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公开(公告)号：US08692880B2
公开(公告)日：2014-04-08
申请号：US12898642
申请日：2010-10-05
IPC分类号： H04N5/30
CPC分类号： G01B11/16 , G01B11/00 , G06T7/32 , G06T2207/10016
摘要： An image correlation displacement sensor for measuring a displacement component along a direction perpendicular to a target surface, with a simple configuration. The sensor may include: an illumination portion (130′) which emits illumination light; an imaging portion including at least two optical paths (A and B′) which are used to capture multiple images of a speckle field produced by the target surface (300), one of which (A) is inclined with respect to a normal to the target surface in proximity to the target surface, and an element (110′) which deflects an at least one of the optical paths (A and B′); and a processing portion (200) which measures a displacement relative to the target surface along a direction which includes a component normal to the target surface (300) in accordance with the correlation of multiple images captured in the optical paths (A) and (B′).
摘要翻译： 一种图像相关位移传感器，用于以简单的结构测量垂直于目标表面的方向的位移分量。 传感器可以包括：发射照明光的照明部分（130'）; 成像部分，包括用于捕获由目标表面（300）产生的斑纹场的多个图像的至少两个光路（A和B'），其中一个（A）相对于 靠近目标表面的目标表面和偏转光路（A和B'）中的至少一个的元件（110'）; 以及处理部分（200），其根据在光路（A）和（B）中捕获的多个图像的相关性来测量沿着包括与目标表面（300）垂直的分量的方向相对于目标表面的位移 '）。
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2.发明申请OPTICAL ENCODER INCLUDING DISPLACEMENT SENSING NORMAL TO THE ENCODER SCALE GRATING SURFACE 有权光学编码器包括位移传感正常到编码器刻度表面公开(公告)号：US20120312972A1
公开(公告)日：2012-12-13
申请号：US13159348
申请日：2011-06-13
IPC分类号： G01D5/347
CPC分类号： G01D5/38
摘要： Disclosed is a displacement sensor configuration, comprising a scale grating disposed in a first direction; and a scale light imaging configuration which includes first and second optical paths and a detector including first and second detector portions. The imaging portion inputs a first scale light component output by the scale grating along the first optical path and transmits the first scale light component to the first detector portion, the imaging portion inputs a second scale light component output by the scale grating along the second optical path and transmits the second scale light component to the second detector portion, the first detector portion is configured to output a first displacement signal indicative of a displacement along the first direction, and the second detector portion is configured to output a second displacement signal indicative of a displacement along a second direction perpendicular to the first direction.
摘要翻译： 公开了一种位移传感器构造，包括沿第一方向设置的标尺光栅; 以及包括第一和第二光路的标度光成像配置和包括第一和第二检测器部分的检测器。 成像部分沿着第一光路输入由光栅尺输出的第一标尺光分量，并将第一标度光分量透射到第一检测器部分，成像部分沿着第二光学器件输入由光栅尺输出的第二标度光分量 路径，并将第二比例光分量发送到第二检测器部分，第一检测器部分被配置为输出指示沿着第一方向的位移的第一位移信号，并且第二检测器部分被配置为输出指示 沿着与第一方向垂直的第二方向的位移。
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公开(公告)号：US07656425B2
公开(公告)日：2010-02-02
申请号：US11395776
申请日：2006-03-31
申请人： Joseph Daniel Tobiason , Yuhua Ding
发明人： Joseph Daniel Tobiason , Yuhua Ding
CPC分类号： H04N5/3572
摘要： A method characterizes field of view (FOV) distortion and may correct machine vision measurements accordingly. A plurality of distorted images are acquired, with the same calibration target at a plurality of spaced-apart locations within the FOV. The method analyzes the images and determines distortion parameters that can correct the distortions in the images such that features included in the calibration target pattern achieve a sufficient or optimum degree of congruence between the various images. Distortion parameters may be determined for each optical configuration (e.g., lens combination, magnification, etc.) that is used by a machine vision inspection system. The distortion parameters may then be used to correct FOV distortion errors in subsequent inspection and measurement operations.
摘要翻译： 一种表征视场（FOV）失真的方法，可以相应地校正机器视觉测量。 获取多个失真的图像，在FOV内的多个间隔开的位置处具有相同的校准目标。 该方法分析图像并确定可以校正图像中的失真的失真参数，使得包括在校准目标图案中的特征在各种图像之间达到充分或最佳程度的一致性。 可以针对机器视觉检查系统使用的每个光学配置（例如，镜头组合，放大等）确定失真参数。 然后可以使用失真参数来校正后续检查和测量操作中的FOV失真误差。
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4.发明授权Hand-size structured-light three-dimensional metrology imaging system and method 有权手工结构光三维计量成像系统及方法公开(公告)号：US07400414B2
公开(公告)日：2008-07-15
申请号：US11263600
申请日：2005-10-31
IPC分类号： G01B11/24
摘要： A hand-size structured-light three-dimensional metrology imaging system and method. Laser illumination stripes are scanned across a workpiece surface for obtaining z-height and x-coordinate information. A Scheimpflug configuration is used. Utilizing this configuration, a laser illumination stripe across a raised workpiece portion will be shown in a contour image at the image sensor in a focused manner, such that the offsets along the contour image line due to the raised portions of the workpiece surface can be accurately converted to a z-height measurement. The y-axis positions associated with each of the contour images, used for reassembling the information from the contour images into a surface map for the workpiece, may be determined without the need for a position sensor, by including a reference object in the contour images.
