公开(公告)号：US07672354B2

公开(公告)日：2010-03-02

申请号：US11914651

申请日：2006-05-23

申请人： Matthias Scholz ,  Johannes Schurack ,  Edgar Spranz ,  Karl Heinz Segsa ,  Joachim Mueller

发明人： Matthias Scholz ,  Johannes Schurack ,  Edgar Spranz ,  Karl Heinz Segsa ,  Joachim Mueller

IPC分类号： H01S3/22

CPC分类号： H01S3/09713 ,  H01S3/03 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0975 ,  H01S3/105

摘要： A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes ceramic material with laser gas sealed therein. The components also include partial metal layers disposed on the discharge tube. Decoupling and holding elements including support trays are disposed in the wall passages, with the support trays being adhered with solder to the discharge tube via the partial metal layers. The components also include a pair of electrodes extending axially and disposed in the decoupling and holding elements so as to form a gas discharge path. The components also include a pair of rod-shaped electrodes disposed in the discharge tube that are substantially parallel to the main electrodes and operable to control the starting conditions of gas discharge. The electrical excitation circuit includes a switch to generate a high-current discharge from an energy storage device. Support rings are joined to the front ends of the discharge tube and a pair of optical resonator mirrors are welded into the support rings. At least some of the components are usable with an ultrahigh vacuum and heatable to above a second water boundary. The support trays and the support rings are deformable so as to enable fine adjustment of the main electrodes and of the resonator mirrors.

摘要翻译： 一种用于产生具有高脉冲重复率的光脉冲的横向电激励气体放电激光器。 气体放电激光器具有包括具有相对的壁通道和前端的气密放电管。 放电管包括其中密封有激光气体的陶瓷材料。 这些部件还包括设置在放电管上的部分金属层。 包括支撑托盘在内的去耦和保持元件设置在壁通道中，其中支撑托盘通过部分金属层与焊料粘合到放电管。 这些部件还包括一对轴向延伸并设置在去耦和保持元件中以形成气体放电路径的电极。 这些部件还包括一对设置在放电管中的棒状电极，其基本上平行于主电极并且可操作以控制气体放电的起始条件。 电激励电路包括从能量存储装置产生高电流放电的开关。 支撑环连接到放电管的前端，并且一对光学谐振镜被焊接到支撑环中。 至少一些部件可用于超高真空并且可加热到第二水边界之上。 支撑托盘和支撑环是可变形的，以便能够对主电极和谐振器镜进行精细调节。

公开(公告)号：US20080279247A1

公开(公告)日：2008-11-13

申请号：US11914651

申请日：2006-05-23

申请人： Matthias Scholz ,  Johannes Schurack ,  Edgar Spranz ,  Karl Heinz Segsa ,  Joachim Mueller

发明人： Matthias Scholz ,  Johannes Schurack ,  Edgar Spranz ,  Karl Heinz Segsa ,  Joachim Mueller

IPC分类号： H01S3/03

CPC分类号： H01S3/09713 ,  H01S3/03 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0975 ,  H01S3/105

摘要： A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes ceramic material with laser gas sealed therein. The components also include partial metal layers disposed on the discharge tube. Decoupling and holding elements including support trays are disposed in the wall passages, with the support trays being adhered with solder to the discharge tube via the partial metal layers. The components also include a pair of electrodes extending axially and disposed in the decoupling and holding elements so as to form a gas discharge path. The components also include a pair of rod-shaped electrodes disposed in the discharge tube that are substantially parallel to the main electrodes and operable to control the starting conditions of gas discharge. The electrical excitation circuit includes a switch to generate a high-current discharge from an energy storage device. Support rings are joined to the front ends of the discharge tube and a pair of optical resonator mirrors are welded into the support rings. At least some of the components are usable with an ultrahigh vacuum and heatable to above a second water boundary. The support trays and the support rings are deformable so as to enable fine adjustment of the main electrodes and of the resonator mirrors.

摘要翻译： 一种用于产生具有高脉冲重复率的光脉冲的横向电激励气体放电激光器。 气体放电激光器具有包括具有相对的壁通道和前端的气密放电管。 放电管包括其中密封有激光气体的陶瓷材料。 这些部件还包括设置在放电管上的部分金属层。 包括支撑托盘在内的去耦和保持元件设置在壁通道中，其中支撑托盘通过部分金属层与焊料粘合到放电管。 这些部件还包括一对轴向延伸并设置在去耦和保持元件中以形成气体放电路径的电极。 这些部件还包括一对设置在放电管中的棒状电极，其基本上平行于主电极并且可操作以控制气体放电的起始条件。 电激励电路包括从能量存储装置产生高电流放电的开关。 支撑环连接到放电管的前端，并且一对光学谐振镜被焊接到支撑环中。 至少一些部件可用于超高真空并且可加热到第二水边界之上。 支撑托盘和支撑环是可变形的，以便能够对主电极和谐振器镜进行精细调节。