METHOD OF MANUFACTURING HOLLOW MICRONEEDLE STRUCTURES
    81.
    发明申请
    METHOD OF MANUFACTURING HOLLOW MICRONEEDLE STRUCTURES 有权
    制造中空微结构的方法

    公开(公告)号:US20110005669A1

    公开(公告)日:2011-01-13

    申请号:US12635480

    申请日:2009-12-10

    IPC分类号: B05D7/00 B05D3/12 B32B38/00

    摘要: Provided is a method of manufacturing a hollow microneedle structure. The method includes coating a hollow core having a predetermined section and being long in a lengthwise direction with a coating solution, and solidifying the coating solution to form a coating layer, depositing a metal seed layer on the coating layer, plating the seed metal layer with a metal to form a plated layer, cutting the hollow core having the plated layer at an inclination angle with respect to the lengthwise direction to form a surface inclination, and removing the hollow core and the coating layer to form a hollow. Thus, the hollow microneedle structure can be manufactured to have such diameter, length, hardness, and inclination angle as to minimize pain. By use of the hollow core, the microneedle structure can have vertical microneedles with a uniform inner diameter.

    摘要翻译: 提供一种制造中空微针结构的方法。 该方法包括用涂布溶液涂布具有预定部分并在长度方向上长的中空芯,并固化涂布溶液以形成涂层,在涂层上沉积金属籽晶层,将种子金属层与 金属以形成镀层,切割具有相对于长度方向的倾斜角度的镀层的中空芯,以形成表面倾斜,并且移除中空芯和涂层以形成中空部。 因此,可以制造中空微针结构以具有使疼痛最小化的直径,长度,硬度和倾斜角度。 通过使用中空芯,微针结构可以具有均匀内径的垂直微针。

    Micro gas sensor and manufacturing method thereof
    82.
    发明授权
    Micro gas sensor and manufacturing method thereof 有权
    微气体传感器及其制造方法

    公开(公告)号:US07861575B2

    公开(公告)日:2011-01-04

    申请号:US12142695

    申请日:2008-06-19

    IPC分类号: G01N7/00 G01N27/12

    CPC分类号: G01N33/0027 G01N27/128

    摘要: A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.

    摘要翻译: 公开了一种包括基板的微气体传感器; 在所述基板中形成的开放空腔; 形成在所述基板上的电极焊盘分离槽; 第一和第二电极焊盘,形成在所述衬底上并且由所述电极焊盘分离槽彼此电绝缘; 连接到第一电极焊盘并由悬挂在开放空腔上的桥结构构成的微加热器; 第一感测电极,其从所述第一电极焊盘延伸并悬挂在所述开放腔上; 第二感测电极,其从所述第一电极焊盘延伸并悬挂在所述开口腔上; 以及电气耦合到微加热器并填充第一和第二感测电极之间的间隙的气体感测膜。