公开(公告)号：US06624584B2

公开(公告)日：2003-09-23

申请号：US09962525

申请日：2001-09-24

Applicant: Horst Schmidt-Boecking ,  Lutz Spielberger ,  Angela Braeuning-Demian ,  Maria Cristina Penache ,  Sven Schoessler ,  Till Jahnke ,  Oliver Hohn ,  Volker Mergel

Inventor： Horst Schmidt-Boecking ,  Lutz Spielberger ,  Angela Braeuning-Demian ,  Maria Cristina Penache ,  Sven Schoessler ,  Till Jahnke ,  Oliver Hohn ,  Volker Mergel

IPC: H01J724

CPC classification number: H01J49/10 ,  H01J3/04 ,  H01J27/022 ,  H01J37/08

Abstract: The invention relates to a particle source, particularly an ion source for the production of excited particles in gaseous media. A dielectric, e.g., Kapton foil, is coated electrically conductively on both sides, and a voltage, preferably pulsed, is applied between the two coatings. A gas discharge is ignited in the gas through-flow by the voltage. Due to a pressure difference between the two sides of the foil, the gas expands from the high pressure side to the low pressure side, preferably in an ultrasonic expansion, whereby a directed, cold beam of excited particles or ions is produced.

Abstract translation: 本发明涉及一种颗粒源，特别是用于在气体介质中产生激发颗粒的离子源。 电介质（例如Kapton箔）在两侧电导体地涂覆，并且优选地将脉冲的电压施加在两个涂层之间。 气体通过气体通过电压点燃。 由于箔的两侧之间的压力差，气体从高压侧膨胀到低压侧，优选地在超声波膨胀中，由此产生被引导的冷激子粒子或离子束。