公开(公告)号：US20200033589A1

公开(公告)日：2020-01-30

申请号：US16593068

申请日：2019-10-04

申请人： Asif Godil

发明人： Asif Godil ,  Chase Valiente

IPC分类号： G02B26/08

摘要： A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.

公开(公告)号：US06215579B1

公开(公告)日：2001-04-10

申请号：US09104159

申请日：1998-06-24

申请人： David M. Bloom ,  Asif Godil

发明人： David M. Bloom ,  Asif Godil

IPC分类号： G02B2608

CPC分类号： G02B26/0808 ,  G02B5/1828

摘要： An apparatus and method for modulating an incident light beam for forming a two-dimensional projection image. The apparatus includes a plurality of elongated elements each having a reflective surface. The elongated elements are suspended substantially parallel to each other above a substrate with their respective ends supported, forming a column of adjacent reflecting surfaces grouped according to display elements. Alternate ones of each group are deformable by a applying a voltage with respect to the substrate. An approximately flat center section of each deformed element is substantially parallel to and a predetermined distance from a center section of each undeformed element. Limiting the predetermined distance avoids hysteresis in deforming the elements and avoids adhesion of the elements to the substrate. A light beam incident to the column of adjacent reflecting surfaces is reflected from a group of elongated elements when the alternate ones are undeformed and diffracted when alternate ones are deformed. A distance of movement is controlled or a ratio of between reflection and diffraction periods determines a display intensity for the corresponding display element. Diffracted light is collected by a lens and reflected by a scanning mirror into an eyepiece or onto a display screen. A light shield having a slit of predetermined width is positioned at the pupil such that light collected by the lens other than light diffracted from the center sections of the elongated elements is prevented from passing through the slit. The scanning mirror sweeps a two-dimensional color image into the eyepiece or onto the display screen.

摘要翻译： 一种用于调制用于形成二维投影图像的入射光束的装置和方法。 该装置包括多个细长元件，每个细长元件具有反射表面。 细长元件在衬底之上基本上彼此平行地悬挂，其相应的端部被支撑，形成根据显示元件分组的相邻反射表面的列。 每个组中的另一个可通过相对于衬底施加电压而变形。 每个变形元件的大致平坦的中心部分基本上平行于每个未变形元件的中心部分并且具有预定距离。 限制预定距离避免了元件变形中的滞后现象，并避免元件与基板的粘合。 入射到相邻反射表面的列的光束在一些细长元件被反射时，当替代物变形时，交替的光束被变形并被衍射。 控制移动距离或反射和衍射周期之间的比率决定相应显示元件的显示强度。 衍射光被透镜收集并被扫描镜反射到目镜中或显示屏上。 具有预定宽度的狭缝的光罩位于光瞳处，使得防止由透镜收集的光不同于从细长元件的中心部分衍射的光穿过狭缝。 扫描镜将二维彩色图像扫描到目镜或显示屏幕上。

公开(公告)号：US20070280589A1

公开(公告)日：2007-12-06

申请号：US11807461

申请日：2007-05-29

申请人： Timothy Stowe ,  Jocelyn Nee ,  Asif Godil

发明人： Timothy Stowe ,  Jocelyn Nee ,  Asif Godil

IPC分类号： G02B6/26

CPC分类号： G02B6/2713 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29383 ,  G02B6/29391 ,  G02B6/29397 ,  G02B6/3512 ,  G02B6/356

摘要： A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

公开(公告)号：US20070280590A1

公开(公告)日：2007-12-06

申请号：US11807462

申请日：2007-05-29

申请人： Timothy Stowe ,  Jocelyn Nee ,  Asif Godil

发明人： Timothy Stowe ,  Jocelyn Nee ,  Asif Godil

IPC分类号： G02B6/26

CPC分类号： G02B6/2713 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29383 ,  G02B6/29391 ,  G02B6/29397 ,  G02B6/3512 ,  G02B6/356

摘要： A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

公开(公告)号：US20070237486A1

公开(公告)日：2007-10-11

申请号：US11401185

申请日：2006-04-10

申请人： Asif Godil ,  Kenneth Honer ,  Matthew Lawrence ,  Eric Gustafson

发明人： Asif Godil ,  Kenneth Honer ,  Matthew Lawrence ,  Eric Gustafson

IPC分类号： G02B6/00

CPC分类号： G02B6/266 ,  Y10T29/49826

摘要： A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

摘要翻译： 倾斜镜MEMS可变光衰减器以最小的波长依赖损耗在一波长波段上衰减光。 衰减器包括具有楔形输入面的透镜，并由具有高色散的材料制成。 透镜设计导致不同的波长通过衰减器传播不同的路径，从而降低了波长相关的损耗。 衰减器可以设计成在大于零的指定衰减下具有最小的波长相关损耗。