公开(公告)号：US20050117239A1

公开(公告)日：2005-06-02

申请号：US10506716

申请日：2003-06-19

申请人： Peter Hoghoj ,  Aurelien Dariel ,  Sergio Rodrigues

发明人： Peter Hoghoj ,  Aurelien Dariel ,  Sergio Rodrigues

IPC分类号： G01N23/20 ,  G21K1/06 ,  G21K3/00 ,  G02B5/08 ,  G02B7/182

CPC分类号： B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

摘要： This invention relates to an optical assembly (10) with a laterally graded reflective multilayer whose reflecting surface reflects incident X-rays under low incidence angles producing a two-dimensional optical effect, characterized by the fact that said reflecting surface is comprised of a single surface, said reflecting surface being conformed along two curvatures corresponding to two different directions. This invention also relates to a manufacturing method of such an optical assembly, characterized in that the method includes the coating of a substrate already having a curvature, and the curvature of this substrate along a second different direction. The invention relates finally to a device for generating and conditioning X-rays for applications for angle-dispersive X-ray reflectometry including an optical assembly such as mentioned above connected to a source of X-rays in such a way that the X-rays emitted by the source are conditioned along two dimensions so as to adapt the beam emitted by the source to the sample, with the X-rays having different angles of incidence on the sample which is considered.

摘要翻译： 本发明涉及具有横向渐变反射多层体的光学组件（10），其反射表面在低入射角下反射入射的X射线产生二维光学效应，其特征在于所述反射表面由单个表面 所述反射表面沿对应于两个不同方向的两个曲率相符。 本发明还涉及这种光学组件的制造方法，其特征在于，该方法包括已经具有曲率的基底的涂覆，以及沿着第二不同方向的该基底的曲率。 本发明最终涉及用于产生和调节用于角度分散X射线反射测量的X射线的装置，其包括如上所述的光学组件，其连接到X射线源，使得X射线发射 通过源被调节为沿着两个维度，以便将由源发射的光束适应于样品，其中X射线对所考虑的样品具有不同的入射角。

公开(公告)号：US20060018429A1

公开(公告)日：2006-01-26

申请号：US10518284

申请日：2003-06-19

申请人： Peter Hoghoj ,  Aurelien Dariel

发明人： Peter Hoghoj ,  Aurelien Dariel

IPC分类号： G21K1/06

CPC分类号： B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

摘要： The invention relates to an optical device intended to treat an incident X-ray beam. The optical device comprises a monochromator and an optical element for conditioning the incident beam. The reflective surface of the optical element is able to produce a two-dimensional optical effect in order to adapt a beam in destination of the monochromator. The reflective surface of the optical element comprises a multilayer structure type surface that is reflective to X-rays. In particular, the reflective surface consists of a single surface shaped according to two curvatures corresponding to two different directions.

摘要翻译： 本发明涉及一种旨在处理入射的X射线束的光学装置。 光学装置包括单色器和用于调节入射光束的光学元件。 光学元件的反射表面能够产生二维光学效果，以使光束适应单色仪的目的地。 光学元件的反射表面包括反射X射线的多层结构型表面。 特别地，反射表面由根据对应于两个不同方向的两个曲率成形的单个表面组成。