Switch valve device
    89.
    发明申请
    Switch valve device 失效
    开关阀装置

    公开(公告)号:US20070012369A1

    公开(公告)日:2007-01-18

    申请号:US11327598

    申请日:2006-01-06

    Abstract: The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.

    Abstract translation: 本发明涉及用于诸如半导体芯片的部件的真空抽吸的切换阀装置,其目的是快速平稳地打破真空。 切换阀装置包括用于真空抽吸的真空吸入切换阀功能,用于真空断裂的真空断路切换阀功能,以及与真空吸入切换阀功能的操作一起打开的开放到大气切换阀功能 当真空抽吸切换阀功能关闭时通向大气侧,并且当真空吸入切换阀功能打开时关闭到大气侧的通道。 真空吸入切换阀功能,真空断路切换阀功能以及开放到大气切换阀功能整体并入主体部分。

    Control device for a hydraulic control motor
    90.
    发明授权
    Control device for a hydraulic control motor 失效
    液压控制电机控制装置

    公开(公告)号:US06712091B2

    公开(公告)日:2004-03-30

    申请号:US10203314

    申请日:2002-08-06

    Applicant: Jörg Linser

    Inventor: Jörg Linser

    Abstract: A control device for a hydraulic control motor includes at least one valve controlled actively by an actuating force and at least one passive valve which is operatively connected to the actively controlled valve and which is co-controlled via a line.

    Abstract translation: 用于液压控制电动机的控制装置包括至少一个由主动力控制的阀和至少一个被动阀,所述至少一个被动阀可操作地连接到主动控制的阀并经由管线共同控制。

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