公开(公告)号：US20220315741A1

公开(公告)日：2022-10-06

申请号：US17689468

申请日：2022-03-08

Applicant: TOYODA GOSEI CO., LTD. ,  ASM INC.

Inventor： Takanori NAKAI ,  Hideki TAMAI ,  Hiromitsu TAKEUCHI ,  Makoto ISHIDA ,  Hideyuki IMAI ,  Katsunari INOUE

IPC: C08L9/00

Abstract: A rubber composition in which a diene rubber containing hydroxyl groups and a polyrotaxane containing a hydrocarbon-modified cyclodextrin as cyclic molecules are urethane-crosslinked by an isocyanate that is a crosslinking agent.

公开(公告)号：US11072667B2

公开(公告)日：2021-07-27

申请号：US16619052

申请日：2018-06-05

Applicant: ASM INC.

Inventor： Katsunari Inoue ,  Masabumi Kudoh

IPC: C08B37/16

Abstract: The present invention provides a polyrotaxane having high durability and in particular, high hydrolysis resistance, and a method for producing said polyrotaxane. The present invention provides a polyrotaxane obtained by disposing blocking groups on both ends of a pseudopolyrotaxane so that an annular molecule cannot be displaced, said pseudopolyrotaxane being obtained by forming a clathrate by piercing the opening of the cyclic molecule with a linear molecule, said polyrotaxane being characterized in that the cyclic molecule has a substituent represented by formula I (in formula I, R1 represents a group such as —CH3 and —CH2—CH3, R2 represents H or a group such as —CH3, and n is the apparent degree of polymerization of a polyalkylene oxide chain or a derivative thereof added to the cyclic molecule, the value of n being 1.1 to 10.0).

公开(公告)号：US11053357B2

公开(公告)日：2021-07-06

申请号：US16342847

申请日：2017-10-16

Applicant: ASM INC. ,  HAYAKAWA RUBBER CO., LTD.

Inventor： Yuki Hayashi ,  Keiko Nishita ,  Kohei Fujita ,  Hiromi Murakami ,  Katsumi Sakamoto

IPC: C08G83/00 ,  C08F290/06 ,  C08F290/10 ,  C08G18/40 ,  C08G65/26 ,  C08J3/12

Abstract: The present invention provides a spherical powder having properties, such as an excellent strength, toughness, and deformation recovery, and provides a method for producing same. The present invention provides: a spherical powder containing a crosslinked body formed having (A) a polyrotaxane in which both ends of a pseudopolyrotaxane, which are formed by inclusion of the opening of a cyclic molecule by threading therethrough with a linear molecule, are provided with a capping group so that dethreading of the linear molecule is prevented, in particular, a spherical powder having an average particle diameter of 0.5 to 1,000 μm, preferably 1 to 500 μm, more preferably 1 to 300 μm, and still more preferably 1 to 150 μm; and a method for producing this spherical powder.

公开(公告)号：US20200339709A1

公开(公告)日：2020-10-29

申请号：US16759266

申请日：2018-10-23

Applicant: ASM, Inc.

Inventor： Katsunari Inoue

IPC: C08B37/16

Abstract: The present invention provides a production method for pseudo-polyrotaxane or polyrotaxane in which the degree of ring-shaped molecules included on straight-chain molecules, that is, the inclusion rate, has been controlled to be low and stable. The present invention provides a production method for polyrotaxane formed by blocking groups being positioned at both ends of a pseudo-polyrotaxane so ring-shaped molecules are not released, said pseudo-polyrotaxane being formed by ring-shaped molecules skewered through openings thereof by straight-chain molecules, wherein polyrotaxane is obtained by means of said method having: (A) a step for preparing straight-chain molecules which have acidic or basic functional groups on both ends; (B) a step for forming pseudo-polyrotaxane by means of having a step for mixing the straight-chain molecules, the ring-shaped molecules, and a first basic group or an acid addition salt (the acid addition salt is used when the straight-chain molecules have the acidic functional groups; a base addition salt is used when the straight-chain molecules have the basic functional groups); and (C) a step for providing blocking groups on both ends of the straight-chain molecules by means of having a step for mixing the obtained pseudo-polyrotaxane and a blocking group precursor.

