公开(公告)号：US08261762B2

公开(公告)日：2012-09-11

申请号：US12093491

申请日：2007-08-10

申请人： Kiyoshi Komiyama ,  Akitoshi Tsuji ,  Takuya Fujiwara

发明人： Kiyoshi Komiyama ,  Akitoshi Tsuji ,  Takuya Fujiwara

IPC分类号： H01L21/30 ,  B05C11/00

CPC分类号： F17C7/00 ,  F17C5/06 ,  F17C2205/0326 ,  F17C2205/0335 ,  F17C2205/0352 ,  F17C2221/016 ,  F17C2223/0123 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2250/032 ,  F17C2250/0443 ,  F17C2250/0626 ,  F17C2250/0636 ,  F17C2250/0673 ,  F17C2260/044 ,  F17C2260/053 ,  F17C2270/0518 ,  Y10T137/0419 ,  Y10T137/4259

摘要： A gas supplying system includes a processing gas supply pipe for supplying a processing gas from a gas cylinder 210 into a processing apparatus and a nonreactive gas supply source 230 for supplying a nonreactive gas into the gas supply pipe. While the system is in operation, the gas supply pipe is charged with the nonreactive gas and a control unit is in a standby state. If a processing gas use start signal is received from the processing apparatus, the system exhausts the nonreactive gas from the gas supply pipe to create a vacuum therein; charges the gas supply pipe with the processing gas; and starts a supply of the processing gas from the processing gas supply source. If a processing gas use finish signal is received from the processing apparatus, the system stops the supply of the processing gas from the processing gas supply source; exhausts the processing gas from the gas supply pipe to create a vacuum therein; and charges the gas supply pipe with the nonreactive gas. Accordingly, the gas pipe from the processing gas supply source to the processing apparatus can be kept charged with the nonreactive gas when the processing gas is not used in the processing apparatus. Therefore, a deposit generation inside the gas pipe can be prevented during that period.

摘要翻译： 气体供给系统包括用于将来自气瓶210的处理气体供给到处理装置中的处理气体供给管和用于向气体供给管供给非反应性气体的非反应性气体供给源230。 当系统运行时，气体供给管上装有非反应气体，控制单元处于待机状态。 如果从处理装置接收到处理气体使用开始信号，则系统从气体供给管排出非反应性气体，以在其中产生真空; 用加气处理供气管; 并开始从处理气体供应源供应处理气体。 如果从处理装置接收到处理气体使用完成信号，则系统停止从处理气体供应源供应处理气体; 从气体供给管排出处理气体以在其中产生真空; 并用非反应性气体对气体供给管进行充电。 因此，当在处理装置中不使用处理气体时，从处理气体供给源到处理装置的气体管道可以保持充满非反应性气体。 因此，能够防止在该期间内的气体管内的沉积物。

公开(公告)号：US20090170332A1

公开(公告)日：2009-07-02

申请号：US12093491

申请日：2007-08-10

申请人： Kiyoshi Komiyama ,  Akitoshi Tsuji ,  Takuya Fujiwara

发明人： Kiyoshi Komiyama ,  Akitoshi Tsuji ,  Takuya Fujiwara

IPC分类号： H01L21/306 ,  B05C11/00 ,  H01L21/30

CPC分类号： F17C7/00 ,  F17C5/06 ,  F17C2205/0326 ,  F17C2205/0335 ,  F17C2205/0352 ,  F17C2221/016 ,  F17C2223/0123 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2250/032 ,  F17C2250/0443 ,  F17C2250/0626 ,  F17C2250/0636 ,  F17C2250/0673 ,  F17C2260/044 ,  F17C2260/053 ,  F17C2270/0518 ,  Y10T137/0419 ,  Y10T137/4259

摘要： A gas supplying system includes a processing gas supply pipe for supplying a processing gas from a gas cylinder 210 into a processing apparatus and a nonreactive gas supply source 230 for supplying a nonreactive gas into the gas supply pipe. While the system is in operation, the gas supply pipe is charged with the nonreactive gas and a control unit is in a standby state. If a processing gas use start signal is received from the processing apparatus, the system exhausts the nonreactive gas from the gas supply pipe to create a vacuum therein; charges the gas supply pipe with the processing gas; and starts a supply of the processing gas from the processing gas supply source. If a processing gas use finish signal is received from the processing apparatus, the system stops the supply of the processing gas from the processing gas supply source; exhausts the processing gas from the gas supply pipe to create a vacuum therein; and charges the gas supply pipe with the nonreactive gas. Accordingly, the gas pipe from the processing gas supply source to the processing apparatus can be kept charged with the nonreactive gas when the processing gas is not used in the processing apparatus. Therefore, a deposit generation inside the gas pipe can be prevented during that period.

