公开(公告)号：US09252552B2

公开(公告)日：2016-02-02

申请号：US14731934

申请日：2015-06-05

Applicant: FANUC CORPORATION

Inventor： Masahiro Honda

IPC: H01S3/22 ,  H01S3/032 ,  H01S3/223 ,  H01S3/04 ,  H01S3/038 ,  H01S3/104 ,  H01S3/036 ,  H01S3/134 ,  H01S3/13 ,  H01S3/097

CPC classification number: H01S3/09705 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/09702 ,  H01S3/13 ,  H01S3/1306 ,  H01S3/134 ,  H01S3/2232

Abstract: A gas laser oscillator includes an output command part for outputting a power supply output command; a power supply unit for applying a discharge tube voltage corresponding to the power supply output command to the discharge tube to start discharge; a voltage detection part for detecting the discharge tube voltage; a discharge start determination part for determining whether or not the discharge has been started on the basis of a value detected by the voltage detection part when the power supply output command is gradually increased; and a sealability determination part for determining that sealability of the gas container has been reduced when a discharge start time from the application of the discharge tube voltage until when it is determined by the discharge start determination part that the discharge is started exceeds a predetermined first threshold value.

Abstract translation: 气体激光振荡器包括用于输出电源输出指令的输出指令部分; 电源单元，用于将对应于电源输出命令的放电管电压施加到放电管开始放电; 用于检测放电管电压的电压检测部分; 放电开始判定部，其在电力供给输出指令逐渐增加时，基于由电压检测部检测出的值，判定是否已经开始放电; 以及当从施加放电管电压直到由放电开始确定部分确定放电开始的放电开始时间超过预定的第一阈值时确定气体容器的密封性的密封性确定部分 值。

公开(公告)号：US20140340687A1

公开(公告)日：2014-11-20

申请号：US14254739

申请日：2014-04-16

Applicant: THALES

Inventor： Selvin DAVID ,  Olivier CHAZALMARTIN ,  Alexandre MARY

IPC: G01C19/66

CPC classification number: G01C19/661 ,  H01S3/0381 ,  H01S3/0384 ,  H01S3/0835

Abstract: A gyrolaser comprises: a ring-shaped optical cavity and a gaseous medium, and at least three electrodes in contact with the gas of the amplification medium, the electrodes generating charges when ignition voltage is applied; the cavity and distribution of the electrodes comprising at least one plane of symmetry perpendicular to the plane of the cavity and passing through the electrode of first type; at least one conductive ignition element set at a predetermined potential, the shape and arrangement being such that symmetry is maintained; the electrically conductive element generating an electric field locally for guiding the charges so they are distributed symmetrically in a first flow and second flow in the first and second discharge areas respectively when the ignition voltage is applied, in such a way that a first plasma and a second plasma are initiated simultaneously, respectively, in the first discharge area and in the second discharge area.

Abstract translation: 陀螺仪包括：环形光腔和气体介质，以及与放大介质的气体接触的至少三个电极，所述电极在施加点火电压时产生电荷; 所述电极的空腔和分布包括垂直于所述腔的平面并穿过所述第一类型的电极的至少一个对称平面; 设置在预定电位的至少一个导电点火元件，所述形状和布置保持对称; 所述导电元件局部地产生用于引导电荷的电场，使得它们在施加点火电压时分别在第一和第二放电区域中的第一流量和第二流量中对称地分布，使得第一等离子体和 分别在第一放电区域和第二放电区域中同时启动第二等离子体。

公开(公告)号：US07542502B2

公开(公告)日：2009-06-02

申请号：US11237535

申请日：2005-09-27

Applicant: Thomas D. Steiger ,  Richard C. Ujazdowski

Inventor： Thomas D. Steiger ,  Richard C. Ujazdowski

IPC: H01S3/097

CPC classification number: H01S3/09713 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/225

Abstract: A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.

Abstract translation: 公开了一种用于气体放电激光器的电晕放电型前置电离器组件。 组件可以包括限定管孔的电极和中空的电介质管。 在一个方面，电极可以包括第一细长导电构件，其具有设置在管的孔中的第一端。 此外，电极可以包括第二细长导电构件，其具有设置在孔中并与第一导电构件的第一端隔开的第一端。 对于组件，第一和第二导电构件可以保持在相同的电压电位。

公开(公告)号：US06847670B1

公开(公告)日：2005-01-25

申请号：US09661481

申请日：2000-09-14

Applicant: Koji Kakizaki ,  Takashi Saito ,  Hidenori Watanabe

Inventor： Koji Kakizaki ,  Takashi Saito ,  Hidenori Watanabe

IPC: H01S3/097 ,  H01S3/02 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/22 ,  H01S3/223

