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1.
公开(公告)号:US06181977B2
公开(公告)日:2001-01-30
申请号:US09017724
申请日:1998-02-04
IPC分类号: G06F1900
CPC分类号: H01L21/50 , H01L21/4853 , H01L22/20 , H01L23/4985 , H01L2924/0002 , H01L2924/014 , H01L2924/00
摘要: The control technique of the present invention includes a computer readable medium with several programs. A first program for controlling the steps that run a sequence of steps for setting certain devices in a start condition. A second program includes instructions for setting a start condition. A third program includes instructions for controlling a timer to set time intervals involved in the sequence of steps. A fourth program includes instructions for monitoring predetermined processes.
摘要翻译: 本发明的控制技术包括具有若干程序的计算机可读介质。 用于控制运行用于将某些设备设置为起始条件的步骤的步骤的第一程序。 第二个程序包括设置开始条件的指令。 第三程序包括用于控制定时器以设置步骤序列中涉及的时间间隔的指令。 第四个程序包括用于监视预定过程的指令。