极材料和不同于阴极材料的材料之间的化学键。

公开(公告)号：US07215072B2

公开(公告)日：2007-05-08

申请号：US10806803

申请日：2004-03-23

申请人： Keisuke Koga ,  Makoto Yamamoto ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

发明人： Keisuke Koga ,  Makoto Yamamoto ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

IPC分类号： H01J1/05

CPC分类号： H01J1/3044 ,  H01J9/025 ,  H01J2201/30407

摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.

公开(公告)号：US20040189176A1

公开(公告)日：2004-09-30

申请号：US10806803

申请日：2004-03-23

申请人： Matsushita Electric Industrial Co., Ltd. ,  National Institute of Advanced Industrial Science and Technology

发明人： Keisuke Koga ,  Makoto Yamamoto ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

IPC分类号： H01J001/05

CPC分类号： H01J1/3044 ,  H01J9/025 ,  H01J2201/30407

摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.

摘要翻译： 提供即使在长时间的高电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在发射电子的每个阴极的表面上的表面改性层，包括构成阴极的阴极材料与不同于阴极材料的材料之间的化学键。

公开(公告)号：US06633041B2

公开(公告)日：2003-10-14

申请号：US10245656

申请日：2002-09-16

申请人： Thomas E. Felter

发明人： Thomas E. Felter

IPC分类号： H01J4914

CPC分类号： H01J49/147 ,  H01J1/3042 ,  H01J49/08 ,  H01J49/4215 ,  H01J2201/30407

摘要： An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally “cracking” delicate analyte molecules, outgassing a “hot” filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.

摘要翻译： 描述了改进的四极质谱仪。 改进之处在于用冷阴极场发射体阵列代替传统的热丝电子源，该冷阴极场发射器阵列又允许在很高的内部压力下操作小的QMS，然后目前是可实现的。 通过消除热丝，诸如热“裂解”精细的分析物分子，排除“热”丝，高功率需求，排气物质的细丝污染和杂散电场等问题都避免在一起。 此外，使用已知和发展良好的光刻技术生产FEA的能力允许以非常低的附加成本构建具有多个电离源冗余的QMS。

公开(公告)号：US06552477B2

公开(公告)日：2003-04-22

申请号：US09244558

申请日：1999-02-03

申请人： Ji Ung Lee

发明人： Ji Ung Lee

IPC分类号： H01J1304

CPC分类号： H01J9/025 ,  H01J3/022 ,  H01J2201/30407

摘要： A field emission display backplate including a substrate having a surface; an emitter which extends from the surface of the substrate; and an anode having an upper surface, a lower surface, and an opening surface which defines an opening aligned with the emitter, the opening surface includes a first portion which curves outward relative to the anode and a second portion which curves inward relative to the anode.

摘要翻译： 一种场发射显示背板，包括具有表面的基板; 从衬底的表面延伸的发射体; 以及具有上表面，下表面和限定与发射器对准的开口的开口表面的阳极，所述开口表面包括相对于阳极向外弯曲的第一部分和相对于阳极向内弯曲的第二部分 。

公开(公告)号：US5850120A

公开(公告)日：1998-12-15

申请号：US676452

申请日：1996-07-08

申请人： Akihiko Okamoto

发明人： Akihiko Okamoto

IPC分类号： H01J3/02 ,  H01J1/30 ,  H01J19/24

CPC分类号： H01J3/022 ,  H01J2201/30407

摘要： An electron gun includes a field emission cold cathode (1) having a first electric potential, a primary gate electrode (2) having a first opening around the top of the cathode (1) and having a second electric potential which is higher than the first electric potential for causing an electron emission from the top of the cathode (1), and a second gate electrode (3) having a second opening around the top of the cathode (1) and having a third electric potential which is higher than the first electric potential and lower than the second electric potential, wherein a first voltage defined as a difference between the first and the second electric potentials varies in proportion to a second voltage defined as a difference between the first and the third electric potentials so as to provide a current-voltage characteristic having an apparent gamma-property. The apparent gamma-property is such that the luminous output of a fluorescent substance (7) of an anode (8) is directly proportional to a signal voltage.

摘要翻译： 电子枪包括具有第一电位的场发射冷阴极（1），具有围绕阴极（1）的顶部的第一开口的主栅电极（2），并且具有比第一电位高的第一电位 用于从阴极（1）的顶部引起电子发射的电位;以及第二栅电极（3），其具有围绕阴极（1）的顶部的第二开口，并且具有比第一栅极 电位低于第二电位，其中，被定义为第一和第二电位之间的差的第一电压与被定义为第一和第三电位之间的差的第二电压成比例地变化，从而提供 具有表观伽马性质的电流 - 电压特性。 表观γ特性使得阳极（8）的荧光物质（7）的发光输出与信号电压成正比。

公开(公告)号：US10083812B1

公开(公告)日：2018-09-25

申请号：US15359436

申请日：2016-11-22

申请人： Applied Physics Technologies, Inc.

