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1.发明授权Combination inductive write head and magnetoresistive (MR) read head with improved topography 有权组合感应写磁头和磁阻（MR）读头，具有改进的形貌公开(公告)号：US06324036B1
公开(公告)日：2001-11-27
申请号：US09320480
申请日：1999-05-26
IPC分类号： G11B5147
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3967 , G11B2005/3996
摘要： An apparatus and method of making is disclosed for a combination read/write head having improved topography. The disclosed read/write head combines a magnetoresistive (MR) read head with an inductive magnetic write head. The head is planarized at a second shield layer with a planarization layer such that pads and leads connecting the pads to the MR sensor and coil are on a planar surface of the planaritzation layer. This planarization layer allows first and second shield layers to be optimized for the MR sensor to be used and also separates the pads and leads from the substrate. The combination head has first and second shield layers formed on a substrate, the shield layers being separated by a read gap. A magnetoresistive (MR) sensor and MR leads are located in the read gap. The planarization layer is then formed on the substrate, surrounding the first and second shield layers creating a planar surface that is coplanar with a top surface of the second shield layer. A write gap layer is fabricated along with a pole piece. The pole piece being separated by the write gap layer at the ABS and connected to the second shield layer at a back gap that is recessed in the head from the ABS. An insulation layer and coil layer embedded in the insulation layer with the insulation layer and the coil layer being located between the second shield layer and the pole piece. Pads and leads are formed on the planarization layer, with the leads electrically connected to the MR sensor and the coil.
摘要翻译： 公开了一种具有改进的形貌的组合读/写头的制造装置和方法。 所公开的读/写头将磁阻（MR）读头与感应磁写头相结合。 头部在具有平坦化层的第二屏蔽层处被平坦化，使得将焊盘连接到MR传感器和线圈的焊盘和引线位于平面化层的平面表面上。 该平坦化层允许为要使用的MR传感器优化第一和第二屏蔽层，并且还将衬垫和引线与衬底分离。 组合头具有形成在基板上的第一和第二屏蔽层，屏蔽层被读取间隙分开。 磁阻（MR）传感器和MR引线位于读取间隙中。 然后在衬底上形成平坦化层，围绕第一和第二屏蔽层，形成与第二屏蔽层的顶表面共平面的平坦表面。 写间隙层与极片一起制造。 该极片在ABS处由写入间隙层分开，并且在与ABS相对的头部凹陷的后部间隙处连接到第二屏蔽层。 绝缘层和线圈层嵌入绝缘层中，绝缘层和线圈层位于第二屏蔽层和极片之间。 在平坦化层上形成垫和引线，引线电连接到MR传感器和线圈。
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公开(公告)号：US06554878B1
公开(公告)日：2003-04-29
申请号：US09332490
申请日：1999-06-14
IPC分类号： C09G102
CPC分类号： C09G1/02
摘要： In a first aspect a slurry is provided for chemically mechanically polishing alumina and nickel iron to a common plane and in a second aspect a slurry is provided for additionally chemically mechanically polishing copper to a common plane. The slurry includes a first concentration of colloidal silica, a second concentration of potassium and/or sodium persulfate and a third concentration of ammonium persulfate. In the first aspect the first and second concentrations are tailored to chemically mechanically polish the alumina and the nickel iron at the same rate to a common plane and in the second aspect the slurry includes a third concentration of ammonium persulfate at a proper ratio to the potassium or sodium persulfate to chemically mechanically polish the copper at the same rate as the other materials to the same plane.
摘要翻译： 在第一方面，提供了用于将氧化铝和镍铁化学机械抛光到公共平面的浆料，并且在第二方面，提供了用于将铜附加地化学机械抛光到共同平面的浆料。 浆料包括第一浓度的胶体二氧化硅，第二浓度的钾和/或过硫酸钠和第三浓度的过硫酸铵。 在第一方面，第一和第二浓度被定制成以与普通平面相同的速率化学机械抛光氧化铝和镍铁，并且在第二方面，浆料包括与钾的适当比例的第三浓度的过硫酸铵 或过硫酸钠以与其他材料相同的速率将铜化学机械抛光到同一平面。
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3.发明授权Planar stitched write head having write coil insulated with inorganic insulation 失效平面针迹写头，具有用无机绝缘绝缘的写线圈公开(公告)号：US06377423B2
公开(公告)日：2002-04-23
申请号：US09761034
申请日：2001-01-16
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。
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4.发明授权Planar stitched write head having write coil insulated with inorganic insulation 失效平面针迹写头，具有用无机绝缘绝缘的写线圈公开(公告)号：US06226149B1
公开(公告)日：2001-05-01
申请号：US09212119
申请日：1998-12-15
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。
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