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    Ring assembly for substrate processing chamber
    1.
    发明申请
    Ring assembly for substrate processing chamber 审中-公开
    基板处理室的环组件

    公开(公告)号：US20070283884A1

    公开(公告)日：2007-12-13

    申请号：US11444175

    申请日：2006-05-30

    申请人： Jennifer Tiller ,  Allen K. Lau ,  Marc O'Donnell Schweitzer ,  Steven V. Sansoni ,  Keith A. Miller ,  Christopher Boitnott

    发明人： Jennifer Tiller ,  Allen K. Lau ,  Marc O'Donnell Schweitzer ,  Steven V. Sansoni ,  Keith A. Miller ,  Christopher Boitnott

    IPC分类号： C23C16/00 ,  C23F1/00

    CPC分类号： C23C14/564 ,  H01J37/32623 ,  H01J37/32642 ,  H01L21/68735

    摘要： A ring assembly is provided for a substrate support used in a substrate processing chamber, the substrate support comprising an annular ledge and an inner perimeter sidewall. In one version, the ring assembly comprises (i) an L-shaped isolator ring comprising a horizontal leg resting on the annular ledge of the support, and a vertical leg abutting the inner perimeter sidewall of the support, and (ii) a deposition ring comprising an annular band having an overlap ledge that overlaps the horizontal leg of the isolator ring. In another version, the deposition ring comprises a dielectric annular band that surrounds and overlaps the annular ledge of the support, and a bracket and fastener.

    摘要翻译： 提供了用于衬底处理室中的衬底支撑件的环组件，衬底支撑件包括环形凸缘和内周边侧壁。 在一个版本中，环组件包括（i）包括搁置在支撑件的环形凸缘上的水平腿的L形隔离器环和邻接支撑件的内周侧壁的垂直腿，以及（ii）沉积环 包括具有与隔离环的水平支腿重叠的重叠壁架的环形带。 在另一个版本中，沉积环包括围绕和重叠支撑件的环形凸缘的电介质环形带，以及支架和紧固件。

    Build-in LOTO device on equipment breaker panel
    3.
    发明授权
    Build-in LOTO device on equipment breaker panel 有权
    在设备断路器面板上内置LOTO设备

    公开(公告)号：US07148435B2

    公开(公告)日：2006-12-12

    申请号：US11312235

    申请日：2005-12-20

    申请人： Allen K. Lau ,  Michael Rosenstein ,  Carl Johnson ,  Sharon Niehoff

    发明人： Allen K. Lau ,  Michael Rosenstein ,  Carl Johnson ,  Sharon Niehoff

    IPC分类号： H01H9/00

    CPC分类号： H01H9/282

    摘要： An apparatus for a lock out/tag out device that is a permanent attachment to a standard breaker box is disclosed. The device is designed to prevent movement of an electrical breaker handle to a closed position when the device is in use. The device also prevents locking a breaker in an on position, thereby lowering safety concerns. When the device is not in use, the device will not interfere with the operation of the breakers and stays conveniently attached to the breaker box. The device also allows storage of locking devices when not in use, thereby enabling personnel to perform a service procedure more efficiently.

    摘要翻译： 公开了一种用于锁定/标签输出装置的装置，其是与标准断路器盒的永久附件。 该设备被设计成当设备使用时防止电气断路器手柄移动到关闭位置。 该装置还防止将断路器锁定在接通位置，从而降低安全性。 当设备不使用时，设备不会干扰断路器的操作并且保持方便地连接到断路器盒。 该装置还允许在不使用时存储锁定装置，从而使人员能够更有效地执行服务程序。