公开(公告)号：US20140287662A1

公开(公告)日：2014-09-25

申请号：US14219913

申请日：2014-03-19

申请人： Irfanulla Khuddus Rahmathullah ,  Bopanna Ichettira Vansantha ,  Padma Gopalakrishnan ,  Abraham Palaty ,  Aswathnarayanaiah Ravi ,  Ashish Bhatnagar ,  Young J. Paik ,  Stacy Meyer ,  Daniel Martin

发明人： Irfanulla Khuddus Rahmathullah ,  Bopanna Ichettira Vansantha ,  Padma Gopalakrishnan ,  Abraham Palaty ,  Aswathnarayanaiah Ravi ,  Ashish Bhatnagar ,  Young J. Paik ,  Stacy Meyer ,  Daniel Martin

IPC分类号： B24B37/32

CPC分类号： B24B37/32

摘要： A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of the arcuate segments has an upper surface that abuts the lower surface of the upper portion and a bottom surface for contacting a polishing pad during polishing.

摘要翻译： 保持环包括大致环形的上部，其具有构造成连接到承载头和下表面的基部的顶表面，以及可拆卸地固定到上部以形成环形下部的多个基本相同的弧形段。 每个弧形段具有邻接上部下表面的上表面和用于在抛光过程中接触抛光垫的底表面。