公开(公告)号：US08625949B2

公开(公告)日：2014-01-07

申请号：US13421204

申请日：2012-03-15

Applicant: Chih-Kung Lee ,  Chih-Jen Chien ,  Yu-Hsun Lee ,  Chun-Yen Chen ,  Yuh-Yan Yu ,  Te-Hsun Chen

Inventor： Chih-Kung Lee ,  Chih-Jen Chien ,  Yu-Hsun Lee ,  Chun-Yen Chen ,  Yuh-Yan Yu ,  Te-Hsun Chen

IPC: G02B6/00 ,  G02B6/26 ,  G02B6/42 ,  F21V7/04 ,  G02B5/00

CPC classification number: G03F7/70383 ,  G01Q60/22 ,  G01Q80/00

Abstract: Disclosed is an optical head, including a hollow micro-pipe and a stuffing member, the micro-pipe having a diameter-extended portion and a diameter-diminishing portion adapted allowing the incident light to transmit from the diameter-extended portion to the diameter-diminishing portion to emerge from its tip, and the stuffing member being disposed inside of the micro-pipe compared to prior techniques. The optical head of the invention is easier to be made, and it has a better focus for achieving optical exposure of sub-wave length focal spot and deep depth of focus.

Abstract translation: 公开了一种包括中空微管和填充构件的光学头，所述微管具有直径延伸部分和直径减小部分，其适于允许入射光从直径延伸部分传播到直径 - 缩小部分从其尖端露出，并且与现有技术相比，填充构件设置在微管内部。 本发明的光头更容易制造，并且对于实现亚波长焦点和深深度焦深的光学曝光具有更好的重点。

公开(公告)号：US20130115454A1

公开(公告)日：2013-05-09

申请号：US13421204

申请日：2012-03-15

Applicant: Chih-Kung Lee ,  Chih-Jen Chien ,  Yu-Hsun Lee ,  Chun-Yen Chen ,  Yuh-Yan Yu ,  Te-Hsun Chen

Inventor： Chih-Kung Lee ,  Chih-Jen Chien ,  Yu-Hsun Lee ,  Chun-Yen Chen ,  Yuh-Yan Yu ,  Te-Hsun Chen

IPC: D02G3/00

CPC classification number: G03F7/70383 ,  G01Q60/22 ,  G01Q80/00

Abstract: Disclosed is an optical head, including a hollow micro-pipe and a stuffing member, the micro-pipe having a diameter-extended portion and a diameter-diminishing portion adapted allowing the incident light to transmit from the diameter-extended portion to the diameter-diminishing portion to emerge from its tip, and the stuffing member being disposed inside of the micro-pipe compared to prior techniques. The optical head of the invention is easier to be made, and it has a better focus for achieving optical exposure of sub-wave length focal spot and deep depth of focus.

Abstract translation: 公开了一种包括中空微管和填充构件的光学头，所述微管具有直径延伸部分和直径减小部分，其适于允许入射光从直径延伸部分传播到直径 - 缩小部分从其尖端露出，并且与现有技术相比，填充构件设置在微管内部。 本发明的光头更容易制造，并且对于实现亚波长焦点和深深度焦深的光学曝光具有更好的重点。