公开(公告)号：US5236512A

公开(公告)日：1993-08-17

申请号：US745457

申请日：1991-08-14

申请人： Ernest E. Rogers ,  Blaine A. Frandsen ,  C. Lamont Hislop

发明人： Ernest E. Rogers ,  Blaine A. Frandsen ,  C. Lamont Hislop

IPC分类号： A47L11/00 ,  B08B7/00 ,  C23G5/00 ,  H01J37/32

CPC分类号： H01J37/32366 ,  A47L11/00 ,  A47L11/4013 ,  A47L11/4036 ,  A47L11/4044 ,  A47L11/405 ,  C23G5/00 ,  H01J37/32082 ,  H01J2237/162

摘要： A device is provided for cleaning a surface by introducing a highly reactive gas mixture to the surface. The highly reactive gas mixture may include excited species such as ozone and relate excited ions, atoms, and electrons. The excited gas mixture then oxidizes undesirable materials on the surface. The device includes a structure which defines an enclosed space when placed against the surface to be cleaned. A set of one or more electrodes are positioned within the device such that an electrical discharge across the electrodes excites the selected gases species. The electrodes are attached to a power supply capable of generating a high frequency, high voltage discharge. A tube is provided for transporting selected gases, such as air or oxygen, to the enclosed space. Another tube is provide for removing reaction products from the enclosed space. This tube is place in communication with a source of suction for establishing a flow of gases into and out of the enclosed space.

摘要翻译： 提供一种用于通过将高反应性气体混合物引入到表面来清洁表面的装置。 高反应性气体混合物可以包括诸如臭氧的激发物质，并且涉及激发的离子，原子和电子。 激发的气体混合物然后氧化表面上不需要的材料。 该装置包括当抵靠待清洁表面放置时限定封闭空间的结构。 一组一个或多个电极定位在装置内，使得穿过电极的放电激发所选择的气体种类。 电极连接到能够产生高频，高压放电的电源。 提供管用于将选择的气体（例如空气或氧气）输送到封闭空间。 提供另一个管用于从封闭空间除去反应产物。 该管与用于建立气体进入和离开封闭空间的抽吸源连通。