公开(公告)号：US06749390B2

公开(公告)日：2004-06-15

申请号：US09875428

申请日：2001-06-05

申请人： Daniel J. Woodruff ,  Randy Harris

发明人： Daniel J. Woodruff ,  Randy Harris

IPC分类号： B66C2300

CPC分类号： H01L21/67173 ,  B25J5/02 ,  H01L21/6723 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10T74/20317

摘要： Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm.

摘要翻译： 用于处理微电子工件的转移装置，用于处理微电子工件的装置，以及制造和使用这种转移装置的方法。 传送装置的一个实施例包括传送单元，其构造成沿着线性轨道和由传送单元承载的升降组件移动。 传送装置还可以包括臂组件，其具有由提升组件承载的臂致动器，以沿着提升路径移动，以及由臂致动器承载的臂围绕提升路径旋转。 臂可以包括从提升路径的一侧突出的第一延伸部和从提升路径的另一侧突出的第二延伸部。 手臂致动器可以围绕提升路径旋转手臂。 转移装置还可以包括第一末端执行器和第二末端执行器。 第一端部执行器可旋转地联接到臂的第一部分以围绕第一旋转轴线旋转，并且第二端部执行器可旋转地联接到臂的第二延伸部以围绕第二旋转轴线旋转。 第一和第二旋转轴线可以大致平行于提升路径，其本身可以是大致垂直的，并且第一和第二端部执行器可以相对于臂处于不同的高度。

公开(公告)号：US06168695A

公开(公告)日：2001-01-02

申请号：US09351980

申请日：1999-07-12

申请人： Daniel J. Woodruff ,  Martin C. Bleck

发明人： Daniel J. Woodruff ,  Martin C. Bleck

IPC分类号： C25B900

CPC分类号： H01L21/67017 ,  C25D7/123 ,  C25D17/001

摘要： A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly provides at least one of signals, gases and fluids to the process head. The cable assembly includes a common cable loop for feeding additional length of cable along both the lift direction of movement by the lift mechanism and the rotational direction of movement by the rotating mechanism.

摘要翻译： 用于工件加工台的升降和旋转组件。 提升和旋转组件包括具有细长轮廓的主体和位于相对侧上的销，用于将组件安装到工具框架上。 提升和旋转组件还包括将处理头连接到主体并且用于相对于主体旋转处理头的旋转机构。 旋转机构包括电动机，其中电动机位于处理头内并且电动机的轴相对于主体联接并旋转地固定。 提升和旋转组件还包括用于相对于主体提升处理头的升降机构。 提升和旋转组件内的电缆组件向工艺头提供信号，气体和流体中的至少一种。 电缆组件包括用于通过提升机构沿提升运动方向和通过旋转机构的旋转运动方向沿着提升运动方向进给附加长度的电缆的公共电缆环。

公开(公告)号：US5739978A

公开(公告)日：1998-04-14

申请号：US649250

申请日：1996-05-17

申请人： John F. Ellis ,  Daniel W. Hoekstra ,  Daniel J. Woodruff

发明人： John F. Ellis ,  Daniel W. Hoekstra ,  Daniel J. Woodruff

IPC分类号： G11B15/68 ,  G11B17/24

CPC分类号： G11B15/683

摘要： An automated cartridge handling system or library (20, 20') for storing cartridges (22) of information storage media comprises a cartridge holder (26); a tape drive (30) movably mounted with respect to the cartridge holder; and, a transport system (40) for transporting the tape drive (30) in a drive transport path (42) between a unloaded position and a cartridge loaded position. The cartridges (22) remain stationary in the library while the tape drive is transported between the unloaded position and the cartridge loaded position. The cartridge holder library has a plurality of apertures (70) which receive cartridge holders or spines (80). To retain the cartridge (22) within the spine, each spine has resilient cartridge retaining fingers (100) formed in its interior cavity (90) for engaging a notch (104) on the cartridge. Each spine is provided with stabilization flanges (112) for stabilizing the cartridge. Each spine has asymmetrical orientation flanges (116) so that the cartridge-laden spine can be inserted into the library only in an up-right orientation.

摘要翻译： 用于存储信息存储介质的盒（22）的自动化盒式磁带处理系统或库（20,20'）包括盒保持器（26）; 相对于盒保持器可移动地安装的磁带驱动器（30）; 以及传送系统（40），用于在无负载位置和盒装载位置之间的驱动传送路径（42）中传送带驱动器（30）。 当磁带驱动器在卸载位置和盒装载位置之间传送时，盒（22）保持静止在库中。 墨盒支架库具有多个孔（70），其容纳墨盒保持器或刺（80）。 为了将筒（22）保持在脊柱内，每个脊具有形成在其内部空腔（90）中的弹性筒保持指（100），用于接合盒上的凹口（104）。 每个脊都设有用于稳定盒的稳定凸缘（112）。 每个脊柱具有不对称的取向凸缘（116），使得装满筒的脊柱只能以右上方向插入图书馆。

