Polishing process for use in method of fabricating semiconductor device
    81.
    发明授权
    Polishing process for use in method of fabricating semiconductor device 失效
    用于制造半导体器件的方法的抛光工艺

    公开(公告)号:US06443807B1

    公开(公告)日:2002-09-03

    申请号:US09702673

    申请日:2000-11-01

    IPC分类号: B24B100

    摘要: First, in a primary polishing step, a substrate is brought into close contact with a first pad including abrasives and made of a hard material, and the first pad is rotated while a first solution containing no abrasive is supplied onto the first pad to polish a surface of the substrate. In the primary polishing step, since the first solution contains no abrasive and the first pad is hard, polishing is performed with high flatness and extremely less dishing and erosion. Next, in a secondary polishing step, the substrate is brought into close contact with a second pad including no abrasive and made of a soft material, and the second pad is rotated while a second solution containing abrasives is supplied onto the second pad to polish the surface of the substrate. In the secondary polishing step, since the second solution contains the abrasives and the second pad is soft, scratches produced in the primary polishing step are reduced.

    摘要翻译: 首先,在一次抛光步骤中,将衬底与包括磨料的第一衬垫紧密接触并由硬质材料制成,并且第一衬垫旋转,而不含磨料的第一溶液被供应到第一衬垫上以抛光 基板的表面。 在一次抛光步骤中,由于第一溶液不含研磨剂,并且第一填料是硬的,所以以高的平整度和极少的凹陷和侵蚀进行抛光。 接下来,在二次抛光步骤中,使衬底与不含研磨剂的第二衬垫紧密接触并由软材料制成,并且第二衬垫旋转,同时将含有磨料的第二溶液供应到第二衬垫上以抛光 基板的表面。 在二次抛光步骤中,由于第二溶液含有研磨剂,并且第二垫是柔软的,所以在一次抛光步骤中产生的划痕减小。

    Device and method for filtering information, device and method for
monitoring updated document information and information storage medium
used in same devices
    83.
    发明授权
    Device and method for filtering information, device and method for monitoring updated document information and information storage medium used in same devices 失效
    用于过滤信息的设备和方法,用于监视在相同设备中使用的更新的文档信息和信息存储介质的设备和方法

    公开(公告)号:US6092091A

    公开(公告)日:2000-07-18

    申请号:US929275

    申请日:1997-09-12

    IPC分类号: G06F17/30

    摘要: The present invention is a device and method for filtering information, the device comprising a document database storing document data to be filtered, a reproduced document information storing unit storing fundamental document data used for detection of documents, newly created or updated, a detecting unit for detecting a document, newly created or updated, among document data stored in the document database based on document data stored in the document database and the fundamental document data stored in the reproduced document information storing unit, a similarity computing unit for computing a similarity between the detected document detected by the detecting unit and a retrieval condition set in advance, and a presenting unit for presenting detected documents detected by the detecting unit according to the similarities computed by the similarity computing unit.

    摘要翻译: 本发明是用于过滤信息的装置和方法,该装置包括存储要被滤波的文档数据的文档数据库,存储用于检测新创建或更新的文档的基本文档数据的再现文档信息存储单元,用于 基于存储在文档数据库中的文档数据和存储在再现文档信息存储单元中的基本文档数据,检测在文档数据库中存储的文档数据中新创建或更新的文档;相似度计算单元, 由检测单元检测到的检测文档和预先设置的检索条件;以及呈现单元,用于根据由相似度计算单元计算的相似度呈现由检测单元检测到的检测文档。

    Optical waveguide grating and production method therefor
    84.
    发明授权
    Optical waveguide grating and production method therefor 失效
    光波导光栅及其制作方法

    公开(公告)号:US5949934A

    公开(公告)日:1999-09-07

    申请号:US823629

    申请日:1997-03-26

    IPC分类号: G02B6/124 G02B6/34

    摘要: An optical waveguide grating with radiative mode-coupling properties, with exceptional stability and reliability as an optical component, wherein the central wavelength of the rejection band has a low temperature dependence, due to the use of silica glass doped with germanium and boron for the core. The rejection bandwidth can be narrowed without increasing the grating length by forming the radiative mode-coupled optical waveguide grating in an optical waveguide wherein the mean relative refractive index difference of the core is greater than that of optical communication waveguides. The rejection can be increased by reducing the occurrence of cases wherein propagation modes of the core coupled to cladding modes once again couple to the core in palnar optical waveguide gratings formed by making periodic changes in the waveguide structure along the direction of propagation of light in an optical waveguide having a cladding with a lower refractive index than the core surrounding the core, by making the thickness of the cladding at least thirteen times the thickness of the core.

    摘要翻译: 具有辐射模耦合特性的光波导光栅作为光学部件具有出色的稳定性和可靠性,其中由于使用掺杂有锗和硼的石英玻璃作为芯,所以抑制带的中心波长具有低的温度依赖性 。 可以通过在光波导中形成辐射模耦合光波导光栅而不增加光栅长度来减小抑制带宽,其中芯的平均相对折射率差大于光通信波导的平均相对折射率差。 可以通过减少与耦合到包层模式的芯的传播模式再次耦合到palnar光波导光栅中的芯的情况的发生的情况下,可以增加抑制,其通过沿着光的传播方向周期性地改变波导结构而形成 光波导具有通过使包层的厚度至少为芯的厚度的十三倍而具有比围绕芯的芯的折射率低的折射率的包层。