摘要翻译： 手工尺寸结构光三维计量成像系统及方法。 激光照射条纹跨工件表面扫描，以获得z高度和x坐标信息。 使用Scheimpflug配置。 利用这种构造，将以聚焦方式在跨越升高的工件部分的激光照射条纹图像显示在图像传感器的轮廓图像中，使得由于工件表面的凸起部分而沿着轮廓图像线的偏移可以精确地 转换为z高度测量。 可以通过在轮廓图像中包括参考对象来确定与轮廓图像中的每个轮廓图像相关联的用于将信息从轮廓图像重新组装成工件的表面图的y轴位置，而不需要位置传感器 。
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5.发明授权Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels 有权用于使用光纤接收器通道的干涉式微型光栅编码器读取头的参考信号产生配置公开(公告)号：US07965393B2
公开(公告)日：2011-06-21
申请号：US12275170
申请日：2008-11-20
IPC分类号： G01B11/02
CPC分类号： G01D5/34723 , G01D5/268 , G01D5/34746 , G01D5/366
摘要： A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.
摘要翻译： 提供了使用光纤接收器通道的干涉式微型光栅编码器读取头的参考标记配置。 读取头包括提供参考标记主要信号的主要光纤，其被处理以产生具有约0.2微米精度的参考信号。 读取头可以包括用于产生被处理以产生大约20纳米精度的参考信号的参考标记辅助信号的次级光纤。 配置用于次级光纤接收器通道的空间滤波器掩模提供由主光纤接收器通道的接收区域之外的干涉条纹产生的两个空间周期性的次级信号。 二次信号彼此不同相，其空间频率高于主信号的空间频率。 识别与参考标记主参考信号的信号交叉的空间上相邻的参考标记辅助信号的信号交叉。
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6.发明申请公开(公告)号：US20080239298A1
公开(公告)日：2008-10-02
申请号：US11694795
申请日：2007-03-30
IPC分类号： G01J1/04
CPC分类号： G01B11/26
摘要： An adaptive light-path surface tilt sensing configuration is provided that identifies when a ray bundle is projected along a direction normal to a workpiece surface. As a result, the tilt of the workpiece surface may be determined. The surface tilt sensor may comprise an illumination and detector portion and an objective lens. The illumination and detector portion may comprise a light source, a collimating lens, a beamsplitter, a controllable ray bundle position control portion, and a photodetector configuration. These elements are configured to provide a ray bundle alignment sensing arrangement that provides a signal indicating when a projected ray bundle and a reflected ray bundle have the best degree of alignment, in addition to other functions. The best degree of alignment corresponds to a ray bundle that is projected along the direction normal to the workpiece surface provides.
摘要翻译： 提供了自适应光路表面倾斜感测配置，其识别射线束何时沿垂直于工件表面的方向投影。 结果，可以确定工件表面的倾斜。 表面倾斜传感器可以包括照明和检测器部分和物镜。 照明和检测器部分可以包括光源，准直透镜，分束器，可控射线束位置控制部分和光电检测器配置。 这些元件被配置为提供射线束对准检测装置，除了其他功能之外，提供指示投射的光束和反射光束何时具有最佳对准度的信号。 最佳对准程度对应于沿垂直于工件表面的方向投射的射线束。
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公开(公告)号：US07307736B2
公开(公告)日：2007-12-11
申请号：US10815893
申请日：2004-03-31
IPC分类号： G01B11/14
CPC分类号： G01D5/262 , G01B11/002 , G01D5/26 , G01D5/347
摘要： A position sensor using a novel structured light generating scale or target member is provided. An imaging array is capable of measuring the relative translation and orientation of the structured light generating scale or target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. The target member includes an array of lenses that provide an array of structured light patterns that diverge, converge, or both, to change the size of the corresponding structured light image as a function of the “Z” coordinate of the relative position, in various embodiments. The X-Y position of each individual structured light image on the imaging array varies with the relative X-Y position of the structured light generating target member, and the shape of structured light image changes as a function of the relative angular orientation. Accordingly, three or more structured light images analyzed in the same image are usable to determine a 6D measurement between the structured light generating target member and the array detector. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.