发明人： William A. Mackie ,  Gerald G. Magera ,  Joshua M. Lovell

IPC分类号： H01J1/304 ,  H01J9/02

CPC分类号： H01J1/3044 ,  H01J9/025 ,  H01J2201/30407 ,  H01J2201/30484 ,  H01J2209/0223

摘要： An electron source emitter is made from transition metal carbide materials, including hafnium carbide (HfC), zirconium carbide (ZrC), titanium carbide (TiC), vanadium carbide (VC), niobium carbide (NbC), and tantalum carbide (TaC), which are of high refractory nature. Preferential evaporating and subsequent development of different crystallographic planes of the transition metal carbide emitter having initially at its apex a small radius (50 nm-300 nm) develop over time an on-axis, sharp end-form or tip that is uniformly accentuated circumferentially to an extreme angular form and persists over time. An emitter manufactured to the (110) crystallographic plane and operating at high electron beam current and high temperature for about 20 hours to 40 hours results in the (110) plane, while initially not a high emission crystallographic orientation, developing into a very high field emission orientation because of the geometrical change. This geometrical change allows for a very high electric field and hence high on-axis electron emission.

公开(公告)号：US07735147B2

公开(公告)日：2010-06-08

申请号：US12088223

申请日：2006-10-10

申请人： Sungho Jin ,  Li-Han Chen ,  I-Chen Chen

发明人： Sungho Jin ,  Li-Han Chen ,  I-Chen Chen

IPC分类号： H01J37/06

CPC分类号： H01J9/025 ,  C01B32/162 ,  C01B32/18 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/12 ,  G11B9/1409 ,  H01J1/3044 ,  H01J2201/30407 ,  H01J2201/30469 ,  Y10T428/11

摘要： A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.

摘要翻译： 一种机械稳定和取向的扫描探针尖端，其包括具有逐渐减小的直径的基底的碳纳米管，在探针尖端具有尖锐的尖端。 通过在基板（图1（a）中的10和12）上沉积催化剂金属膜，在催化剂金属上沉积碳点（图1（b）中的14））来产生尖端或尖端阵列 蚀刻不被碳点掩蔽的催化剂金属膜（图1（c）），从催化剂金属膜除去碳点以暴露催化剂金属膜（图1（d）），并生长 催化剂膜上的碳纳米管探针尖端（图1（e）中的16））。 碳探针尖端可以是直的，有角度的或急剧弯曲的，并具有各种技术应用。

公开(公告)号：US20090160307A1

公开(公告)日：2009-06-25

申请号：US12094250

申请日：2007-09-18

申请人： Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

发明人： Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

IPC分类号： H01J1/16 ,  H01J9/02

CPC分类号： H01J1/3044 ,  H01J9/025 ,  H01J37/065 ,  H01J37/073 ,  H01J2201/30407 ,  H01J2201/30411 ,  H01J2201/30419 ,  H01J2201/30457 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/3137 ,  H01J2237/3146 ,  H01J2237/31749 ,  H01J2237/3175

摘要： A diamond electron source in which a single sharpened tip is formed at one end of a pillar-shaped diamond monocrystal of a size for which resist application is difficult in a microfabrication process, as an electron emission point used in an electron microscope or other electron beam device, and a method for manufacturing the diamond electron source. One end of a pillar-shaped diamond monocrystal 10 is ground to form a smooth flat surface 11, and a ceramic layer 12 is formed on the smooth flat surface 11. A thin-film layer 14 having a prescribed shape is deposited on the ceramic layer 12 using a focused ion beam device, after which the ceramic layer 12 is patterned by etching using the thin-film layer 14 as a mask. A single sharpened tip is formed at one end of the pillar-shaped diamond monocrystal 10 by dry etching using the resultant ceramic mask.

摘要翻译： 一种金刚石电子源，其中在微细加工过程中难以施加抗蚀剂尺寸的柱状金刚石单晶的一端形成单个锐化尖端作为电子显微镜或其他电子束中使用的电子发射点 器件，以及金刚石电子源的制造方法。 将柱状金刚石单晶10的一端研磨成平滑的平坦面11，在平坦的平坦面11上形成陶瓷层12.具有规定形状的薄膜层14沉积在陶瓷层上 12，使用聚焦离子束装置，之后通过使用薄膜层14作为掩模的蚀刻对陶瓷层12进行图案化。 通过使用所得到的陶瓷掩模的干蚀刻，在柱状金刚石单晶10的一端形成单个尖锐的尖端。