公开(公告)号：US09091633B2

公开(公告)日：2015-07-28

申请号：US13699886

申请日：2011-05-26

申请人： Stephen Morris

发明人： Stephen Morris

IPC分类号： G01J1/02 ,  G01N21/21 ,  G01J1/42

CPC分类号： G01N21/211 ,  G01J1/4257

摘要： A method for locating the center of a beam profile, comprises the steps of: providing a beam profile; selecting one or more strips through the beam profile; identifying distinct regions of intensity along the one or more strips and labelling them consistently; calculating a combined average intensity for each labelled region, using data from the one or more strips; plotting the average intensity against the labelled regions and comparing the results with a plot of the actual intensity obtained by taking a cross-section through the center of at least one of the one or more strips; and optimizing the location of the center of at least one of the one or more strips so as to obtain the best fit between the average intensity plot and the actual intensity plot to thereby identify the center of the beam profile.

摘要翻译： 一种用于定位梁型材中心的方法，包括以下步骤：提供梁型材; 通过光束轮廓选择一个或多个条带; 识别沿着一个或多个条带的不同强度区域并一致地标记它们; 使用来自所述一个或多个条带的数据计算每个标记区域的组合平均强度; 绘制与标记区域的平均强度，并将结果与​​通过将横截面穿过一个或多个条带中的至少一个的中心而获得的实际强度的图进行比较; 并且优化所述一个或多个条带中的至少一个条带的中心的位置，以获得平均强度图和实际强度图之间的最佳拟合，从而识别光束轮廓的中心。

公开(公告)号：US09041939B2

公开(公告)日：2015-05-26

申请号：US13699888

申请日：2011-05-26

申请人： Stephen Morris

发明人： Stephen Morris

IPC分类号： G01B11/24 ,  G01N21/21

CPC分类号： G01N21/21

摘要： A method of compensating for sample misalignment in an optical measurement apparatus (40), comprises the steps of: determining an expected response from a detector (58) in said optical measurement apparatus given a particular set of parameters defining a path that light can take through the optical measurement apparatus from a source (42), via a sample (50), to the detector (58); measuring a response from the detector for the sample under test; and refining the set of parameters until the expected response and the measured response converge so as to determine the set of parameters giving rise to the measured response.

摘要翻译： 一种在光学测量装置（40）中补偿样品未对准的方法包括以下步骤：在给定给定光束可以穿过的路径的特定参数集合的情况下，确定来自所述光学测量装置中的检测器（58）的预期响应 来自源（42）的光学测量装置经由样品（50）到检测器（58）; 测量被检样品的检测器的响应; 并且改善参数集，直到预期响应和测量响应收敛，以便确定产生测量响应的参数集合。

公开(公告)号：US08310686B2

公开(公告)日：2012-11-13

申请号：US12594082

申请日：2008-03-28

申请人： Stephen Morris

发明人： Stephen Morris

IPC分类号： G01B11/28

CPC分类号： G01B11/0625 ,  G01B11/24

摘要： A method and means for determining the thickness, or curvature, of a thin film or stack of thin films disposed on the surface of a substrate having a curvature comprising generating a beam of radiation, focusing the beam through the one or more films onto a surface of the substrate, measuring the intensity across the reflected beam as a function of the angle of incidence of a plurality of rays derived from the focussed beam, determining the path of each of the plurality of rays and determining the thickness, or curvature of the film, or films, from the angular dependent intensity measurement.

摘要翻译： 一种用于确定设置在具有曲率的衬底的表面上的薄膜或薄膜层的厚度或曲率的方法和装置，包括产生辐射束，将光束通过一个或多个膜聚焦到表面上 测量作为来自聚焦光束的多个光线的入射角的函数的反射光束两端的强度，确定多个光线中的每一个的路径并确定膜的厚度或曲率 ，或电影，从角度依赖强度测量。