公开(公告)号：US20170222389A1

公开(公告)日：2017-08-03

申请号：US15493106

申请日：2017-04-20

Applicant: Huazhong University of Science and Technology

Inventor： Hanyuan CHEN ,  Yingxiong QIN ,  Hao PENG ,  Chenhao WAN ,  Sichen LONG ,  Xiangxi WU ,  Xiahui TANG

IPC: H01S3/032 ,  H01S3/0943 ,  H01S3/22 ,  H01S3/04 ,  H01S3/036 ,  H01S3/034 ,  H01S3/038 ,  H01S3/0941

CPC classification number: H01S3/0323 ,  H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0388 ,  H01S3/0404 ,  H01S3/0405 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/094084 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/0943 ,  H01S3/09713 ,  H01S3/0975 ,  H01S3/2207

Abstract: A gas laser, including: a semiconductor laser, an optical beam-shaping system, a pair of electrodes, a discharge tube, a rear mirror, and an output mirror. The pair of electrodes includes two electrodes. The electrodes are symmetrically disposed at an outer layer of the discharge tube in parallel. The electrodes are connected to a radio-frequency power supply via a matching network, and the electrodes operate to modify working gas in the discharge tube through radio-frequency discharge. The rear mirror and the output mirror are disposed at two end surfaces of the discharge tube, respectively. The rear mirror, taken together with the output mirror and the discharge tube, form a resonant cavity. The output mirror is configured to output a laser beam.

公开(公告)号：US08814522B2

公开(公告)日：2014-08-26

申请号：US11818829

申请日：2007-06-15

Applicant: Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

Inventor： Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

IPC: H01S3/22

CPC classification number: F04D29/283 ,  F04D17/04 ,  F04D29/666 ,  H01S3/036 ,  H01S3/09713

Abstract: A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m≠n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.

Abstract translation: 公开了一种用于在横向激发的脉冲式气体放电激光器中循环气体的横流风扇叶轮，并且可以包括多个毂，所述轮毂沿着叶轮的旋转轴线间隔开并且建立至少两个叶轮段，其中第一段具有 输出流在第二段的80-120％之内，第一和第二段具有不同的叶片通过频率。 在该方面的一些实施例中，第一段可以具有n个叶片，第二段m个叶片，m≠n。 在一个实施例中，叶轮可以配置为n = 29和m = 23，在另一个实施例中，叶轮可以配置为n = 23和m = 19。 可以配置叶轮，其中n和m是素数。

公开(公告)号：US08369373B2

公开(公告)日：2013-02-05

申请号：US12729394

申请日：2010-03-23

Applicant: David John Allie ,  Joel Fontanella

Inventor： David John Allie ,  Joel Fontanella

IPC: H01S3/22

CPC classification number: H01S3/09713 ,  H01S3/09702 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/2232

Abstract: An RF powered CO2 gas-discharge laser includes discharge electrodes and a lasing gas mixture between the electrode. The lasing gas mixture is ionized when the RF power is applied to the electrodes and laser action is initiated when the RF power has been applied for a duration sufficient to ignite a discharge in the lasing gas mixture. The gas mixture is pre-ionized by periodically applying the RF power to the electrodes for a predetermined period during which ignition of a discharge is not expected to occur. RF power reflected back from the electrodes is monitored. If the monitored power falls below a predetermined level indicative of the imminent onset of laser action before the predetermined duration has elapsed, application of the RF power to the electrodes is terminated to prevent the laser action from occurring.

Abstract translation: RF功率CO2气体放电激光器包括放电电极和电极之间的激光气体混合物。 当RF功率施加到电极时，激光气体混合物被电离，并且当已经施加RF功率持续足以点燃激光气体混合物中的放电的持续时间时开始激光作用。 气体混合物通过周期性地将电力施加到电极预定的期间，预期不会发生放电点火，预先进行电离。 监测从电极反射回来的RF功率。 如果在预定持续时间过去之前监视功率低于指示激光作用即将开始的预定水平，则终止对电极施加RF功率以防止发生激光作用。

公开(公告)号：US07889775B2

公开(公告)日：2011-02-15

申请号：US12487730

申请日：2009-06-19

Applicant: Gongxue Hua

Inventor： Gongxue Hua

IPC: H01S3/22

CPC classification number: H01S3/0346 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/0401 ,  H01S3/09713 ,  H01S3/2232

Abstract: A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips arranged along the edges of the electrodes. An auxiliary electrode is located at each end of the live electrode, co-planar with the live electrode, longitudinally spaced part from the live electrode vertically spaced apart from, but electrically connected to, the ground electrode. The auxiliary electrode has two raised portions spaced apart by a distance less than the distance between inside edges of the ceramic strips. The raised portions of the auxiliary electrode prevent erosion of the ceramic strips by laser radiation generated in the resonator when the laser is operating.

Abstract translation: 二氧化碳气体放电激光器包括垂直间隔开并与之电隔离的细长平面带电和接地电极。 电极通过沿着电极边缘布置的陶瓷隔离片隔开。 辅助电极位于活电极的每个端部，与带电电极共平面，与从接地电极垂直间隔开但电连接的带电电极的纵向间隔开的部分。 辅助电极具有间隔开距离小于陶瓷条的内边缘之间的距离的两个凸起部分。 当激光器工作时，辅助电极的凸起部分防止在谐振器中产生的激光辐射对陶瓷带的侵蚀。

公开(公告)号：US07542502B2

公开(公告)日：2009-06-02

申请号：US11237535

申请日：2005-09-27

Applicant: Thomas D. Steiger ,  Richard C. Ujazdowski

Inventor： Thomas D. Steiger ,  Richard C. Ujazdowski

IPC: H01S3/097

CPC classification number: H01S3/09713 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/225

Abstract: A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.

