公开(公告)号：US08630067B2

公开(公告)日：2014-01-14

申请号：US12571609

申请日：2009-10-01

申请人： Toshiki Ando ,  Hideki Fuchino ,  Tsutomu Fukuda ,  Emi Sugimoto

发明人： Toshiki Ando ,  Hideki Fuchino ,  Tsutomu Fukuda ,  Emi Sugimoto

IPC分类号： G11B5/56

CPC分类号： G11B5/4873 ,  G11B5/4826 ,  G11B5/5552 ,  Y10T156/10

摘要： A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative.The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.

摘要翻译： 磁头悬架31具有响应于施加到其上的电压而变形的压电元件13，具有附接有压电元件13的附接部分的基板33和具有挠曲件39的负载梁35.前端 负载梁35根据压电元件13的变形而在摆动方向上移动。磁头悬架31包括将压电元件13附接到安装部的粘合剂。 将粘合剂逐一施加到附着部分并硬化。 首先在附着部分施加并固化的粘合剂中的至少一种是电绝缘的。 磁头悬架31适当地保持压电元件13和安装部之间的电绝缘，充分发挥原有的功能，并确保刚性平衡和适当的振动特性。

公开(公告)号：US5591264A

公开(公告)日：1997-01-07

申请号：US405133

申请日：1995-03-16

申请人： Emi Sugimoto ,  Akira Yoshio ,  Yoshinori Ito

发明人： Emi Sugimoto ,  Akira Yoshio ,  Yoshinori Ito

IPC分类号： B05C11/08 ,  G03F7/16 ,  B05B13/00

CPC分类号： B05C11/08 ,  G03F7/162

摘要： A spin coating device for a substrate, in which a uniform thin film can be formed by applying an application liquid to a substrate and the quality of the substrate can be further improved. The spin coating device for a substrate comprises a turntable 2 for holding and rotating a substrate 1; an application liquid supply means 4 for supplying an application liquid 3 to the rotating substrate 1: splash preventing means 20, which are arranged at the periphery of the substrate 1 held by the turntable 2, prevent the droplets of the application liquid from splashing and provide with an opening portion 10 for circulating the flow A of external air in an area ranging from the central portion toward the peripheral portion of the substrate 1 held by the turntable 2. Exhaust means 8 and 9 for exhausting air from within the splash preventing means 20 are provided.

摘要翻译： 用于基材的旋涂装置，其中可以通过将涂布液施加到基底上而形成均匀的薄膜，并且可以进一步提高基材的质量。 用于基板的旋涂装置包括用于保持和旋转基板1的转盘2; 向旋转基板1供给涂布液3的涂布液供给装置4：设置在由转台2保持的基板1的周围的防溅装置20，防止涂布液的液滴飞溅， 具有用于使外部空气流A在从由转台2保持的基板1的中心部分朝向周边部分的范围内循环的开口部分10.用于从防溅装置20内排出空气的排气装置8和9 被提供。