公开(公告)号：US09611140B2

公开(公告)日：2017-04-04

申请号：US14004743

申请日：2012-03-14

申请人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

发明人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

IPC分类号： G01L21/30 ,  B81C1/00 ,  G01N33/487

CPC分类号： B81B1/002 ,  B81B2201/0214 ,  B81B2203/0127 ,  B81B2207/056 ,  B81C1/00087 ,  G01N33/48721

摘要： In a method of forming a nanopore in a nanometric material, a nanopore nucleation site is formed at a location that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group of ion beam and neutral atom beam, at the interior location for a first time duration that imposes a first beam dose which causes removal of no more than five interior atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms. A nanopore is then formed at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that removes edge atoms at the nanopore nucleation site but does not remove bulk atoms from the nanometric material.

公开(公告)号：US20140079936A1

公开(公告)日：2014-03-20

申请号：US14004743

申请日：2012-03-14

申请人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

发明人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

IPC分类号： B81C1/00

CPC分类号： B81B1/002 ,  B81B2201/0214 ,  B81B2203/0127 ,  B81B2207/056 ,  B81C1/00087 ,  G01N33/48721

摘要： In a method of forming a nanopore in a nanometric material, a nanopore nucleation site is formed at a location that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group of ion beam and neutral atom beam, at the interior location for a first time duration that imposes a first beam dose which causes removal of no more than five interior atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms. A nanopore is then formed at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that removes edge atoms at the nanopore nucleation site but does not remove bulk atoms from the nanometric material.

摘要翻译： 在纳米孔内形成纳米孔的方法中，通过引导选自离子束和中性原子束组的第一能量束，在纳米材料的横向边缘内部的位置处形成纳米孔成核位点， 在内部位置处施加第一束剂量，其引起从内部位置移除不超过五个内部原子，以在内部位置产生具有多个边缘原子的纳米孔成核位点。 然后在纳米孔成核位置通过在纳米孔成核位置引入从由电子束，离子束和中性原子束组成的组中选择的第二能量束，以纳米孔成核位点形成纳米孔，该束能量去除纳米孔上的边缘原子 但不能从纳米材料中去除体原子。