Abstract translation: 公开了一种用于气体放电激光器的电晕放电型前置电离器组件。 组件可以包括限定管孔的电极和中空的电介质管。 在一个方面，电极可以包括第一细长导电构件，其具有设置在管的孔中的第一端。 此外，电极可以包括第二细长导电构件，其具有设置在孔中并与第一导电构件的第一端隔开的第一端。 对于组件，第一和第二导电构件可以保持在相同的电压电位。

公开(公告)号：US07230965B2

公开(公告)日：2007-06-12

申请号：US10672722

申请日：2003-09-26

Applicant: Timothy S. Dyer ,  Richard G. Morton ,  Walter D. Gillespie ,  Thomas D. Steiger

Inventor： Timothy S. Dyer ,  Richard G. Morton ,  Walter D. Gillespie ,  Thomas D. Steiger

IPC: H01S3/22 ,  H01S3/03 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

Abstract: Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

Abstract translation: 公开了一种用于氟气体放电激光器的电极，其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线形状，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体上直的部分相交，并且顶部部分斜切远离第一和第二侧壁部分的不对称排出侧 阳极。

公开(公告)号：US07079565B2

公开(公告)日：2006-07-18

申请号：US10727718

申请日：2003-12-04

Applicant: Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

Inventor： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

IPC: H01S3/097

CPC classification number: H01S3/038 ,  H01S3/09713 ,  H01S3/225

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract translation: 通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。 电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。 绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于 控制电极的放电面积。 可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。

公开(公告)号：US06987790B2

公开(公告)日：2006-01-17

申请号：US10776137

申请日：2004-02-11

Applicant: Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

Inventor： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

IPC: H01S3/22 ,  H01S3/223 ,  H01S3/097

CPC classification number: H01S3/225 ,  H01S3/09713 ,  H01S3/2366

Abstract: Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

Abstract translation: 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

公开(公告)号：US5153892A

公开(公告)日：1992-10-06

申请号：US640168

申请日：1991-01-11

Applicant: Yukio Kawakubo ,  Yoshiyuki Kubota ,  Kouji Sasaki ,  Atsushi Miki ,  Satoshi Ogura

Inventor： Yukio Kawakubo ,  Yoshiyuki Kubota ,  Kouji Sasaki ,  Atsushi Miki ,  Satoshi Ogura

IPC: H01S3/038 ,  H01S3/07 ,  H01S3/0971

CPC classification number: H01S3/076 ,  H01S3/038 ,  H01S3/09713

Abstract: A novel gas laser apparatus is disclosed, which comprises a hermetic container with a gas laser medium sealed therein, a plurality of main discharge electrodes arranged in the hermetic container for causing the main discharge in the gas laser medium thereby to generate a laser beam, and a device for subjecting the discharge space between the main discharge electrodes to preionization over a wide range thereof before the main discharge by use of a reflected laser beam or an ultraviolet ray lamp.

Abstract translation: 公开了一种新颖的气体激光装置，其包括密封在其中的气体激光介质的密封容器，多个主放电电极，布置在密封容器中，用于使气体激光介质中的主放电产生激光束;以及 通过使用反射的激光束或紫外线灯，在主放电之前，使主放电电极之间的放电空间在其宽范围内进行预处理的装置。

公开(公告)号：US5077749A

公开(公告)日：1991-12-31

申请号：US489059

申请日：1990-03-07

Applicant: Etsuo Noda ,  Osami Morimiya ,  Setsuo Suzuki ,  Shintaro Hata

Inventor： Etsuo Noda ,  Osami Morimiya ,  Setsuo Suzuki ,  Shintaro Hata

IPC: H01S3/03 ,  H01S3/038 ,  H01S3/0971

CPC classification number: H01S3/09713 ,  H01S3/03 ,  H01S3/038

Abstract: Disclosed is a laser apparatus for effecting laser oscillation by exciting a laser medium by discharge between an anode and a cathode opposedly arranged to each other in a discharge tube, comprising means disposed in the discharge tube to support both the electrodes movably along the axial direction of the discharge tube so as to prevent warp of the electrodes on laser oscillation and keep the parallelism therebetween with high accuracy. Also disclosed is a laser apparatus comprising main discharge means for effecting laser oscillation by exciting a laser medium by generating discharge, and preionization means for generating ionization previously to the discharge by the main discharge means so as to stabilize laser oscillation under a high gas pressure and a high current density.

Abstract translation: 公开了一种激光装置，其用于通过在放电管内相互排列的阳极和阴极之间的放电激发激光介质来实现激光振荡，该激光装置包括：设置在放电管中的装置，用于将两个电极沿着轴向方向 放电管，以防止激光振荡时的电极翘曲，并以高精度保持其间的平行度。 还公开了一种激光装置，其包括主放电装置，用于通过产生放电来激发激光介质来实现激光振荡;以及预放电装置，用于先前通过主放电装置放电产生电离，以便在高气压下稳定激光振荡， 高电流密度。