公开(公告)号：US5487579A

公开(公告)日：1996-01-30

申请号：US112260

申请日：1993-08-26

申请人： Daniel J. Woodruff

发明人： Daniel J. Woodruff

IPC分类号： G11B15/68 ,  G11B23/023 ,  B66C1/42

CPC分类号： G11B15/688 ,  G11B23/0236 ,  Y10S294/907

摘要： A picker mechanism (80) selectively grips and transports a data storage cartridge (62) in an automated library (30). The picker mechanism (80) has a picker frame (400) comprised of two half shell members (402, 404). Substantially all active elements of the picker are mounted to a base half shell (402) over which a cover half shell (404) mates for enclosing substantially all active picker elements. The active picker elements include a pair of gripper fingers (406) pivotally mounted to the picker frame. Each gripper finger (406) has a portion thereof configured to engage a data storage cartridge. The picker frame also carries a displacement path (e.g., leadscrew 418) along which a carriage member (e.g., leadscrew nut 426) travels. A motor (414) is provided for driving the carriage member (426) along the displacement path. A pair of biasing springs (432), one for each gripper finger (406), are provided for biasing the gripper fingers in a direction toward the displacement path. Also provided for each gripper finger is a linkage element (428). Driving the carriage member (426) along the displacement path causes the gripper fingers (426) to pivot between a cartridge engagement position to a cartridge release position, as well as a cartridge shove position.

摘要翻译： 选择器机构（80）选择性地夹持和传送数据存储盒（62）在自动库（30）中。 拾取机构（80）具有由两个半壳构件（402,404）组成的拾取框架（400）。 拾取器的基本上所有的有源元件被安装到基部半壳（402）上，盖半壳（404）在该基部半壳（402）上配合以封闭基本上所有活动的拾取元件。 主动拾取器元件包括枢转地安装到拾取器框架的一对夹持器指状物（406）。 每个夹持器手指（406）的一部分被配置成接合数据存储盒。 拾取器框架还具有移动路径（例如，丝杠418），滑架构件（例如，螺旋螺母426）沿着该位移路径行进。 提供电动机（414），用于沿着位移路径驱动滑架构件（426）。 提供一对偏压弹簧（432），一个用于每个夹爪（406）的偏置弹簧（432），用于在朝向位移路径的方向上偏置夹持器手指。 还提供用于每个夹持器手指的是联动元件（428）。 沿着位移路径驱动滑架构件426使得夹爪指状物426在盒接合位置到盒释放位置之间枢转，以及盒推动位置。

公开(公告)号：US5317554A

公开(公告)日：1994-05-31

申请号：US859190

申请日：1992-03-27

申请人： Wilhelm Taylor ,  Michael D. Faucett ,  Daniel J. Woodruff

发明人： Wilhelm Taylor ,  Michael D. Faucett ,  Daniel J. Woodruff

IPC分类号： G11B23/033 ,  G11B7/00 ,  G11B7/004 ,  G11B17/22 ,  G11B17/28 ,  G11B23/023 ,  G11B17/08 ,  G11B5/016 ,  G11B33/02

CPC分类号： G11B17/221

摘要： a mass loader (10) stores a plurality of cartridges (14) for loading a selected one of the cartridges (14) into an optical disk reader (12). The loader (10) comprises a magazine carrier (18) and a cartridge loading apparatus (28). The cartridges (14) are stored in a vertical and parallel orientation within slots in a magazine (16) which is then inserted into the magazine carrier (18). The magazine carrier (18) depends from a follower nut (52) which travels along a lead screw (50) in a direction transverse to the parallel orientation of the cartridges (14). As the leadscrew (50) turns, the follower nut (52) travels therealong to move the magazine (16) into the correct position to load the selected one of the cartridges (14) into the reader (12). After the magazine is properly positioned, another lead screw (30) is driven to propel another follower nut (32) therealong. The follower nut (32) has a loading pin ( 40) protruding therefrom which engages the selected one of the cartridges (14) for loading. The leadscrew (30) is then driven to propel the cartridge (14) via the pin (40) on the follower nut (32) into the reader (12).

摘要翻译： 质量装载器（10）存储用于将所选择的一个盒（14）加载到光盘读取器（12）中的多个盒（14）。 装载机（10）包括一个料斗托架（18）和一个料筒装载装置（28）。 盒（14）以垂直和平行的方式存储在盒（16）中的狭槽内，然后插入盒架（18）中。 料仓托架（18）从沿着导螺杆（50）沿垂直于墨盒（14）的平行方向的方向行进的从动螺母（52）而定。 当丝杠（50）转动时，从动螺母（52）沿着其移动，以将料仓（16）移动到正确的位置，以将所选择的一个盒（14）装载到读取器（12）中。 在盒子被正确定位之后，驱动另一个导螺杆（30），以推动另一个从动螺母（32）。 从动螺母（32）具有从其突出的装载销（40），其接合所选择的一个盒（14）以进行装载。 丝杠（30）然后被驱动以经由从动螺母（32）上的销（40）推进盒（14）进入读取器（12）。