公开(公告)号：US07965393B2

公开(公告)日：2011-06-21

申请号：US12275170

申请日：2008-11-20

申请人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

发明人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

IPC分类号： G01B11/02

CPC分类号： G01D5/34723 ,  G01D5/268 ,  G01D5/34746 ,  G01D5/366

摘要： A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.

摘要翻译： 提供了使用光纤接收器通道的干涉式微型光栅编码器读取头的参考标记配置。 读取头包括提供参考标记主要信号的主要光纤，其被处理以产生具有约0.2微米精度的参考信号。 读取头可以包括用于产生被处理以产生大约20纳米精度的参考信号的参考标记辅助信号的次级光纤。 配置用于次级光纤接收器通道的空间滤波器掩模提供由主光纤接收器通道的接收区域之外的干涉条纹产生的两个空间周期性的次级信号。 二次信号彼此不同相，其空间频率高于主信号的空间频率。 识别与参考标记主参考信号的信号交叉的空间上相邻的参考标记辅助信号的信号交叉。

公开(公告)号：US20090135435A1

公开(公告)日：2009-05-28

申请号：US12275170

申请日：2008-11-20

申请人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

发明人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

IPC分类号： G01B11/14

CPC分类号： G01D5/34723 ,  G01D5/268 ,  G01D5/34746 ,  G01D5/366

摘要： A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes “primary” fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include “secondary” fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.

摘要翻译： 提供了使用光纤接收器通道的干涉式微型光栅编码器读取头的参考标记配置。 读取头包括提供参考标记主要信号的“主要​​”光纤，其被处理以产生具有约0.2微米精度的参考信号。 读取头可以包括用于产生被处理以产生约20纳米精度的参考信号的参考标记辅助信号的“次级”光纤。 配置为次级光纤接收器通道的空间滤波器掩模提供由主光纤接收器通道的接收区域之外的干涉条纹产生的两个空间周期性次级信号。 二次信号彼此不同相，其空间频率高于主信号的空间频率。 识别与参考标记主参考信号的信号交叉的空间上相邻的参考标记辅助信号的信号交叉。

公开(公告)号：US20090027692A1

公开(公告)日：2009-01-29

申请号：US11782608

申请日：2007-07-24

申请人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

发明人： Avron Zwilling ,  Joseph Daniel Tobiason ,  Scott Harsila ,  Karl Gustav Masreliez

IPC分类号： G01B11/14

CPC分类号： G01D5/34776 ,  G01D5/34723

摘要： A fiber optic readhead and scale arrangement for measuring displacement provides a reference position indication. The scale includes a scale track comprising a first type of track portion providing first level of zero order reflectance, such as a grating, and a reference mark providing a second level of zero order reflectance, such as a mirror. The reference mark is configured with certain length or boundary spacing dimensions determined based on certain fiber optic receiver channel aperture dimensions in the readhead.In some configurations a fiber optic readhead and track that provides the reference position indication is separate from a fiber optic readhead and track that provides periodic incremental measurement signals. In some configurations an integrated fiber optic readhead and an integrated track structure provide both the reference position indication and the periodic incremental measurement signals.

摘要翻译： 用于测量位移的光纤读取头和刻度布置提供了参考位置指示。 比例尺包括缩放轨迹，该刻度轨道包括提供零级反射率的​​第一级的第一类型的轨道部分，例如光栅，以及提供第二级零级反射率的​​参考标记，例如反射镜。 参考标记被配置为基于读取头中的某些光纤接收器通道孔径尺寸确定的特定长度或边界间隔尺寸。 在某些配置中，提供参考位置指示的光纤读取头和轨道与提供周期性增量测量信号的光纤读头和轨道分开。 在一些配置中，集成光纤读取头和集成轨道结构提供参考位置指示和周期性增量测量信号。

公开(公告)号：US07211782B2

公开(公告)日：2007-05-01

申请号：US10901701

申请日：2004-07-29

申请人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

IPC分类号： G01J1/04 ,  G02B6/36

CPC分类号： G01D5/35303 ,  G02B6/381

摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。

公开(公告)号：US20050224705A1

公开(公告)日：2005-10-13

申请号：US10901701

申请日：2004-07-29

申请人： Joseph Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim Atherton

发明人： Joseph Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim Atherton

IPC分类号： G01D5/34 ,  G01D5/353 ,  G01J1/04 ,  G01J5/08 ,  G02B6/38

CPC分类号： G01D5/35303 ,  G02B6/381

摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10-50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。