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公开(公告)号：US5742065A
公开(公告)日：1998-04-21
申请号：US787069
申请日：1997-01-22
CPC分类号： G03F1/20 , G03F1/22 , H01J37/09 , H01J2237/022 , H01J2237/0453 , H01J2237/3175
摘要： A method for reducing contamination in a silicon membrane mask in a lithography system is described. The method includes: doping the top surface of the silicon membrane mask with boron to lower the electrical resistance of the mask; subsequently metalizing the surface of the mask to further lower its electrical resistance; and, finally, applying a voltage between opposite surfaces of the mask, the voltage generating an electric field that passes through the membrane mask, heating the membrane mask. The method further includes: calculating distortions in the shape of each of the patterns within the mask caused by heating the membrane mask; compensating for the proximity of other shapes positioned in the vicinity of each of the patterns; and appropriately modifying the shape of each of the patterns. The above described method can be equally applied to an e-beam system or to an ion-beam lithography system, and both, to stencil masks and to scattering masks.
摘要翻译： 描述了一种在光刻系统中减少硅膜掩模中污染的方法。 该方法包括：用硼掺杂硅膜掩模的顶表面以降低掩模的电阻; 随后金属化掩模的表面以进一步降低其电阻; 并且最后，在掩模的相对表面之间施加电压，产生通过膜掩模的电场的电压，加热膜掩模。 该方法还包括：通过加热膜掩模来计算掩模内的每个图案的形状的变形; 补偿位于每个图案附近的其它形状的接近; 并适当地修改每个图案的形状。 上述方法可以同样地应用于电子束系统或离子束光刻系统，并且可以应用于模板掩模和散射掩模。
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公开(公告)号：US20110308766A1
公开(公告)日：2011-12-22
申请号：US12820961
申请日：2010-06-22
CPC分类号： F24F3/044 , F24F3/14 , F24F11/74 , F24F2221/36
摘要： A system and method for improving the efficiency of air handling units by reducing the static air pressure within units. The system and method utilizes rotary union mounts to fluidly connect the heating and cooling coils within the system. The rotary union mounts allow the heating and/or cooling coils to be rotated flush within the housing of the air handling unit when the coil(s) are not in use and thereby out of the air flow path. Rotating the coils out of the air flow path reduces the static air pressure within the air handling unit and significantly improves the efficiency of the system by reducing the horsepower requirement and power consumption of the system fan. The rotary union mounts allow the coil(s) to be selectably rotated out of the air flow path based on system demand requirements.
摘要翻译： 一种通过降低单位内静压空气压力来提高空气处理单元效率的系统和方法。 该系统和方法利用旋转接头安装件将系统内的加热和冷却线圈流体连接。 旋转接头安装件允许加热和/或冷却线圈在空气处理单元的壳体内旋转，当线圈不在使用中并且由此离开空气流动路径时。 将线圈从空气流动路径旋转减少了空气处理单元内的静态空气压力，并通过降低系统风扇的功率需求和功率消耗来显着提高系统的效率。 旋转接头安装件允许线圈根据系统需求要求可选地旋转出空气流动路径。
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