Optical recording method and apparatus using this method
    1.
    发明授权
    Optical recording method and apparatus using this method 有权
    使用该方法的光记录方法和装置

    公开(公告)号:US07362673B2

    公开(公告)日:2008-04-22

    申请号:US11536029

    申请日:2006-09-28

    IPC分类号: G11B7/00

    摘要: Optical recording method and apparatus using this method.An optical recording method and recording apparatus using this method is described in which an optimum write power of a radiation beam in the apparatus is set by writing a series of test patterns on an optical recordable medium, forming a read signal from the patterns, reading a preset value of the derivative of the modulation of the read signal with respect to the write power from the medium, and processing the read signal together with the preset value to derive an optimum value of the write power.

    摘要翻译: 使用该方法的光记录方法和装置。 描述使用该方法的光记录方法和记录装置,其中通过将一系列测试图案写在光可记录介质上来设置装置中的辐射束的最佳写入功率,从图案形成读取信号,读取 相对于来自介质的写入功率的读取信号的调制的导数的预置值,以及与预设值一起处理读取的信号以导出写入功率的最佳值。

    Lithographic projection apparatus
    2.
    发明授权
    Lithographic projection apparatus 有权
    平版印刷设备

    公开(公告)号:US06384899B1

    公开(公告)日:2002-05-07

    申请号:US09496406

    申请日:2000-02-02

    申请人: Arie J. den Boef

    发明人: Arie J. den Boef

    IPC分类号: G03B2772

    CPC分类号: G03F7/70716 G03F9/7069

    摘要: In an interferometric alignment system provides an alignment signal for reproducibly registering a reticle 10 with a wafer 12. The radiation from a laser 50, which is the illumination source for the interferometer, is modulated by a phase modulator 52 to eliminate spurious noise from the alignment signal.

    摘要翻译: 在干涉式对准系统中,提供对准信号,用于将掩模版10与晶片12重复地对准。来自作为干涉仪的照明源的激光器50的辐射由相位调制器52调制以消除来自对准的杂散噪声 信号。

    Optical recording method and apparatus using this method
    3.
    发明授权
    Optical recording method and apparatus using this method 有权
    使用该方法的光记录方法和装置

    公开(公告)号:US07123563B2

    公开(公告)日:2006-10-17

    申请号:US11023026

    申请日:2004-12-23

    IPC分类号: G11B7/00

    摘要: An optical recording method and recording apparatus using this method is described in which an optimum write power of a radiation beam in the apparatus is set by writing a series of test patterns on an optical recordable medium, forming a read signal from the patterns, reading a preset value of the derivative of the modulation of the read signal with respect to the write power from the medium, and processing the read signal together with the preset value to derive an optimum value of the write power.

    摘要翻译: 描述使用该方法的光记录方法和记录装置,其中通过将一系列测试图案写在光可记录介质上来设置装置中的辐射束的最佳写入功率,从图案形成读取信号,读取 相对于来自介质的写入功率的读取信号的调制的导数的预置值,以及与预设值一起处理读取的信号以导出写入功率的最佳值。

    Producing optical recording using optimum write power
    4.
    发明授权
    Producing optical recording using optimum write power 失效
    使用最佳写入功率生产光学记录

    公开(公告)号:US6134209A

    公开(公告)日:2000-10-17

    申请号:US976520

    申请日:1997-11-21

    申请人: Arie J. Den Boef

    发明人: Arie J. Den Boef

    摘要: A method is described for setting an optimum write power for recording information on an optical recording medium. First a series of test patterns is written on the medium, each test pattern being written with a different write power. On reading the test patterns, the modulation of each read signal is determined. The modulations as a function of write power are curve-fitted to an analytic function. The normalised derivative of this function is determined analytically and is used to determine the value of the optimum write power for the medium.

    摘要翻译: 描述了一种用于设置用于在光学记录介质上记录信息的最佳写入功率的方法。 首先,将一系列测试图案写在介质上,每个测试图案都以不同的写入功率写入。 在读取测试图案时,确定每个读取信号的调制。 作为写入功率的函数的调制曲线拟合到分析函数。 分析确定该函数的归一化导数,并用于确定介质的最佳写入功率的值。

    Method and apparatus for writing optical recording media with optimum
value of write power
    5.
    发明授权
    Method and apparatus for writing optical recording media with optimum value of write power 失效
    用于写入具有最佳写入功率值的光学记录介质的方法和装置

    公开(公告)号:US5793737A

    公开(公告)日:1998-08-11

    申请号:US759653

    申请日:1996-12-06

    申请人: Arie J. Den Boef

    发明人: Arie J. Den Boef

    摘要: A method and apparatus for writing information on an optical recording medium by setting an optimum write power for recording information on the optical recording medium. First a series of test patterns is written on the medium, each test pattern being written with a different write power. On reading the test patterns, the modulation of each read signal is determined. The modulations as a function of write power are curve-fitted to an analytic function. The normalised derivative of this function is determined analytically and is used to determine the value of the optimum write power for the medium.

    摘要翻译: 一种用于通过在光学记录介质上设置用于记录信息的最佳写入功率在光学记录介质上写入信息的方法和装置。 首先,将一系列测试图案写在介质上,每个测试图案都以不同的写入功率写入。 在读取测试图案时,确定每个读取信号的调制。 作为写入功率的函数的调制曲线拟合到分析函数。 分析确定该函数的归一化导数,并用于确定介质的最佳写入功率的值。

    Arrangement for optically measuring a distance between a surface and a
reference plane
    6.
    发明授权
    Arrangement for optically measuring a distance between a surface and a reference plane 失效
    用于光学测量表面和参考平面之间的距离的布置

    公开(公告)号:US4874246A

    公开(公告)日:1989-10-17

    申请号:US298200

    申请日:1989-01-17

    申请人: Arie J. Den Boef

    发明人: Arie J. Den Boef

    CPC分类号: G01B11/026 G01B11/0608

    摘要: An optical distance or profile meter in which radiation reflected from a surface (630) is projected onto a radiation-sensitive dectection system via an optical system (641, 642) comprises a radiation-blocking plate (250) formed with radiation windows (651). The radiation-blocking plate only transmit radiation which is reflected from the surface at an angle relative to the optical axis of the optical system. The extent of the pattern of radiation spots thus formed on the detection system is a measure of the distance (.DELTA.h) from the surface. The detection system may comprise a semitransparent filter(660) whose transmission coefficient exhibits a position-dependent variation. This enables the radiation-sensitive element to be constructed as a single element (661) and the effects of speckle noise to be reduced substantially.