公开(公告)号：US5228776A

公开(公告)日：1993-07-20

申请号：US879760

申请日：1992-05-06

申请人： Walter L. Smith ,  Clifford G. Wells ,  Allan Rosencwaig

发明人： Walter L. Smith ,  Clifford G. Wells ,  Allan Rosencwaig

IPC分类号： G01N25/72

CPC分类号： G01N25/72

摘要： An apparatus is disclosed for evaluating thermal and electrical characteristics of a sample. An intensity modulated pump beam is focused onto the surface of a sample at one spot. A non-modulated probe beam is focused onto the sample at a second spot, spaced laterally and vertically from the first spot. The distance between the two spots is at least two microns. The modulated power of the reflected probe beam that is in phase with the pump beam modulation frequency is monitored to provide information about the characteristics of the sample. The apparatus is particularly useful in evaluating the integrity of metal lines and vias in a semiconductor sample.

摘要翻译： 公开了一种用于评估样品的热和电特性的装置。 强度调制泵浦光束在一个点聚焦在样品的表面上。 未调制探测光束在第二光点聚焦在样品上，与第一光斑横向和垂直间隔。 两个点之间的距离至少为2微米。 监测与泵浦光束调制频率同相的反射探测光束的调制功率，以提供有关样品特性的信息。 该装置在评估半导体样品中金属线和通孔的完整性方面特别有用。