EMBEDDED THIN FILMS
    1.
    发明申请
    EMBEDDED THIN FILMS 有权
    嵌入式薄膜

    公开(公告)号:US20090301770A1

    公开(公告)日:2009-12-10

    申请号:US12482202

    申请日:2009-06-10

    IPC分类号: H05K1/09 C25D7/12

    摘要: A method for forming a film on a conductive substrate, comprising immersing a substrate having a conductive portion in a solution comprising a metal ion ceramic precursor for the film and a peroxide; applying a voltage potential to the conductive portion with respect to a counter electrode in the solution, sufficient to protect the conductive portion from corrosion by the solution, and drive formation of a film on the substrate, controlling a pH of the solution while limiting a production of hydrogen by electrolysis of the solution proximate to the conductive portion; and maintaining the voltage potential for a sufficient duration to produce a film on the conductive portion. An electrode may be formed over the film to produce an electrical device. The film may be, for example, insulating, dielectric, resistive, semiconductive, magnetic, or ferromagnetic.

    摘要翻译: 一种在导电性基板上形成膜的方法,其特征在于,将具有导电性部分的基板浸渍在包含所述膜的金属离子陶瓷前体和过氧化物的溶液中; 对导电部分相对于溶液中的对电极施加电压电位,足以保护导电部分免受溶液的腐蚀,并且驱动在衬底上形成膜,控制溶液的pH,同时限制生产 的氢气通过电解接近导电部分的溶液; 并且保持电压电位足够的持续时间以在导电部分上产生膜。 可以在膜上形成电极以产生电气装置。 该膜可以是例如绝缘,电介质,电阻,半导体,磁性或铁磁性的。

    Embedded thin films
    2.
    发明授权
    Embedded thin films 有权
    嵌入式薄膜

    公开(公告)号:US08882983B2

    公开(公告)日:2014-11-11

    申请号:US12482202

    申请日:2009-06-10

    摘要: A method for forming a film on a conductive substrate, comprising immersing a substrate having a conductive portion in a solution comprising a metal ion ceramic precursor for the film and a peroxide; applying a voltage potential to the conductive portion with respect to a counter electrode in the solution, sufficient to protect the conductive portion from corrosion by the solution, and drive formation of a film on the substrate, controlling a pH of the solution while limiting a production of hydrogen by electrolysis of the solution proximate to the conductive portion; and maintaining the voltage potential for a sufficient duration to produce a film on the conductive portion. An electrode may be formed over the film to produce an electrical device. The film may be, for example, insulating, dielectric, resistive, semiconductive, magnetic, or ferromagnetic.

    摘要翻译: 一种在导电性基板上形成膜的方法,其特征在于,将具有导电性部分的基板浸渍在包含所述膜的金属离子陶瓷前体和过氧化物的溶液中; 对导电部分相对于溶液中的对电极施加电压电位,足以保护导电部分免受溶液的腐蚀,并且驱动在衬底上形成膜,控制溶液的pH,同时限制生产 的氢气通过电解接近导电部分的溶液; 并且保持电压电势足够的持续时间以在导电部分上产生膜。 可以在膜上形成电极以产生电气装置。 该膜可以是例如绝缘,电介质,电阻,半导体,磁性或铁磁性的。