公开(公告)号：US20070137063A1

公开(公告)日：2007-06-21

申请号：US11315647

申请日：2005-12-21

申请人： Donald Grubbs ,  Eric Hwang ,  Jinliu Wang ,  Richard White

发明人： Donald Grubbs ,  Eric Hwang ,  Jinliu Wang ,  Richard White

IPC分类号： F26B3/00 ,  F26B5/04

CPC分类号： H01J37/32422 ,  H01J37/32357 ,  H01J37/32862

摘要： The improved carbon beam deposition chamber described herein substantially reduces the accumulation of carbon film on the outer surfaces of the chamber aperture plates, thereby substantially increasing the number of disks which can be processed before system cleaning or hardware replacement is required, thereby to substantially reduce disk failure for coated disks and substantially increase carbon gun productivity.

摘要翻译： 本文所述的改进的碳束沉积室基本上减少了碳膜在室孔板的外表面上的积聚，从而大大增加了在需要系统清洁或硬件更换之前可以处理的盘的数量，从而基本上减少了盘 涂层盘的失效并大大提高了碳枪的生产率。