公开(公告)号：US07006548B1

公开(公告)日：2006-02-28

申请号：US09434024

申请日：1999-11-04

申请人： Katsutomo Terashima ,  Akira Sumitani ,  Eiji Sunaka

发明人： Katsutomo Terashima ,  Akira Sumitani ,  Eiji Sunaka

IPC分类号： H01S3/223

CPC分类号： H01S3/225

摘要： Burst and spike characteristics in an excimer laser output in a burst operation are efficiently improved. Xenon gas is added from a compact Xe gas cylinder to gases for excimer laser in a chamber supplied from an Ar/Ne gas cylinder and an Ar/F2/Ne gas cylinder, a ratio of the xenon gas is detected by an Xe gas sensor, and the supply of the xenon gas from the Xe gas cylinder to the chamber is controlled by a gas controller.

摘要翻译： 在突发操作中的准分子激光器输出中的突发和尖峰特性被有效地提高。 从Ar / Ne气瓶和Ar / F2 / Ne气瓶提供的腔室中，将氙气从紧凑型Xe气瓶添加到准分子激光器的气体中，氙气体传感器检测氙气的比例， 并且由气体控制器控制从Xe气瓶向腔室供应氙气。