公开(公告)号：US06522076B2

公开(公告)日：2003-02-18

申请号：US09817346

申请日：2001-03-27

申请人： Klaus Goedicke ,  Torsten Winkler ,  Michael Jungh{overscore (a)}hnel ,  Karsten Handt ,  Henry Güldner ,  Henrik Wolf ,  Frank Eckholz

发明人： Klaus Goedicke ,  Torsten Winkler ,  Michael Jungh{overscore (a)}hnel ,  Karsten Handt ,  Henry Güldner ,  Henrik Wolf ,  Frank Eckholz

IPC分类号： H05B3126

CPC分类号： H01J37/3444 ,  H01J37/3405 ,  H05H1/46

摘要： Process and control arrangement for introducing pulsing energy introduction into magnetron discharges. The process includes feeding a charge to the electrodes of a magnetron arrangement via a ignition source at a time t0, and, after the feeding of the electric charge, determining an ignition of the magnetron discharge. The process also includes introducing a current, having a predetermined value, from a boost source at a time t1, and, at a time t2, separating the ignition source from the electrodes of the magnetron arrangement. The introduction of the current by the boost source continues for a certain duration tEIN. The process also includes interrupting the introduction of the electric energy for a predetermined time tAUS.

摘要翻译： 将脉冲能量引入磁控管放电的过程和控制布置。 该过程包括在时间t0经由点火源将电荷馈送到磁控管装置的电极，并且在馈送电荷之后，确定磁控管放电的点火。 该过程还包括在时间t1从升压源引入具有预定值的电流，并且在时间t2将点火源与磁控管装置的电极分开。 升压源引入的电流持续一段时间tEIN。 该过程还包括中断电能在预定时间tAUS的引入。