CPC classification number: H01S3/0971 ,  H01S3/0384 ,  H01S3/09716 ,  H01S3/225

Abstract: The oscillation pulse width is extended in a gas laser apparatus emitting ultraviolet radiation by a high-repetition rate oscillating operation. The gas laser apparatus has a pair of laser discharge electrodes connected to the output terminals of a magnetic pulse compression circuit and disposed in a laser chamber. The pulse width is extended by determining circuit constants so that the period of the oscillating current flowing between the discharge electrodes is shortened and, at the same time, the peak value of the current is increased, whereby the laser gas is continuously excited even during at least one half-cycle subsequent to the first half-cycle of the oscillating current to sustain the laser oscillating operation.

Abstract translation: 振荡脉冲宽度在通过高重复率振荡操作发射紫外线的气体激光装置中延伸。 气体激光装置具有连接到磁脉冲压缩电路的输出端并设置在激光室中的一对激光放电电极。 通过确定电路常数来延长脉冲宽度，使得在放电电极之间流动的振荡电流的周期缩短，并且同时电流的峰值增加，由此激光气体即使在在 在振荡电流的第一半周期之后的至少一个半周期以维持激光振荡操作。

公开(公告)号：US06546036B1

公开(公告)日：2003-04-08

申请号：US09587996

申请日：2000-06-06

Applicant: Igor Bragin ,  Vadim Berger

Inventor： Igor Bragin ,  Vadim Berger

IPC: H01S322

CPC classification number: H01S3/038 ,  H01S3/0384 ,  H01S3/0977

Abstract: A method and devices for preionizing the main discharge gas volume of a gas discharge laser are described. The method and devices provide a preionizing discharge to the main gas discharge volume from above or below the main gas discharge volume. In combination with a shielding arrangement which reduces the spread of the preionization discharge other than to the main gas discharge volume, the exposure of other laser components and gas volumes to said preionization discharge is thereby minimized.

Abstract translation: 对气体放电激光器的主放电气体体积进行预处理的方法和装置进行说明。 所述方法和装置从主气体排出容积的上方或下方提供对主气体排出容积的预放电排放。 与除了主气体放电容积之外的减少预除电放电扩散的屏蔽装置相结合，其他激光成分的曝光和气体体积因此被最小化。

公开(公告)号：US5337330A

公开(公告)日：1994-08-09

申请号：US958922

申请日：1992-10-09

Applicant: Donald G. Larson

Inventor： Donald G. Larson

IPC: H01S3/038 ,  H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/0384

Abstract: An anode and a cathode in a laser are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gases in the laser to react chemically and produce coherent radiation. First and second tubes made from a dielectric material are spaced in the laser in a second direction transverse (preferably perpendicular) to the first direction. The anode, the cathode and the tubes extend through the laser in a direction transverse (preferably perpendicular) to the first and second directions. The tubes are preferably at least a 99.9% pure polycrystalline aluminum oxide ceramic with traces of other metallic elements than aluminum. Bushings made from a material homogeneous (preferably identical) to the tube material are integral with the tube near the opposite tube ends. First electrical conductors extend through the tubes. Second electrical conductors (preferably resilient) contact (preferably line contact) the external tube surfaces to define capacitors with the first conductors and the tube material. Positioning members movably engage the tube external surfaces near the tube ends in co-operation with the resilient members establishing three (3)- line contacts with the tubes for positioning the tubes precisely in the cavity. When a voltage pulse is applied between the first conductor inside each tube and the conductors on such tube, the resultant corona discharge from the external tube surface produces ultraviolet light which pre-ionizes the gases in the cavity. This facilitates the ionization of the gases in the cavity when an anode-cathode electrical discharge is produced.

Abstract translation: 激光器中的阳极和阴极在第一方向上间隔开。 这些构件之间的电压差产生放电，其使激光器中的气体电离化学反应并产生相干辐射。 由介电材料制成的第一和第二管在激光器中沿与第一方向横向（优选垂直）的第二方向间隔开。 阳极，阴极和管沿横向（优选垂直于）第一和第二方向的方向延伸穿过激光器。 这些管优选是至少99.9％的纯多晶氧化铝陶瓷，其余的金属元素比铝更多。 由与材料均匀（优选相同）的材料制成的套管与相邻管端附近的管是一体的。 第一个电导体延伸穿过管子。 第二电导体（优选弹性的）接触（优选线接触）外管表面以限定具有第一导体和管材料的电容器。 定位构件与弹性构件相配合地可移动地接合在管端附近的管外表面，该弹性构件与管构成三（3）线接触，用于将管精确地定位在空腔中。 当在每个管内的第一导体和这种管之间的导体之间施加电压脉冲时，从外管表面产生的电晕放电产生紫外光，其预先使空腔中的气体离子化。 当产生阳极 - 阴极放电时，这有助于空腔中的气体的电离。

公开(公告)号：US20180034229A1

公开(公告)日：2018-02-01

申请号：US15654335

申请日：2017-07-19

Applicant: Via Mechanics, Ltd.

