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公开(公告)号:US08322616B2
公开(公告)日:2012-12-04
申请号:US11678882
申请日:2007-02-26
IPC分类号: G06K7/14
CPC分类号: G03F7/70975 , G03F7/70025 , G03F7/70508
摘要: An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.
摘要翻译: 一种自动签名检测系统及其使用方法,更具体地说,一种预测建模部件,其被配置为准确地预测用于光刻工具的光学元件的维护事件。 该系统包括被配置为分析与表面上的功率照明相关联的数据的至少一个模块。 至少一个模块还被配置为使用基于指数的衰减模型将曲线拟合到所分析的数据。
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公开(公告)号:US20080086440A1
公开(公告)日:2008-04-10
申请号:US11678882
申请日:2007-02-26
IPC分类号: G06N7/08
CPC分类号: G03F7/70975 , G03F7/70025 , G03F7/70508
摘要: An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.
摘要翻译: 一种自动签名检测系统及其使用方法,更具体地说,一种预测建模部件,其被配置为准确地预测用于光刻工具的光学元件的维护事件。 该系统包括被配置为分析与表面上的功率照明相关联的数据的至少一个模块。 至少一个模块还被配置为使用基于指数的衰减模型将曲线拟合到所分析的数据。
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公开(公告)号:US5730006A
公开(公告)日:1998-03-24
申请号:US777516
申请日:1996-12-30
摘要: This invention is a garment de-wrinkler that includes a garment bag with a threaded opening in the bottom thereof. A device for controlling the interior environment of the garment bag is inserted into the opening in the bag. The environmental controller is in the form of an exterior canister that is open at both end with a fan mounted adjacent the exterior end. A second canister is mounted interiorly of the exterior canister and includes heating electrodes to create steam from the water or other liquid contained in the interior canister. Air heating elements are provided in the area between the interior wall of the exterior canister and the exterior wall of the interior canister so that when ambient air is blown over the coil the air will be heated prior to entering the garment bag. Finally an automatic timer is provided that automatically steams for a predetermined amount of time with the heated, dry air being introduced for an approximately twice as long so that the garment or garments within the garment bag can be both de-wrinkled and dried.
摘要翻译: 本发明是一种服装消除皱纹,其包括在其底部具有螺纹开口的服装袋。 用于控制衣服袋的内部环境的装置被插入袋的开口中。 环境控制器是外部罐体的形式,两端开口,外部端口附近安装风扇。 第二罐被安装在外部罐的内部,并且包括加热电极以从包含在内部罐中的水或其它液体产生蒸汽。 空气加热元件设置在外部罐的内壁和内部罐的外壁之间的区域中,使得当环境空气吹过线圈时,空气将在进入衣服袋之前被加热。 最后,提供自动定时器,其自动蒸汽预定时间量,其中加热的干燥空气被引入约两倍长,使得服装袋内的衣服或服装可以脱皮和干燥。
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