摘要翻译： 提供了一种使用新型结构光产生标尺或目标构件的位置传感器。 成像阵列能够以高精度同时测量X，Y，Z，偏转，俯仰和滚动（“6D”）中的结构光产生标尺或目标构件的相对平移和取向。 目标构件包括透镜阵列，其提供发散，会聚或两者的结构光图案阵列，以根据相对位置的“Z”坐标改变相应结构光图像的大小，以各种方式 实施例。 成像阵列上的每个单独的结构光图像的X-Y位置随着结构化光产生目标构件的相对X-Y位置而变化，并且结构化光图像的形状作为相对角度取向的函数而变化。 因此，在相同图像中分析的三个或更多个结构光图像可用于确定结构化光产生目标构件和阵列检测器之间的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。
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公开(公告)号：US07217041B2
公开(公告)日：2007-05-15
申请号：US11235056
申请日：2005-09-26
CPC分类号： G02B6/4249 , G02B6/423
摘要： A method for connecting optical signals carried by optical fibers between an optical encoder readhead and an optical signal processing IC having a plurality of photodetector portions arranged in a photodetector configuration. The optical signal processing IC is fixed to a substrate at a first position and orientation. Then, a reference-surface block including at least one reference surface is fixed to the substrate in a second orientation and position based on the first position and orientation. A fiber-optic end piece is provided, which has at least one corresponding-reference surface and a plurality of optical fiber locating features that are arranged relative to the corresponding-reference surface. A plurality of the optical fibers are fixed to the plurality of optical fiber locating features to provide a coupling configuration of optical fiber ends that nominally matches the photodetector configuration. Finally, the corresponding-reference surface of the fiber-optic end piece is mounted against the reference surface of the reference-surface block such that the coupling configuration abuts the photodetector configuration.
摘要翻译： 一种用于在光学编码器读取头和具有以光电检测器配置布置的多个光电检测器部分的光信号处理IC之间连接由光纤携带的光信号的方法。 光信号处理IC在第一位置和方向上固定到基板。 然后，包括至少一个参考表面的参考表面块基于第一位置和取向在第二取向和位置固定到基板。 提供了一种光纤端部件，其具有相对于相应的参考表面布置的至少一个相应的参考表面和多个光纤定位特征。 多个光纤被固定到多个光纤定位特征，以提供名义上匹配光电检测器配置的光纤端部的耦合配置。 最后，将光纤端部的对应参考表面安装在参考表面块的参考表面上，使得耦合结构邻接光电检测器配置。
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9.发明授权Optical path array and angular filter for translation and orientation sensing 有权用于平移和定向感测的光路阵列和角度滤波器公开(公告)号：US07075097B2
公开(公告)日：2006-07-11
申请号：US10808849
申请日：2004-03-25
IPC分类号： G01N21/00
CPC分类号： G01D5/34723 , G01D5/268
摘要： A position sensor using a novel optical path array (OPA) element, an angle-selective spatial filter, and an imaging array is capable of measuring the translation and orientation relative to a target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. A target member includes an array of target points surrounded by a contrasting surface. The position sensor uses the OPA element in combination with the angle-selective spatial filter in a target point imaging arrangement such that the imaging array of the position sensor only receives light rays that enter the OPA element according to an operable cone angle α. Accordingly, each target point generally produces a ring-shaped image having a size on the imaging array that varies with the Z position of each target point. The X-Y position of each target point image on the imaging array varies with the X-Y position of each target point. Accordingly, three or more target point images analyzed in the same image are usable to determine a 6D measurement relative to the target member. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.
摘要翻译： 使用新型光路阵列（OPA）元件，角度选择性空间滤波器和成像阵列的位置传感器能够测量相对于目标构件在X，Y，Z，偏航，俯仰和 滚动（“6D”），并具有高精度。 目标成员包括由对比表面包围的目标点阵列。 位置传感器将OPA元件与目标点成像布置中的角度选择性空间滤波器组合使用，使得位置传感器的成像阵列仅接收根据可操作锥角α进入OPA元件的光线。 因此，每个目标点通常产生具有随着每个目标点的Z位置而变化的成像阵列上的尺寸的环形图像。 成像阵列上的每个目标点图像的X-Y位置随着每个目标点的X-Y位置而变化。 因此，在相同图像中分析的三个或更多个目标点图像可用于确定相对于目标成员的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。
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公开(公告)号：US20120140245A1
公开(公告)日：2012-06-07
申请号：US12958055
申请日：2010-12-01
IPC分类号： G01B11/14
CPC分类号： G01B11/002 , G01D5/347
摘要： An image correlation displacement sensor is provided for measuring yaw rotation relative to a target surface using a simple configuration compatible with a fast measurement sample rate. The image correlation displacement sensor may include: an illumination portion (130) which emits illumination light to the target surface to produce a speckle field; an imaging portion (240) which captures a plurality of images including the speckle fields produced on the target surface; and a processing portion (200) which measures a displacement including a rotation about a yaw axis of the target surface in accordance with first and second region translational displacements determined based on the plurality of images captured along the first optical path and the second optical path, and a known separation between the first and second regions.
摘要翻译： 提供一种图像相关位移传感器，用于使用与快速测量采样率兼容的简单配置来测量相对于目标表面的偏航旋转。 图像相关位移传感器可以包括：照射部分（130），其向目标表面发射照明光以产生斑点; 捕获包括在所述目标表面上产生的斑点的多个图像的成像部分（240）; 以及处理部分（200），其根据基于沿着第一光路和第二光路捕获的多个图像确定的第一和第二区域平移位移来测量包括围绕目标表面的偏转轴的旋转的位移， 以及第一和第二区域之间的已知间隔。
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