公开(公告)号：US6435799B2

公开(公告)日：2002-08-20

申请号：US72763500

申请日：2000-12-01

Applicant: ASM INC

Inventor： GOODWIN DENNIS L ,  WOOD ERIC R ,  RAAIJMAKERS IVO

IPC: H01L21/683 ,  B65H5/08

CPC classification number: H01L21/6838 ,  Y10S414/139 ,  Y10S414/141

Abstract: A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli-style wand translates along a linear guideway and may be positioned over a paddle-style pickup arm. The wafer carried by the Bernoulli wand can be handed off to the paddle by shutting off the flow of gas from the Bernoulli wand jets. The two pickup arms may be mounted on linear slides and adapted to translate between a load/unload chamber and a processing chamber, or the guideway may be adapted to rotate to allow transfer of wafers to multiple processing chambers in a cluster system. One of the pickup arms is preferably an all-quartz Bernoulli-style pickup arm having a proximal arm portion and a distal wand. The arm portion is formed by a pair of juxtaposed plates with a gas passage therethrough, and the distal wand is also formed by a pair of juxtaposed plates with a plurality of gas passages therethrough. The arm portion and the wand are fused together at their junction region. A wafer stop element is formed by a single quartz rod and is clipped to the arm portion to present a plurality of wafer stop pegs at a proximal periphery of the wand. The wafer stop element may be rapidly installed or removed without fasteners or bonding.

Abstract translation: 双臂晶片切换组件包括一对用于在晶片处理系统内传送晶片的拾取臂。 两个拾取臂适于移动，使得其中一个臂上的晶片可以定位在另一个臂上方并被切掉。 在一个版本中，伯努利风格的魔杖沿着直线导轨转换，并且可以位于桨式拾音臂上。 伯努利魔杖携带的晶片可以通过关闭伯努利魔杖喷气机的气流来切换到桨叶。 两个拾取臂可以安装在线性滑块上并且适于在装载/卸载室和处理室之间平移，或者导轨可以适于旋转以允许将晶片传送到群集系统中的多个处理室。 拾取臂中的一个优选地是具有近端臂部分和远侧杖的全石英伯努利式拾取臂。 臂部由一对具有穿过其中的气体通道的并置的板形成，并且远端棒也由具有多个通过其的多个气体通道的一对并置的板形成。 手臂部分和魔杖在其连接区域融合在一起。 晶片止动元件由单个石英棒形成，并且被夹持到臂部分，以在棒的近端周边呈现多个晶片止动钉。 晶片止动元件可以在没有紧固件或粘合的情况下快速安装或移除。

公开(公告)号：US11084888B2

公开(公告)日：2021-08-10

申请号：US16759266

申请日：2018-10-23

Applicant: ASM, Inc.

Inventor： Katsunari Inoue

IPC: C08B37/16

Abstract: The present invention provides a production method for pseudo-polyrotaxane or polyrotaxane in which the degree of ring-shaped molecules included on straight-chain molecules, that is, the inclusion rate, has been controlled to be low and stable. The present invention provides a production method for polyrotaxane formed by blocking groups being positioned at both ends of a pseudo-polyrotaxane so ring-shaped molecules are not released, said pseudo-polyrotaxane being formed by ring-shaped molecules skewered through openings thereof by straight-chain molecules, wherein polyrotaxane is obtained by means of said method having: (A) a step for preparing straight-chain molecules which have acidic or basic functional groups on both ends; (B) a step for forming pseudo-polyrotaxane by means of having a step for mixing the straight-chain molecules, the ring-shaped molecules, and a first basic group or an acid addition salt (the acid addition salt is used when the straight-chain molecules have the acidic functional groups; a base addition salt is used when the straight-chain molecules have the basic functional groups); and (C) a step for providing blocking groups on both ends of the straight-chain molecules by means of having a step for mixing the obtained pseudo-polyrotaxane and a blocking group precursor.

公开(公告)号：US20210179786A1

公开(公告)日：2021-06-17

申请号：US17271560

申请日：2019-08-26

Applicant: ASM INC.

