公开(公告)号：USD593559S1

公开(公告)日：2009-06-02

申请号：US29290402

申请日：2007-11-30

Applicant: Chung-Ping Lin ,  Ying-Shen Lin

Designer： Chung-Ping Lin ,  Ying-Shen Lin

公开(公告)号：US06823876B1

公开(公告)日：2004-11-30

申请号：US10653315

申请日：2003-09-02

Applicant: Yuan-Hsun Chang ,  Ming-Hsien Chang ,  Chung-Ping Lin ,  Tzu-Hao Liu

Inventor： Yuan-Hsun Chang ,  Ming-Hsien Chang ,  Chung-Ping Lin ,  Tzu-Hao Liu

IPC: B08B900

CPC classification number: H01L21/6708 ,  B08B9/00 ,  B08B9/08 ,  B08B9/093 ,  Y10S134/902

Abstract: A method of cleaning and maintenance used for a rotational etching tool, combining the physical characteristics of water (splashed off after striking the surface of a spinning wafer) and a PM (preventive maintenance) computer program, can automatically and quickly clean the interior of the etching tool. By setting the appropriate parameters of PM program, single or all of process chambers can be well cleaned. Also, the DI water dropping positions on the wafer can be altered to create more splashing angles. To clean the sidewalls of the etching chambers, the wafer supporting means is moved between the process chamber and the rotating speed thereof is preferably alter while it is moving. The PM program of the present invention can be executed whenever the cleaning job needs to be done. It not only is timesaving and easy to apply, but also keeps the wafer in a almost-no-particle environment while being etched.

Abstract translation: 一种用于旋转蚀刻工具的清洁和维护方法，结合了水（在冲击晶片的表面之后飞溅的）的物理特性和PM（预防性维护）计算机程序，可以自动和快速地清洁 蚀刻工具。 通过设置PM程序的适当参数，可以清理单个或所有处理室。 此外，可以改变晶片上的去离子水滴位置以产生更多的飞溅角度。 为了清洁蚀刻室的侧壁，晶片支撑装置在处理室之间移动，并且其旋转速度优选地在移动时改变。 无论何时需要完成清洁工作，都可以执行本发明的PM程序。 它不仅节省时间并且易于应用，而且在蚀刻时将晶片保持在几乎无颗粒的环境中。

公开(公告)号：US06786403B2

公开(公告)日：2004-09-07

申请号：US10189543

申请日：2002-07-08

Applicant: Chung-Ping Lin

Inventor： Chung-Ping Lin

IPC: G06K1500

CPC classification number: G06K19/07716 ,  G06K1/128 ,  G06K19/07 ,  G06K19/0723 ,  G06K2017/0041

Abstract: The present invention provides a kind of contactless electromagnetic identification code IC circuit, which contains a control circuit to detect an input pad, and to provide a coding signal to decide one identification code for the contactless electromagnetic induced identification code IC. The control circuit contains: a carry clock signal source, which provides a carry clock signal to the input pad for generating a responding signal from the input pad; and a flip-flop set, which connects to the input pad, decides the identification code and forms the coding signal according to the pad's responding signal and the carry clock signal.

Abstract translation: 本发明提供一种非接触式电磁识别码IC电路，其包含检测输入焊盘的控制电路，并提供编码信号以决定用于非接触式电磁感应识别码IC的一个识别码。 控制电路包括：进位时钟信号源，其向输入焊盘提供进位时钟信号，以从输入焊盘产生响应信号; 并且连接到输入焊盘的触发器组根据焊盘的响应信号和进位时钟信号决定识别码并形成编码信号。