Inventor： Nobuyoshi OHTANI ,  Goichi OHMAE

IPC: H01S3/041 ,  H01S3/038 ,  H01S3/04 ,  H01S3/03 ,  H01S3/00 ,  H01S3/034 ,  H01S3/22 ,  H01S3/063

CPC classification number: H01S3/041 ,  H01S3/0071 ,  H01S3/0315 ,  H01S3/034 ,  H01S3/0384 ,  H01S3/0401 ,  H01S3/0402 ,  H01S3/063 ,  H01S3/22 ,  H03B17/00

Abstract: In a laser oscillator, a pair of electrodes is disposed in a housing into which a gas is sealed, a waveguide is formed by the pair of electrodes, and a laser beam is configured to be extracted from an end of the housing. The laser oscillator includes a mirror holder attached to an end of the electrode, the end serving as an end of the waveguide, and a reflection mirror attached to the mirror holder and reflecting a laser beam generated in the waveguide. In the laser oscillator, a passage through which a cooling medium is passed is formed inside each of the pair of electrodes.

公开(公告)号：US20160365696A1

公开(公告)日：2016-12-15

申请号：US15245245

申请日：2016-08-24

Applicant: Gigaphoton Inc.

Inventor： Hiroaki TSUSHIMA ,  Kouji KAKIZAKI ,  Takashi MATSUNAGA ,  Takeshi ASAYAMA ,  Hisakazu KATSUUMI ,  Hiroshi UMEDA ,  Hiroyuki IKEDA

IPC: H01S3/036 ,  H01S3/225 ,  H01S3/038 ,  H01S3/041 ,  H01S3/04

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/134 ,  H01S3/225

Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.

Abstract translation: 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。

公开(公告)号：US09252557B2

公开(公告)日：2016-02-02

申请号：US14040490

申请日：2013-09-27

Applicant: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES

Inventor： Yu Wang ,  Yi Zhou ,  Jinbin Ding ,  Bin Liu ,  Lijia Zhang ,  Jiangshan Zhao ,  Pengfei Sha

IPC: H01S3/22 ,  H01S3/08 ,  H01S3/07 ,  H01S3/23 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/00 ,  H01S3/03 ,  H01S3/036 ,  H01S3/10

CPC classification number: H01S3/08 ,  H01S3/005 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/076 ,  H01S3/08068 ,  H01S3/09713 ,  H01S3/10092 ,  H01S3/225 ,  H01S3/2333 ,  H01S3/235 ,  H01S3/2383

Abstract: A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.

Abstract translation: 公开了一种单腔双电极放电腔和包括这种放电腔的准分子激光器。 放电腔可以包括空腔体和两组主放电电极。 空腔体可以包括左室和右室，其布置成形成对称的双室腔。 左和右室可以在整个排放腔的对称平面处彼此接合和连通。 两组主放电电极可以分别设置在上侧的左右室中。 根据本公开，可以使用单腔配置来实现双腔配置的功能，例如MOPA，MOPO和MOPRA。 因此，可以降低系统复杂性并且还确保放电腔中的放电同步。

公开(公告)号：US09246297B2

公开(公告)日：2016-01-26

申请号：US14629734

申请日：2015-02-24

Applicant: FANUC CORPORATION

Inventor： Masahiro Honda

IPC: H01S3/038 ,  H01S3/032 ,  H01S3/034 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041

CPC classification number: H01S3/0384 ,  H01S3/005 ,  H01S3/0323 ,  H01S3/034 ,  H01S3/036 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/104

Abstract: A gas laser oscillator including discharge tubes, main discharge electrodes, auxiliary electrodes, an output mirror which outputs a laser, and a mechanical shutter which cuts off the laser output from the output mirror. To maintain the auxiliary discharge in the state where the laser output is zero, the base discharge command is set to a first command value when the mechanical shutter is closed, and is set to a second command value smaller than the first command value when the mechanical shutter is opened.

Abstract translation: 一种气体激光振荡器，包括放电管，主放电电极，辅助电极，输出激光的输出反射镜，以及切断从输出反射镜输出的激光的机械快门。 为了在激光输出为零的状态下保持辅助放电，当机械快门关闭时，基准放电命令被设定为第一指令值，并且当机械快门关闭时被设置为小于第一命令值的第二命令值 快门打开。