摘要翻译： 气体供给系统包括用于将来自气瓶210的处理气体供给到处理装置中的处理气体供给管和用于向气体供给管供给非反应性气体的非反应性气体供给源230。 当系统运行时，气体供给管上装有非反应气体，控制单元处于待机状态。 如果从处理装置接收到处理气体使用开始信号，则系统从气体供给管排出非反应性气体，以在其中产生真空; 用加气处理供气管; 并开始从处理气体供应源供应处理气体。 如果从处理装置接收到处理气体使用完成信号，则系统停止从处理气体供应源供应处理气体; 从气体供给管排出处理气体以在其中产生真空; 并用非反应性气体对气体供给管进行充电。 因此，当在处理装置中不使用处理气体时，从处理气体供给源到处理装置的气体管道可以保持充满非反应性气体。 因此，能够防止在该期间内的气体管内的沉积物。

公开(公告)号：US07212977B2

公开(公告)日：2007-05-01

申请号：US09886475

申请日：2001-06-22

申请人： Akitoshi Tsuji ,  Osamu Suenaga ,  Kiyoshi Komiyama

发明人： Akitoshi Tsuji ,  Osamu Suenaga ,  Kiyoshi Komiyama

IPC分类号： G06Q99/00

CPC分类号： H01L21/67276 ,  G06Q30/0283 ,  G06Q50/06 ,  H01L21/67242 ,  H01L21/67253 ,  Y02A20/22 ,  Y02P90/84

摘要： Power consumption of electric equipment used in a semiconductor manufacturing apparatus (100) is obtained and the total amount is displayed as calories by a display means. The semiconductor manufacturing apparatus is configured so that the equipment is set up inside a housing (10). The amount of heat discharged from the inside to the outside (a clean room) via the housing is obtained, and further, the amount of heat removed by exhaust from the interior of the housing and the amount of heat removed by cooling water that cools the equipment is also obtained, and the total amount of heat is displayed. Additionally, factors pertaining to operating costs such as power consumption are measured and their cost obtained, the amount of power consumed is multiplied by a crude oil conversion coefficient to obtain the amount of CO2 generated, and the result is displayed. The factors to be measured are measured by a thermocouple, an anemometer and an power meter, and the measurements are input to a personal computer (6) via a conversion module (7).

摘要翻译： 获得半导体制造装置（100）中使用的电气设备的功耗，并且通过显示装置将总量显示为卡路里。 半导体制造装置被配置为使得设备被设置在壳体（10）内。 通过外壳从内向外（洁净室）排出的热量得到，另外，从壳体内部排出的热量以及冷却水的冷却水除去的热量 也可获得设备，并显示总热量。 此外，测量与运行成本（如功耗）相关的因素，并获得其成本，消耗的功率量乘以原油转化系数以获得产生的CO 2的量，结果 被展示。 待测量的因素由热电偶，风速计和功率计测量，测量通过转换模块（7）输入个人计算机（6）。

公开(公告)号：US4345944A

公开(公告)日：1982-08-24

申请号：US244405

申请日：1981-03-16

申请人： Yoshiteru Kazama ,  Isao Kokubo ,  Akitoshi Tsuji ,  Yukio Tanino

发明人： Yoshiteru Kazama ,  Isao Kokubo ,  Akitoshi Tsuji ,  Yukio Tanino

IPC分类号： C04B24/22 ,  C04B18/02 ,  C04B20/10 ,  C04B7/35

CPC分类号： C04B20/1022 ,  C04B18/021 ,  C04B2103/302

摘要： An additive for cement comprising a granular molded product formed of a water-reducing agent composed mainly of a naphthalenesulfonic acid/formaldehyde high condensate (NSF) or salt thereof, and a carrier.

摘要翻译： 一种用于水泥的添加剂，包括由主要由萘磺酸/甲醛高缩合物（NSF）或其盐组成的减水剂和载体形成的颗粒模制产品。

公开(公告)号：US4308069A

公开(公告)日：1981-12-29

申请号：US181612

申请日：1980-08-26

申请人： Akitoshi Tsuji ,  Yoshihiro Fukushima

发明人： Akitoshi Tsuji ,  Yoshihiro Fukushima

IPC分类号： C04B24/22 ,  C04B7/35

CPC分类号： C04B24/22

摘要： Slump loss in fresh concrete is prevented by adding a powdery or granular barium, magnesium, iron or aluminum salt of a .beta.-naphthalenesulfonic acid-formaldehyde condensate to the cement or concrete composition. About 0.01 to 10 parts by weight of the condensate per 100 parts by weight of cement, preferably Portland cement, are employed.

摘要翻译： 通过向水泥或混凝土组合物中加入β-萘磺酸 - 甲醛缩合物的粉末或颗粒状钡，镁，铁或铝盐来防止新鲜混凝土中的坍落度损失。 每100重量份水泥，优选波特兰水泥，使用约0.01至10重量份的冷凝水。