公开(公告)号：US07037174B2

公开(公告)日：2006-05-02

申请号：US10678906

申请日：2003-10-03

申请人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

发明人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

IPC分类号： B49D1/00

CPC分类号： B24B37/042 ,  B24B49/006 ,  H01L21/02074 ,  H01L21/3212 ,  Y02P70/605

摘要： Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material form thereon in a polishing apparatus having a rotational carrier head and a rotatable platen, wherein the substrate is disposed in the rotational carrier head and the platen has a polishing article disposed thereon, rotating the first carrier head at a first carrier head rotational rate and rotating a platen at a first platen rotational rate, contacting the substrate and the polishing article, accelerating the first carrier head rotational rate to a second carrier head rotational rate and accelerating the first platen rotational rate to a second platen rotational rate, and polishing the substrate at the second carrier head rotational rate and at the second platen rotational rate.

摘要翻译： 提供了用于抛光衬底的方法和装置，其包括具有降低或最小衬底表面损伤和分层的导电和低k电介质材料。 一方面，提供了一种处理衬底的方法，包括在具有旋转载体头和可旋转压板的抛光装置中定位其上具有导电材料的衬底，其中衬底设置在旋转载体头部中，并且压板具有 设置在其上的抛光制品，以第一载体头旋转速率旋转第一载体头并以第一压板旋转速率旋转压板，使基板和抛光制品接触，将第一载体头旋转速率加速到第二载体头旋转 速度并将第一压板转速加速到第二压板旋转速率，并以第二承载头转速和第二压板旋转速率抛光衬底。

公开(公告)号：US07244168B2

公开(公告)日：2007-07-17

申请号：US11393278

申请日：2006-03-30

申请人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

发明人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

IPC分类号： B24B49/00 ,  B24B1/00

CPC分类号： B24B37/042 ,  B24B49/006 ,  H01L21/02074 ,  H01L21/3212 ,  Y02P70/605

摘要： Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material form thereon in a polishing apparatus having a rotational carrier head and a rotatable platen, wherein the substrate is disposed in the rotational carrier head and the platen has a polishing article disposed thereon, rotating the first carrier head at a first carrier head rotational rate and rotating a platen at a first platen rotational rate, contacting the substrate and the polishing article, accelerating the first carrier head rotational rate to a second carrier head rotational rate and accelerating the first platen rotational rate to a second platen rotational rate, and polishing the substrate at the second carrier head rotational rate and at the second platen rotational rate.

摘要翻译： 提供了用于抛光衬底的方法和装置，其包括具有降低或最小衬底表面损伤和分层的导电和低k电介质材料。 一方面，提供了一种处理衬底的方法，包括在具有旋转载体头和可旋转压板的抛光装置中定位其上具有导电材料的衬底，其中衬底设置在旋转载体头部中，并且压板具有 设置在其上的抛光制品，以第一载体头旋转速率旋转第一载体头并以第一压板旋转速率旋转压板，使基板和抛光制品接触，将第一载体头旋转速率加速到第二载体头旋转 速度并将第一压板转速加速到第二压板旋转速率，并以第二承载头转速和第二压板旋转速率抛光衬底。

公开(公告)号：US20060172664A1

公开(公告)日：2006-08-03

申请号：US11393278

申请日：2006-03-30

申请人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

发明人： Yufei Chen ,  Lizhong Sun ,  Doohan Lee ,  Wei-Yung Hsu

IPC分类号： B24B51/00 ,  B24B7/30 ,  B24B1/00

CPC分类号： B24B37/042 ,  B24B49/006 ,  H01L21/02074 ,  H01L21/3212 ,  Y02P70/605

摘要： Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material form thereon in a polishing apparatus having a rotational carrier head and a rotatable platen, wherein the substrate is disposed in the rotational carrier head and the platen has a polishing article disposed thereon, rotating the first carrier head at a first carrier head rotational rate and rotating a platen at a first platen rotational rate, contacting the substrate and the polishing article, accelerating the first carrier head rotational rate to a second carrier head rotational rate and accelerating the first platen rotational rate to a second platen rotational rate, and polishing the substrate at the second carrier head rotational rate and at the second platen rotational rate.

公开(公告)号：US20120060093A1

公开(公告)日：2012-03-08

申请号：US13320451

申请日：2010-05-13

申请人： Doohan Lee

发明人： Doohan Lee

IPC分类号： G06F3/048 ,  G06F17/30

CPC分类号： G11B27/105 ,  G09B5/06 ,  G09B19/06 ,  G11B27/322

摘要： The present invention relates to a multimedia file playing back method for playing audio and video contents for more effective language learning, and to a multimedia player. More particularly, the present invention relates to a multimedia file playing back method and a multimedia player, wherein file(s) to be played back are multimedia file(s) such as MP3, WMV or AVI file(s), said method comprising: a file loading (9) step in which a specific frame is selected as the file playback time base, at least one pause markers (51) recording the time code for the frame is defined, multimedia files (50) stored in the file metadata area are sorted by filename, and a multimedia file is loaded into the playback program; a file selection step (10) in which a multimedia file is selected; a file playback step (12) in which the selected multimedia file is played back; a pausing step (13) in which a control means (34) detects the pause markers (51), and playback is paused at the applicable frame; a playback switch operation step (14) in which the pause function is released by operating a switch means (32) after the completion of a learning exercise such as attempting to respond to, repeating or writing down a played-back sentence using the pause time; and a file playback step (12) in which the file is played back again, wherein a foreign language is learnt while one or more multimedia files stored in a folder are played back sequentially by repeating the file playback step (12), the pausing step (13) and the switch operation step (14).

摘要翻译： 本发明涉及一种用于播放用于更有效的语言学习的音频和视频内容的多媒体文件播放方法以及多媒体播放器。 更具体地说，本发明涉及多媒体文件播放方法和多媒体播放器，其中要播放的文件是多媒体文件，诸如MP3，WMV或AVI文件，所述方法包括： 选择特定帧作为文件播放时基的文件加载（9）步骤，定义记录帧的时间码的至少一个暂停标记（51），存储在文件元数据区域中的多媒体文件（50） 按文件名排序，多媒体文件加载到播放程序中; 选择多媒体文件的文件选择步骤（10）; 文件重放步骤（12），其中播放所选择的多媒体文件; 暂停步骤（13），其中控制装置（34）检测到暂停标记（51），并且在适用的帧处暂停播放; 回放切换操作步骤（14），其中通过在学习练习完成之后通过操作开关装置（32）来释放暂停功能，例如尝试使用暂停时间来响应，重复或写下回放句子 ; 和文件再现步骤（12），其中再次播放文件，其中通过重复文件重放步骤（12）来顺序地播放存储在文件夹中的一个或多个多媒体文件的外语，暂停步骤 （13）和切换操作步骤（14）。