公开(公告)号：US20120223227A1

公开(公告)日：2012-09-06

申请号：US13041017

申请日：2011-03-04

申请人： Chien-Huei CHEN ,  Paul D. MacDONALD ,  Rajasekhar KUPPA ,  Takuji TADA ,  Gordon ABBOTT ,  Cho TEH ,  Hedong YANG ,  Stephen LANG ,  Mark A. NEIL ,  Zain SAIDIN

发明人： Chien-Huei CHEN ,  Paul D. MacDONALD ,  Rajasekhar KUPPA ,  Takuji TADA ,  Gordon ABBOTT ,  Cho TEH ,  Hedong YANG ,  Stephen LANG ,  Mark A. NEIL ,  Zain SAIDIN

IPC分类号： G01N23/04

CPC分类号： G01N23/2251

摘要： One embodiment relates to a method of real-time three-dimensional electron beam imaging of a substrate surface. A primary electron beam is scanned over the substrate surface causing electrons to be emitted therefrom. The emitted electrons are simultaneously detection using a plurality of at least two off-axis sensors so as to generate a plurality of image data frames, each image data frame being due to electrons emitted from the substrate surface at a different view angle. The plurality of image data frames are automatically processed to generate a three-dimensional representation of the substrate surface. Multiple views of the three-dimensional representation are then displayed. Other embodiments, aspects and features are also disclosed.

摘要翻译： 一个实施例涉及衬底表面的实时三维电子束成像的方法。 在基板表面上扫描一次电子束，使电子从其发射。 所发射的电子同时使用多个至少两个离轴传感器进行检测，以产生多个图像数据帧，每个图像数据帧是由于以不同视角从基板表面发射的电子。 多个图像数据帧被自动处理以产生衬底表面的三维表示。 然后显示三维表示的多个视图。 还公开了其它实施例，方面和特征。

公开(公告)号：US20060082763A1

公开(公告)日：2006-04-20

申请号：US11249144

申请日：2005-10-12

申请人： Cho Teh ,  Tommaso Torelli ,  Dominic David ,  Chiuman Yeung ,  Michael Scott ,  Lalita Balasubramanian ,  Lisheng Gao ,  Tong Huang ,  Jianxin Zhang ,  Michal Kowalski ,  Jonathan Oakley

发明人： Cho Teh ,  Tommaso Torelli ,  Dominic David ,  Chiuman Yeung ,  Michael Scott ,  Lalita Balasubramanian ,  Lisheng Gao ,  Tong Huang ,  Jianxin Zhang ,  Michal Kowalski ,  Jonathan Oakley

IPC分类号： G01N21/00 ,  H01J3/14

CPC分类号： G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148

摘要： Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.