公开(公告)号：US5931048A

公开(公告)日：1999-08-03

申请号：US808131

申请日：1997-02-28

申请人： Alexander H. Slocum ,  Carsten A. Hochmuth ,  David H. Levy ,  Sepehr Kiani ,  R. Ryan Vallance

发明人： Alexander H. Slocum ,  Carsten A. Hochmuth ,  David H. Levy ,  Sepehr Kiani ,  R. Ryan Vallance

IPC分类号： G01R1/06 ,  G01R31/28 ,  H01L21/66 ,  G05G11/00

CPC分类号： G01R31/2887 ,  Y10T74/20311 ,  Y10T74/20341

摘要： A manipulator for a test head connected to automatic test equipment through a heavy, inflexible cable. The manipulator includes a telescoping column assembly to which is mounted a vertical member. A cradle holding the test head is mounted to the vertical member. The cable is clamped at the vertical member to reduce the amount of force exerted by the cable on the test head. The cradle includes movable members to allow fine positioning of the test head, while maintaining the test head isolated from cable force. Course motion of the test head may be made by moving portions of the manipulator on the opposite side of the cable clamp from the test head. Precise positioning of the test head relative to a handling device is accomplished through a positioning mechanism at the interface between the test head and the handling device. To allow the positioning mechanism to operate, the manipulator has compliance which allows the test head to be forced into position by the positioning mechanism.

摘要翻译： 用于通过重型，不灵活的电缆连接到自动测试设备的测试头的操纵器。 操纵器包括一个可伸缩的柱组件，其上安装有垂直构件。 夹持测试头的托架安装在垂直构件上。 电缆被夹紧在垂直构件上，以减少电缆施加在测试头上的力量。 支架包括可移动构件，以允许测试头的精细定位，同时保持测试头与电缆力隔离。 可以通过将操纵器的与测试头相对的电缆夹的相对侧上的部分移动来进行测试头的运动。 测试头相对于处理装置的精确定位是通过在测试头和处理装置之间的界面处的定位机构实现的。 为了允许定位机构操作，机械手具有允许通过定位机构将测试头压入到位的顺从性。