公开(公告)号：US5479377A

公开(公告)日：1995-12-26

申请号：US359156

申请日：1994-12-19

申请人： Paul Lum ,  Michael Greenstein ,  Belinda Kendle

发明人： Paul Lum ,  Michael Greenstein ,  Belinda Kendle

IPC分类号： G01N29/24 ,  A61B8/00 ,  B06B1/06 ,  H01L41/08 ,  H04R1/44 ,  H04R17/00

CPC分类号： B06B1/0688 ,  H04R1/44 ,  H04R17/00 ,  Y10T29/42

摘要： A transducer device and method include affixing a preamplifier or other suitable circuit to a thin piezoelectric membrane. The membrane fully supports the circuit at an inactive region of the membrane. The membrane has at least one piezoelectrically active region that is connected to the circuit by a signal line. Preferably, the signal line is fabricated onto the membrane using integrated circuit fabrication techniques. In the preferred embodiment, the piezoelectrically active region has a diameter of less than one hundred microns and the membrane has a thickness of less than ten microns. A potting compound provides structural support of the membrane and insulates the on-membrane circuit.

摘要翻译： 换能器装置和方法包括将前置放大器或其他合适的电路固定到薄压电膜。 膜完全支撑在膜的非活性区域的电路。 膜具有至少一个通过信号线连接到电路的压电有源区域。 优选地，使用集成电路制造技术将信号线制造到膜上。 在优选实施例中，压电有源区的直径小于一百微米，膜的厚度小于10微米。 灌封化合物提供膜的结构支撑并隔离膜电路。