摘要:
Provided is a method of manufacturing a hollow microneedle structure. The method includes coating a hollow core having a predetermined section and being long in a lengthwise direction with a coating solution, and solidifying the coating solution to form a coating layer, depositing a metal seed layer on the coating layer, plating the seed metal layer with a metal to form a plated layer, cutting the hollow core having the plated layer at an inclination angle with respect to the lengthwise direction to form a surface inclination, and removing the hollow core and the coating layer to form a hollow. Thus, the hollow microneedle structure can be manufactured to have such diameter, length, hardness, and inclination angle as to minimize pain. By use of the hollow core, the microneedle structure can have vertical microneedles with a uniform inner diameter.
摘要:
A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
摘要:
Provided is a disposable multi-layered filtration device for the separation of blood plasma which can be applied to a biochip and appropriate for disposal uses. The filtration device for the separation of blood plasma includes: an upper substrate including a blood inlet; an intermediate substrate including a filtering unit for extracting blood plasma from blood flowing through the blood inlet; and a lower substrate including an air outlet, wherein the upper substrate, the intermediate substrate, and the lower substrate are stacked and adhered.