Inventor： Yuki Hayashi ,  Katsunari Inoue ,  Masabumi Kudoh

IPC: C08G83/00 ,  C08G63/91 ,  C08G65/08 ,  C08J3/24

Abstract: The present invention provides a polyrotaxane for obtaining a material combining a higher degree of elongation with a higher breaking strength and/or a polyrotaxane having properties not possessed by conventional polyrotaxanes, such as compatibility with compounds to be used in a material, solubility in solvents, and functionality. The polyrotaxanes of the present invention each comprise: a pseudo-polyrotaxane comprising cyclic molecules and a linear molecule which passes through the cavities of the cyclic molecules to form a clathrate; and blocking groups disposed at both ends of the pseudo-polyrotaxane so that the cyclic molecules are not released. The cyclic molecules each include a hydroxyl-inactivation group and a hydroxyl group bonded by a spacer group. The polyrotaxanes have a hydroxyl value of 10-65 mg-KOH/g.

公开(公告)号：US12281206B2

公开(公告)日：2025-04-22

申请号：US17619346

申请日：2020-06-18

Applicant: ASM INC.

Inventor： Katsunari Inoue

IPC: C08G83/00 ,  C08B37/16 ,  C08L83/04

Abstract: The present invention provides a polyrotaxane of high compatibility with silicones, such as silicone oil, a highly insulative polyrotaxane, and/or a material comprising said polyrotaxane. The present invention provides a polyrotaxane obtained by disposing blocking groups at both ends of a pseudopolyrotaxane, in which the opening in a cyclic molecule is clathrated in a skewered manner by a straight-chain molecule, so that the cyclic molecule does not escape, wherein the cyclic molecule comprises a first group represented by formula I (in formula I, X is a single bond or NH; n is 0 or 1; R is a straight-chain, branched, or cyclic alkyl group, alkenyl group, or alkynyl group comprising 12-20 carbon atoms, with some of the hydrogen in the alkyl group, alkenyl group, or alkynyl group being optionally substituted by an OH group, a CN group, or an NH2 group; and * is the position of the bond to the cyclic molecule).

公开(公告)号：US12006402B2

公开(公告)日：2024-06-11

申请号：US17271560

申请日：2019-08-26

Applicant: ASM INC.

Inventor： Yuki Hayashi ,  Katsunari Inoue ,  Masabumi Kudoh

IPC: C08G83/00 ,  C08G63/91 ,  C08G65/08 ,  C08J3/24

CPC classification number: C08G83/007 ,  C08G63/912 ,  C08G65/08 ,  C08J3/24 ,  C08J2367/04

Abstract: The present invention provides a polyrotaxane for obtaining a material combining a higher degree of elongation with a higher breaking strength and/or a polyrotaxane having properties not possessed by conventional polyrotaxanes, such as compatibility with compounds to be used in a material, solubility in solvents, and functionality. The polyrotaxanes of the present invention each comprise: a pseudo-polyrotaxane comprising cyclic molecules and a linear molecule which passes through the cavities of the cyclic molecules to form a clathrate; and blocking groups disposed at both ends of the pseudo-polyrotaxane so that the cyclic molecules are not released. The cyclic molecules each include a hydroxyl-inactivation group and a hydroxyl group bonded by a spacer group. The polyrotaxanes have a hydroxyl value of 10-65 mg-KOH/g.

公开(公告)号：US20230192906A1

公开(公告)日：2023-06-22

申请号：US17998648

申请日：2021-05-12

Applicant: ASM INC.

Inventor： Yuki Hayashi

IPC: C08B37/16

CPC classification number: C08B37/0015

Abstract: The present invention provides a polyrotaxane which exhibits more excellent compatibility with various solvents, while having good processability. The present invention provides a polyrotaxane which is obtained by arranging blocking groups on both ends of a pseudopolyrotaxane, wherein a linear molecule passes through the opening of a circular molecule in a skewering manner, for the purpose of preventing elimination of the circular molecule. This polyrotaxane has a group which has a chain that is formed by having the circular molecule have a propyleneoxy repeating unit; and this polyrotaxane is soluble in a polyalkyleneoxy polyol, which has a number average molecular weight of 1,000 or more, at room temperature.