公开(公告)号：US20020171414A1

公开(公告)日：2002-11-21

申请号：US10191039

申请日：2002-07-02

申请人： Applied Precision, LLC, a Washington corporation

发明人： John Strom

IPC分类号： G01R001/00

CPC分类号： G01R1/00 ,  G01R1/06794 ,  G01R1/07342 ,  G01R3/00 ,  G01R31/2887 ,  G01R31/2891 ,  G01R35/00

摘要： A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.

摘要翻译： 一种用于定量地确定探针卡错误的方法，其依赖于来自探针卡分析机和擦洗标记分析机的合并数据集。 最小化与数据集相关的错误值提供了探针卡/探针机组合公差的指示。

公开(公告)号：US20040227504A1

公开(公告)日：2004-11-18

申请号：US10788670

申请日：2004-02-27

申请人： Applied Precision, LLC

发明人： John T. Strom

IPC分类号： G01R001/00

CPC分类号： G01R31/2891 ,  G01R1/06794 ,  G01R1/07342 ,  G01R31/2886 ,  G01R35/00

摘要： By examining scrub mark properties (such as position and size) directly, the performance of a wafer probing process may be evaluated. Scrub mark images are captured, image data measured, and detailed information about the process is extracted through analysis. The information may then be used to troubleshoot, improve, and monitor the probing process.

摘要翻译： 通过直接检查洗刷标记特性（如位置和尺寸），可以评估晶圆探测过程的性能。 通过分析提取清洗标记图像，测量图像数据，并提取有关过程的详细信息。 然后可以使用该信息来排除故障，改进和监控探测过程。

公开(公告)号：US20040084648A1

公开(公告)日：2004-05-06

申请号：US10690109

申请日：2003-10-20

申请人： Applied Precision, LLC

发明人： Steven C. Quarre

IPC分类号： F16K031/02

CPC分类号： F16K31/007

摘要： A precision controlled fast valve includes a diaphragm, a piezo actuator, and a plunger. The plunger is adapted to engage the diaphragm to create a seal which closes the valve. The piezo actuator is attached to the plunger and adapted to receive control signals which define the distance and speed of travel of the plunger. A control signal is received by the piezo actuator which causes the plunger to rapidly travel to a first position which is proximate to the diaphragm but does not create a seal. A second control signal is received by the piezo actuator which causes the plunger to pinch the diaphragm and creates a seal (due to the blocked force generated by the piezo). Creating the seal without excessive forces reduces the wear on the seal, allowing longer intervals between maintenance.

摘要翻译： 精密控制的快速阀包括隔膜，压电致动器和柱塞。 柱塞适于接合隔膜以产生封闭阀的密封件。 压电致动器附接到柱塞并且适于接收限定柱塞的行进距离和速度的控制信号。 控制信号由压电致动器接收，其使柱塞快速行进到靠近隔膜的第一位置，但不产生密封。 第二控制信号由压电致动器接收，这导致柱塞夹紧隔膜并产生密封（由于压电产生的阻塞力）。 在没有过大力量的情况下创建密封可减少密封件的磨损，从而在维护之间延长间隔时间。