Steam hose with internal liner for chemical cleaning

    公开(公告)号:US12018774B2

    公开(公告)日:2024-06-25

    申请号:US17784005

    申请日:2020-12-16

    Abstract: A hose conducts high-temperature steam combined with cleaning solution in a cleaning operation. The hose comprises an external liner, an intermediate conduit, and an internal liner. The external liner comprises first braiding and is disposed along a longitudinal length of the hose. The intermediate conduit is disposed in the external liner along the longitudinal length of the hose. The intermediate conduit has a plurality of corrugations disposed laterally in the tubular wall of the intermediate conduit. The internal liner comprises second braiding and is disposed in the intermediate conduit along the longitudinal length of the hose. The internal liner provided a full bore for the hose configured to conduct the high temperature steam combined with the cleaning solution in a volatilized mixture.

    Cleaning method and plasma processing apparatus

    公开(公告)号:US12002664B2

    公开(公告)日:2024-06-04

    申请号:US17985085

    申请日:2022-11-10

    Abstract: A cleaning method is provided. In the cleaning method, residues of elements of a group for a common semiconductor material in a chamber are removed with plasma of a halogen-containing gas. Residues of metal elements of groups 12 and 13 and groups 14 and 15 in the chamber are removed with plasma of a hydrocarbon-containing gas. A C-containing material in the chamber is removed with plasma of an O-containing gas. Further, the removing with the plasma of the halogen-containing gas, the removing with the plasma of the hydrocarbon-containing gas, and the removing with the plasma of the O-containing gas are performed in that order or the removing with the plasma of the hydrocarbon-containing gas, the removing with the plasma of the O-containing gas, and the removing with the plasma of the halogen-containing gas are performed in that order X times where X≥1.

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